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class="bigimg"><div><p class="pic"><img src="https://tyunfile.71360.com/UploadFile/shbaiyaxx/637471795538411922/6516628.png" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div><div id="lfhj2fo" class="smallimg"><div><p class="pic"><img src="https://tyunfile.71360.com/UploadFile/shbaiyaxx/637471795538411922/6516628.png" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div></div><div id="bq32sks" class="content"><p><span>需求數(shù)量：</span>0</p><p><span>價格要求：</span>面議</p><p><span>所在地：</span>上海市</p><p><span>包裝要求：</span><span style="color: #f30;"></span></p><p><span>產(chǎn)品關(guān)鍵詞：</span>上海自動光刻機廠家推薦,光刻機</p><p><span>***更新：</span>2021-01-28 10:16:48</p><p><span id="click" >瀏覽次數(shù)：2次</span></p><a rel="nofollow" class="button">聯(lián)系我們</a></div></div><div id="7nzbqmy" class="rightbox"><h3>公司基本資料信息</h3><p style="border:0;"><a rel="nofollow">上海百雅信息科技發(fā)展有限公司</a></p><p><span>聯(lián)系人：</span>陳先生</p><p><span>郵箱: </span>3210954212@qq.com</p><p><span>電話: </span>15301888512</p><p><span>傳真: </span>021_</p><p><span>網(wǎng)址: </span>http://www.shbaiyauto001.com</p><p><span>手機: </span>021-58569792</p><p><span>地址: </span>楊園南路116號337室</p><p>[當前離線] <a rel="nofollow"> [加為商友] </a><a rel="nofollow"> [發(fā)送信件] </a></p></div></div><div id="qfxp8km" class="page-proshow02"><p class="title">詳細說明</p><div id="2a29g38" class="box"><p><p style="text-indent:25px">光刻機的工作原理是通過一系列的光源能量、形狀控制手段，將光束透射過畫著線路圖的掩模，經(jīng)物鏡補償各種光學誤差，將線路圖成比例縮小后映射到硅片上。然后使用化學方法顯影，得到刻在硅片上的電路圖。一般的光刻工藝要經(jīng)歷硅片表面清洗烘干、涂底、旋涂光刻膠、軟烘、對準曝光、后烘、顯影、硬烘、激光刻蝕等工序。光刻機的制造和維護需要高度的光學和電子工業(yè)基礎(chǔ)，因此，世界上只有少數(shù)廠家掌握，上海自動光刻機廠家推薦。光刻機又名掩模對準曝光機、曝光系統(tǒng)、光刻系統(tǒng)等，是制造芯片的中心裝備。它采用類似照片沖印的技術(shù)，把掩膜版上的精細圖形通過光線的曝光印制到硅片上，上海自動光刻機廠家推薦。光刻機的種類可分為：接觸式曝光、接近式曝光、投影式曝光，上海自動光刻機廠家推薦。光刻機：由于質(zhì)量較重，使得曝光深度有限，一般不超過0.5um。上海自動光刻機廠家推薦</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="上海自動光刻機廠家推薦,光刻機" src="https://tyunfile.71360.com/UploadFile/shbaiyaxx/637471795538411922/6516628.png"></div><p style="text-indent:25px">光刻機（MaskAligner)又名：掩模對準曝光機，曝光系統(tǒng)，光刻系統(tǒng)等，是制造芯片的中心裝備。它采用類似照片沖印的技術(shù)，把掩膜版上的精細圖形通過光線的曝光印制到硅片上。光刻機的品牌眾多，根據(jù)采用不同技術(shù)路線的可以歸納成如下幾類：較高的投影式光刻機可分為步進投影和掃描投影光刻機兩種，分辨率通常七納米至幾微米之間，較高光刻機號稱世界上較精密的儀器，世界上已有1.2億美金一臺的光刻機。較高光刻機堪稱現(xiàn)代光學工業(yè)之花，其制造難度之大，全世界只有少數(shù)幾家公司能夠制造。國外品牌主要以荷蘭ASML（鏡頭來自德國），日本Nikon（intel曾經(jīng)購買過Nikon的較高光刻機）和日本Canon三大品牌為主。位于我國的SMEE已研制出具有自主知識產(chǎn)權(quán)的投影式中端光刻機，形成產(chǎn)品系列初步實現(xiàn)海內(nèi)外銷售。正在進行其他各系列產(chǎn)品的研發(fā)制作工作。生產(chǎn)線和研發(fā)用的低端光刻機為接近、接觸式光刻機，分辨率通常在數(shù)微米以上。主要有德國SUSS、美國MYCRONXQ4006、以及中國品牌。上海自動光刻機廠家推薦光刻機性能指標：光光源波長為紫外、深紫外和極紫外區(qū)域，光源有汞燈，準分子激光器等。