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clearfix"><div id="k2ukea8" class="twoCol"><div id="88kekgw" class="page-proshow clearfix"><p class="current"> 當(dāng)前位置:<a href="http://www.cdcfah.com/">首頁(yè)?<a href="http://www.cdcfah.com/cp/">產(chǎn)品供應(yīng)</a>?<a href="http://www.cdcfah.com/cp/first-_dzyqj/">電子元器件</a>?<a href="http://www.cdcfah.com/cp/second-dzyqj_dzcllbjjgj/">電子材料、零部件、結(jié)構(gòu)件</a>?<a href="http://www.cdcfah.com/cp/third-dzcllbjjgj_bdtcl/">半導(dǎo)體材料</a>?山東PECVD真空鍍膜廣東省科學(xué)院半導(dǎo)體研究所供應(yīng)</p><div id="sykige8" class="leftbox clearfix"><h1>山東PECVD真空鍍膜廣東省科學(xué)院半導(dǎo)體研究所供應(yīng)</h1><div id="wusio02" class="proBig"><div id="0mkqgcq" class="bigimg"><div><p class="pic"><img src="https://tyunfile.71360.com/UploadFile/bdtyys888/637420927938846734/5270569.png" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div><div id="y2cigek" class="smallimg"><div><p class="pic"><img src="https://tyunfile.71360.com/UploadFile/bdtyys888/637420927938846734/5270569.png" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div></div><div id="omcag0k" class="content"><p><span>需求數(shù)量：</span>0</p><p><span>價(jià)格要求：</span>面議</p><p><span>所在地：</span>廣東省</p><p><span>包裝要求：</span><span style="color: #f30;"></span></p><p><span>產(chǎn)品關(guān)鍵詞：</span>山東PECVD真空鍍膜,光刻</p><p><span>***更新：</span>2020-11-30 07:25:44</p><p><span id="click" >瀏覽次數(shù)：4次</span></p><a rel="nofollow" class="button">聯(lián)系我們</a></div></div><div id="yca0wag" class="rightbox"><h3>公司基本資料信息</h3><p style="border:0;"><a rel="nofollow">廣東省科學(xué)院半導(dǎo)體研究所</a></p><p><span>聯(lián)系人：</span>曾昭燴</p><p><span>郵箱: </span>512480780@qq.com</p><p><span>電話: </span>15018420573</p><p><span>傳真: </span>020_</p><p><span>網(wǎng)址: </span>http://www.gdssli.com</p><p><span>手機(jī): </span>020-61086422</p><p><span>地址: </span>長(zhǎng)興路363號(hào)</p><p>[當(dāng)前離線] <a rel="nofollow"> [加為商友] </a><a rel="nofollow"> [發(fā)送信件] </a></p></div></div><div id="8mao88e" class="page-proshow02"><p class="title">詳細(xì)說(shuō)明</p><div id="ywe0kaq" class="box"><p><p style="text-indent:25px">在平板顯示行業(yè)；主要使用的光刻膠有彩色及黑色光刻膠、LCD觸摸屏用光刻膠、TFT-LCD正性光刻膠等。