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onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div></div><div id="rli7ikm" class="content"><p><span>需求數(shù)量：</span>0</p><p><span>價格要求：</span>面議</p><p><span>所在地：</span>廣東省</p><p><span>包裝要求：</span><span style="color: #f30;"></span></p><p><span>產(chǎn)品關(guān)鍵詞：</span>珠海感應(yīng)耦合等離子刻蝕材料刻蝕,光刻</p><p><span>***更新：</span>2020-11-27 20:51:16</p><p><span id="click" >瀏覽次數(shù)：7次</span></p><a rel="nofollow" class="button">聯(lián)系我們</a></div></div><div id="edamo88" class="rightbox"><h3>公司基本資料信息</h3><p style="border:0;"><a rel="nofollow">廣東省科學(xué)院半導(dǎo)體研究所</a></p><p><span>聯(lián)系人：</span>曾昭燴</p><p><span>郵箱: </span>512480780@qq.com</p><p><span>電話: </span>15018420573</p><p><span>傳真: </span>020_</p><p><span>網(wǎng)址: </span>http://www.gdssli.com</p><p><span>手機(jī): </span>020-61086422</p><p><span>地址: </span>長興路363號</p><p>[當(dāng)前離線] <a rel="nofollow"> [加為商友] </a><a rel="nofollow"> [發(fā)送信件] </a></p></div></div><div id="tr283me" class="page-proshow02"><p class="title">詳細(xì)說明</p><div id="cwy393h" class="box"><p><p style="text-indent:25px">以研究光譜而聞名的近代德國科學(xué)家約瑟夫·弗勞恩霍夫?qū)⑦@兩種波長的光譜分別命名為G線和I線。這也是 g-line光刻和 i-line光刻技術(shù)命名的由來。g-line與i-line光刻膠均使用線性酚醛成分作為樹脂主體，重氮萘醌成分（DQN 體系）作為感光劑，珠海感應(yīng)耦合等離子刻蝕材料刻蝕。未經(jīng)曝光的DQN成分作為克制劑，可以十倍或者更大的倍數(shù)降低光刻膠在顯影液中的溶解速度。曝光后，重氮萘醌(DQN)基團(tuán)轉(zhuǎn)變?yōu)橄┩?，與水接觸時，進(jìn)一步轉(zhuǎn)變?yōu)檐崃u酸，從而得以在曝光區(qū)被稀堿水顯影時除去。由此，曝光過的光刻膠會溶解于顯影液而被去除，珠海感應(yīng)耦合等離子刻蝕材料刻蝕，珠海感應(yīng)耦合等離子刻蝕材料刻蝕，而未曝光的光刻膠部分則得以保留。光刻膠涂覆后，在硅片邊緣的正反兩面都會有光刻膠的堆積。珠海感應(yīng)耦合等離子刻蝕材料刻蝕</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="珠海感應(yīng)耦合等離子刻蝕材料刻蝕,光刻" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637420927862704157/9135298.png"></div><p style="text-indent:25px">光刻膠所屬的微電子化學(xué)品是電子行業(yè)與化工行業(yè)交叉的領(lǐng)域，是典型的技術(shù)密集行業(yè)。