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="上海自動光刻機廠家推薦,光刻機" src="https://tyunfile.71360.com/UploadFile/shbaiyaxx/637471795381623737/7065530.png"></div><p style="text-indent:25px">光刻機的工作原理：1、清洗玻璃并烘干，首先準備一塊玻璃，玻璃的大小可以根據(jù)需要裁減，然后將玻璃清洗干凈烘干，備用。2、在玻璃上涂覆光刻膠，光刻膠有正性和負性之分。3、干燥，采用固化干燥機讓玻璃揮發(fā)液體成分，干燥的目的是為了玻璃進一步加工的需要。4、曝光，曝光的方式有很多種，比如激光直寫、通過掩模板同時曝光等都可以。5、去膠，去膠的方法也很多，比如放在刻蝕劑中，用正性膠的話，被光照到的地方就會被溶解，沒有光照到的地方光刻膠保留下來，到這里就已經(jīng)在光刻膠上刻蝕出了所需圖形。6、清洗，去膠結(jié)束后，對玻璃進行清洗。7、轉(zhuǎn)移，轉(zhuǎn)移的方法也有很多，可以采取離子束轟擊，光刻膠和玻璃同時被轟擊等等，光刻膠被轟擊完后，暴露出來的玻璃也被轟擊，就把光刻膠上的圖形轉(zhuǎn)移到玻璃上。這樣就完成了。</p><p style="text-indent:25px">光刻機一般來說是用激光進行的，也就是在玻璃上刻圖形,大致步驟為：1.清洗玻璃，2.干燥，3.在玻璃上涂覆光致抗蝕劑，4.固化，5.曝光，6.去膠，7.清洗，8.轉(zhuǎn)移。經(jīng)過一次光刻的芯片可以繼續(xù)涂膠、曝光，越復雜的芯片，線路圖的層數(shù)越多，也需要更精密的曝光控制過程。光刻機的主要性能指標有：1.支持基片的尺寸范圍，2.分辨率；分辨率是對光刻工藝加工可以達到的較細線條精度的一種描述方式,3.對準精度,4.曝光方式：曝光方式分為接觸接近式、投影式和直寫式。5.光源波長：曝光光源波長為紫外、深紫外和極紫外區(qū)域，光源有汞燈，準分子激光器等。6.光強均勻性,7.生產(chǎn)效率。光刻機一般根據(jù)操作的簡便性分為三種：A、手動：指的是通過手調(diào)旋鈕改變它的X軸，Y軸和thita角度來完成對準，對準精度是在多層曝光時層間圖案的定位精度。B、半自動：指的是對準可以通過電動軸根據(jù)CCD的進行定位。C、自動：指的是通過程序控制，自動光刻機主要是滿足工廠對于處理量的需要。光刻機的曝光：曝光出來的圖形與掩膜板上的圖形分辨率相當，設備簡單。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="上海自動光刻機廠家推薦,光刻機" src="https://tyunfile.71360.com/UploadFile/shbaiyaxx/637471795570199284/2221089.png"></div><p style="text-indent:25px">光刻機，其實就是一種將圖紙上的芯片電路設計通過類似照片沖印的技術(shù)印制到硅片上的機器。簡單來說，就是在硅片上覆蓋一層具有高度光敏感性的光刻膠，再用紫外光透過掩模照射硅片，被光線照射到的光刻膠會發(fā)生化學反應。此后用特定顯影液去洗硅片上的光刻膠，就完成了把電路圖從掩模轉(zhuǎn)移到硅片上的工作，這是制造芯片中的重要一步。這個技術(shù)到底有多難呢，對于不先進的光刻機來說，通過大力研發(fā)這當然并不難實現(xiàn)，但是對于現(xiàn)在高度集成的芯片來說，5nm甚至5nm以下的芯片制造工藝，就需要更加精細的光刻機了。光刻機性能指標：支持基片的尺寸范圍，分辨率、對準精度、曝光方式、光源波長、光強均勻性、生產(chǎn)效率等。上海自動光刻機廠家推薦</p><p style="text-indent:25px">光刻機性能指標：對準精度是在多層曝光時層間圖案的定位精度。上海自動光刻機廠家推薦</p><p style="text-indent:25px">國產(chǎn)光刻機水平進展和前景分析：光刻機是諸多現(xiàn)代技術(shù)高度集成的產(chǎn)物，這些技術(shù)是：物理、光學、化學、材料科學、精密機械、精密控制和工程學等等。在過去的二十幾年中，光刻機作為器件制造業(yè)的重要工具，經(jīng)歷了許多次**。這些變革是伴隨著微處理器和DllAM特征尺寸的不斷縮減發(fā)生的。由于光刻的分辨率與曝光波長、物鏡光闌孔徑的關(guān)系為：因此光刻機的**主要發(fā)生在這樣幾個方面：大NA非球面鏡光學系統(tǒng)、短波長光源、分辨率增強技術(shù)（降低Kl因子）和同步掃描工作臺等。20多年前，日本尼康生產(chǎn)的初臺光刻機是NSRl010G型光刻機，曝光波長為436nm，分辨率為l”m，曝光面積為10mm×10mm，其產(chǎn)率對100mm硅片來講是每小時20片。而～F光刻機的分辨率在2003年將達到0，1”m，其產(chǎn)率對300rflin硅片來講是每小時100片。給出了每一代光刻機的光源波長、分辨率、NA和K1的演變過程。上海自動光刻機廠家推薦</p><p style="text-indent:25px">上海百雅信息科技發(fā)展有限公司總部位于楊園南路116號337室，是一家許可項目:各類工程建設活動。(依法須經(jīng)批準的項目，經(jīng)相關(guān)部門批準后方可開展經(jīng)營活動，具體經(jīng)營項目以相關(guān)部門批準文件或許可證件為準) 一般項目:計算機、網(wǎng)絡、船舶領(lǐng)域內(nèi)的技術(shù)開發(fā)、技術(shù)轉(zhuǎn) 讓、技術(shù)服務、技術(shù)咨詢，工業(yè)控制計算機及系統(tǒng)銷售，日用百貨、建筑材料、服裝、五金交電、鞋帽的銷售，貨物進出口，技術(shù)進出口，工業(yè)自動控制系統(tǒng)裝置銷售，機械設備研發(fā)，軟件開發(fā)。(除依法須經(jīng)批準的項目外，憑營業(yè)執(zhí)照依法自主開展經(jīng)營活動) 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