在光刻和蝕刻生產(chǎn)環(huán)節(jié)中，山東PECVD真空鍍膜，光刻膠涂覆于晶體薄膜表面，經(jīng)曝光、顯影和蝕刻等工序?qū)⒐庹郑ㄑ谀ぐ妫┥系膱D形轉(zhuǎn)移到薄膜上，山東PECVD真空鍍膜，形成與掩膜版對(duì)應(yīng)的幾何圖形。在PCB行業(yè)；主要使用的光刻膠有干膜光刻膠、濕膜光刻膠，山東PECVD真空鍍膜、感光阻焊油墨等。干膜是用特殊的薄膜貼在處理后的敷銅板上，進(jìn)行曝光顯影；濕膜和光成像阻焊油墨則是涂布在敷銅板上，待其干燥后進(jìn)行曝光顯影。電子束入射到抗蝕劑及基片上時(shí)，電子會(huì)與固體材料的原子發(fā)生“碰撞”產(chǎn)生電子散射現(xiàn)象。山東PECVD真空鍍膜</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="山東PECVD真空鍍膜,光刻" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637420927938846734/5270569.png"></div><p style="text-indent:25px">光刻膠旋轉(zhuǎn)速度，速度越快，厚度越?。挥绊懝饪棠z均勻性的參數(shù)：旋轉(zhuǎn)加速度，加速越快越均勻；與旋轉(zhuǎn)加速的時(shí)間點(diǎn)有關(guān)。一般旋涂光刻膠的厚度與曝光的光源波長(zhǎng)有關(guān)（因?yàn)椴煌?jí)別的曝光波長(zhǎng)對(duì)應(yīng)不同的光刻膠種類和分辨率）：I-line較厚，約0.7～3μm；KrF的厚度約0.4～0.9μm；ArF的厚度約0.2～0.5μm。軟烘方法：真空熱板，85～120C,30～60秒；目的：除去溶劑（4～7%）；增強(qiáng)黏附性；釋放光刻膠膜內(nèi)的應(yīng)力；防止光刻膠玷污設(shè)備；邊緣光刻膠的去除：光刻膠涂覆后，在硅片邊緣的正反兩面都會(huì)有光刻膠的堆積。材料刻蝕加工工廠光刻膠旋轉(zhuǎn)速度，速度越快，厚度越??；</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="山東PECVD真空鍍膜,光刻" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637420928348710004/2475470.png"></div><p style="text-indent:25px">由于CAR光刻膠的光致酸劑產(chǎn)生的酸本身并不會(huì)在曝光過(guò)程中消耗而**作為催化劑而存在，因此少量的酸就可以持續(xù)地起到有效作用。CAR光刻膠的光敏感性很強(qiáng)，所需要從深紫外輻射中吸收的能量很少，較大加強(qiáng)了光刻的效率。CAR 光刻膠曝光速遞是 DQN 光刻膠的10倍左右。從 90 年代后半期開(kāi)始，光刻光源就開(kāi)始采用 248nm 的 KrF 激光；而從 2000 年代開(kāi)始，光刻就進(jìn)一步轉(zhuǎn)向使用193nm 波長(zhǎng)的 ArF 準(zhǔn)分子激光作為光源。在那之后一直到現(xiàn)在的約 20 年里，193nm 波長(zhǎng)的 ArF 準(zhǔn)分子激光一直是半導(dǎo)體制程領(lǐng)域性能較可靠，使用較普遍的光刻光源。</p><p style="text-indent:25px">光聚合型光刻膠采用烯類單體，在光作用下生成自由基，進(jìn)一步引發(fā)單體聚合，較后生成聚合物；光分解型光刻膠，采用含有重氮醌類化合物(DQN)材料作為感光劑，其經(jīng)光照后,發(fā)生光分解反應(yīng)，可以制成正性光刻膠；光交聯(lián)型光刻膠采用聚乙烯醇月桂酸酯等作為光敏材料，在光的作用下，形成一種不溶性的網(wǎng)狀結(jié)構(gòu)，而起到抗蝕作用，可以制成負(fù)性光刻膠。在半導(dǎo)體集成電路光刻技術(shù)開(kāi)始使用深紫外（DUV）光源以后，化學(xué)放大（CAR）技術(shù)逐漸成為行業(yè)應(yīng)用的主流。在化學(xué)放大光刻膠技術(shù)中，樹(shù)脂是具有化學(xué)基團(tuán)保護(hù)因而難以溶解的聚乙烯?；瘜W(xué)放大光刻膠使用光致酸劑（PAG）作為光引發(fā)劑。一般的光刻工藝要經(jīng)歷硅片表面清洗烘干、涂底、旋涂光刻膠、軟烘、對(duì)準(zhǔn)曝光、后烘、顯影、硬烘等工序。