從事微電子化學(xué)品業(yè)務(wù)需要具備與電子產(chǎn)業(yè)前沿發(fā)展相匹配的關(guān)鍵生產(chǎn)技術(shù)，如混配技術(shù)、分離技術(shù)、純化技術(shù)以及與生產(chǎn)過程相配套的分析檢驗(yàn)技術(shù)、環(huán)境處理與監(jiān)測技術(shù)等。同時，下游電子產(chǎn)業(yè)多樣化的使用場景要求微電子化學(xué)品生產(chǎn)企業(yè)有較強(qiáng)的配套能力，以及時研發(fā)和改進(jìn)產(chǎn)品工藝來滿足客戶的個性化需求。光刻膠的生產(chǎn)工藝主要過程是將感光材料、樹脂、溶劑等主要原料在恒溫恒濕 1000 級的黃光區(qū)潔凈房進(jìn)行混合，在氮?dú)鈿怏w保護(hù)下充分?jǐn)嚢瑁蛊涑浞只旌闲纬删嘁后w，經(jīng)過多次過濾，并通過中間過程控制和檢驗(yàn)，使其達(dá)到工藝技術(shù)和質(zhì)量要求，較后做產(chǎn)品檢驗(yàn)，合格后在氮?dú)鈿怏w保護(hù)下包裝、打標(biāo)、入庫。云南曝光光刻由于電子束直寫光刻曝光效率低，主要用于實(shí)驗(yàn)室小樣品納米制造。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="珠海感應(yīng)耦合等離子刻蝕材料刻蝕,光刻" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637420927924461853/6298069.png"></div><p style="text-indent:25px">當(dāng)KrF光刻膠可以被大規(guī)模商用時，市場卻發(fā)生了極大的變化。在這十年間，全球分工發(fā)生了重大的變化，一方面，美國的制造業(yè)開始出局，尤其是1986年半導(dǎo)體市場大滑坡，使美國光刻機(jī)三巨頭遭受重創(chuàng)，新產(chǎn)品研發(fā)停滯。對于如今的日本光刻膠企業(yè)來說，沒有了外敵，更多的是內(nèi)部斗爭，相互搶占市場，搶占下一次先機(jī)。從較近各家的動向來看，國產(chǎn)光刻膠項(xiàng)目頻繁上馬，日本的巨頭也在擴(kuò)大產(chǎn)能，像是大戰(zhàn)拉開序幕的前戲，實(shí)則有本質(zhì)的差別。外國的建廠，本質(zhì)上是要滿足全球代工企業(yè)與面板產(chǎn)業(yè)的需求。</p><p style="text-indent:25px">在半導(dǎo)體制程的光刻工藝中，集成電路線寬的特征尺寸可以由瑞利公式確定：CD= k1*λ/NA。CD (Critical Dimension)表示集成電路制程中的特征尺寸；k1是瑞利常數(shù)，是光刻系統(tǒng)中工藝和材料的一個相關(guān)系數(shù)；λ是曝光波長，而NA(Numerical Aperture)則表示了光刻機(jī)的孔徑數(shù)值。因此，光刻機(jī)需要通過降低瑞利常數(shù)和曝光波長，增大孔徑尺寸來制造具有更小特征尺寸的集成電路。其中降低曝光波長與光刻機(jī)使用的光源以及光刻膠材料高度相關(guān)。歷史上光刻機(jī)所使用的光源波長呈現(xiàn)出與集成電路關(guān)鍵尺寸同步縮小的趨勢。目前EUV技術(shù)采用的曝光波長為13．5nm。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="珠海感應(yīng)耦合等離子刻蝕材料刻蝕,光刻" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637420927849247128/7036831.png"></div><p style="text-indent:25px">雖然g-line光刻膠和i-line 光刻膠使用的成分類似，但是其樹脂和感光劑在微觀結(jié)構(gòu)上均有變化，因而具有不同的分辨率。G-line光刻膠適用于0.5um(500nm)以上尺寸的集成電路制作，而i-line光刻膠使用于0.35um（350nm至0.5um（500nm）尺寸的集成電路制作。此外，這兩種光刻膠均可以用于液晶平板顯示等較大面積電子產(chǎn)品的制作。90年代后半期，遵從摩爾定律的指引，半導(dǎo)體制程工藝尺寸開始縮小到0.35um（350nm）以下，因而開始要求更高分辨率的光刻技術(shù)。深紫外光由于波長更短，衍射作用小，所以可以用于更高分辨率的光刻光源。MIT已經(jīng)采用的電子束光刻技術(shù)分辨率將推進(jìn)到9nm。磁控濺射真空鍍膜廠商</p><p style="text-indent:25px">電子束曝光技術(shù)是推動微電子技術(shù)和微細(xì)加工技術(shù)進(jìn)一步發(fā)展的關(guān)鍵技術(shù)。珠海感應(yīng)耦合等離子刻蝕材料刻蝕</p><p style="text-indent:25px">顯影液：正性光刻膠的顯影液。正膠的顯影液位堿性水溶液。KOH和NaOH因?yàn)闀砜蓜与x子污染（MIC，Movable Ion Contamination），所以在IC制造中一般不用。較普通的正膠顯影液是四甲基氫氧化銨（TMAH）（標(biāo)準(zhǔn)當(dāng)量濃度為0.26，溫度15～25C）。在I線光刻膠曝光中會生成羧酸，TMAH顯影液中的堿與酸中和使曝光的光刻膠溶解于顯影液，而未曝光的光刻膠沒有影響；在化學(xué)放大光刻膠（CAR，Chemical Amplified Resist）中包含的酚醛樹脂以PHS形式存在。CAR中的PAG產(chǎn)生的酸會去除PHS中的保護(hù)基團(tuán)（t-BOC），從而使PHS快速溶解于TMAH顯影液中。珠海感應(yīng)耦合等離子刻蝕材料刻蝕</p><p style="text-indent:25px">廣東省科學(xué)院半導(dǎo)體研究所總部位于長興路363號，是一家面向半導(dǎo)體光電子器件、功率電子器件、MEMS、生物芯片等前沿領(lǐng)域，致力于打造***的公益性、開放性、支撐性樞紐中心。平臺擁有半導(dǎo)體制備工藝所需的整套儀器設(shè)備，建立了一條實(shí)驗(yàn)室研發(fā)線和一條中試線，加工尺寸覆蓋2-6英寸（部分8英寸），同時形成了一支與硬件有機(jī)結(jié)合的專業(yè)人才隊(duì)伍。平臺當(dāng)前緊抓技術(shù)創(chuàng)新和公共服務(wù)，面向國內(nèi)外高校、科研院所以及企業(yè)提供開放共享，為技術(shù)咨詢、創(chuàng)新研發(fā)、技術(shù)驗(yàn)證以及產(chǎn)品中試提供支持。的公司。廣東省半導(dǎo)體所作為面向半導(dǎo)體光電子器件、功率電子器件、MEMS、生物芯片等前沿領(lǐng)域，致力于打造***的公益性、開放性、支撐性樞紐中心。平臺擁有半導(dǎo)體制備工藝所需的整套儀器設(shè)備，建立了一條實(shí)驗(yàn)室研發(fā)線和一條中試線，加工尺寸覆蓋2-6英寸（部分8英寸），同時形成了一支與硬件有機(jī)結(jié)合的專業(yè)人才隊(duì)伍。平臺當(dāng)前緊抓技術(shù)創(chuàng)新和公共服務(wù)，面向國內(nèi)外高校、科研院所以及企業(yè)提供開放共享，為技術(shù)咨詢、創(chuàng)新研發(fā)、技術(shù)驗(yàn)證以及產(chǎn)品中試提供支持。的企業(yè)之一，為客戶提供良好的微納加工技術(shù)服務(wù)，真空鍍膜技術(shù)服務(wù)，紫外光刻技術(shù)服務(wù)，材料刻蝕技術(shù)服務(wù)。廣東省半導(dǎo)體所繼續(xù)堅(jiān)定不移地走高質(zhì)量發(fā)展道路，既要實(shí)現(xiàn)基本面穩(wěn)定增長，又要聚焦關(guān)鍵領(lǐng)域，實(shí)現(xiàn)轉(zhuǎn)型再突破。廣東省半導(dǎo)體所始終關(guān)注電子元器件行業(yè)。滿足市場需求，提高產(chǎn)品價值，是我們前行的力量。</p></p><br 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