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="山東PECVD真空鍍膜,光刻" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637420928264901383/2832508.png"></div><p style="text-indent:25px">在半導(dǎo)體制程的光刻工藝中，集成電路線寬的特征尺寸可以由瑞利公式確定：CD= k1*λ/NA。CD (Critical Dimension)表示集成電路制程中的特征尺寸；k1是瑞利常數(shù)，是光刻系統(tǒng)中工藝和材料的一個(gè)相關(guān)系數(shù)；λ是曝光波長(zhǎng)，而NA(Numerical Aperture)則表示了光刻機(jī)的孔徑數(shù)值。因此，光刻機(jī)需要通過(guò)降低瑞利常數(shù)和曝光波長(zhǎng)，增大孔徑尺寸來(lái)制造具有更小特征尺寸的集成電路。其中降低曝光波長(zhǎng)與光刻機(jī)使用的光源以及光刻膠材料高度相關(guān)。歷史上光刻機(jī)所使用的光源波長(zhǎng)呈現(xiàn)出與集成電路關(guān)鍵尺寸同步縮小的趨勢(shì)。掩膜板與光刻膠層的略微分開(kāi)，可以避免與光刻膠直接接觸而引起的掩膜板損傷。天津材料刻蝕多少錢(qián)</p><p style="text-indent:25px">由于所有的光學(xué)材料對(duì)該波長(zhǎng)的光有強(qiáng)烈的吸收，所以只能采取反射式的光路。山東PECVD真空鍍膜</p><p style="text-indent:25px">光刻分辨率Resolution：0.18～0.25μm（一般采用了偏軸照明OAI_Off-Axis Illumination和相移掩膜板技術(shù)PSM_Phase Shift Mask增強(qiáng)）；套刻精度Overlay：65nm；產(chǎn)能Throughput：30～60wafers/hour（200mm）；視場(chǎng)尺寸Field Size：25×32mm；后烘方法：熱板，110～130C,1分鐘。目的：a、減少駐波效應(yīng)；b、激發(fā)化學(xué)增強(qiáng)光刻膠的PAG產(chǎn)生的酸與光刻膠上的保護(hù)基團(tuán)發(fā)生反應(yīng)并移除基團(tuán)使之能溶解于顯影液。顯影方法：a、整盒硅片浸沒(méi)式顯影（Batch Development）。缺點(diǎn)：顯影液消耗很大；顯影的均勻性差；b、連續(xù)噴霧顯影（Continuous Spray Development）/自動(dòng)旋轉(zhuǎn)顯影（Auto-rotation Development）。一個(gè)或多個(gè)噴嘴噴灑顯影液在硅片表面，同時(shí)硅片低速旋轉(zhuǎn)（100～500rpm）。山東PECVD真空鍍膜</p><p style="text-indent:25px">廣東省科學(xué)院半導(dǎo)體研究所位于長(zhǎng)興路363號(hào)，是一家專業(yè)的面向半導(dǎo)體光電子器件、功率電子器件、MEMS、生物芯片等前沿領(lǐng)域，致力于打造***的公益性、開(kāi)放性、支撐性樞紐中心。平臺(tái)擁有半導(dǎo)體制備工藝所需的整套儀器設(shè)備，建立了一條實(shí)驗(yàn)室研發(fā)線和一條中試線，加工尺寸覆蓋2-6英寸（部分8英寸），同時(shí)形成了一支與硬件有機(jī)結(jié)合的專業(yè)人才隊(duì)伍。平臺(tái)當(dāng)前緊抓技術(shù)創(chuàng)新和公共服務(wù)，面向國(guó)內(nèi)外高校、科研院所以及企業(yè)提供開(kāi)放共享，為技術(shù)咨詢、創(chuàng)新研發(fā)、技術(shù)驗(yàn)證以及產(chǎn)品中試提供支持。公司。芯辰實(shí)驗(yàn)室,微納加工是廣東省科學(xué)院半導(dǎo)體研究所的主營(yíng)品牌，是專業(yè)的面向半導(dǎo)體光電子器件、功率電子器件、MEMS、生物芯片等前沿領(lǐng)域，致力于打造***的公益性、開(kāi)放性、支撐性樞紐中心。平臺(tái)擁有半導(dǎo)體制備工藝所需的整套儀器設(shè)備，建立了一條實(shí)驗(yàn)室研發(fā)線和一條中試線，加工尺寸覆蓋2-6英寸（部分8英寸），同時(shí)形成了一支與硬件有機(jī)結(jié)合的專業(yè)人才隊(duì)伍。平臺(tái)當(dāng)前緊抓技術(shù)創(chuàng)新和公共服務(wù)，面向國(guó)內(nèi)外高校、科研院所以及企業(yè)提供開(kāi)放共享，為技術(shù)咨詢、創(chuàng)新研發(fā)、技術(shù)驗(yàn)證以及產(chǎn)品中試提供支持。公司，擁有自己**的技術(shù)體系。我公司擁有強(qiáng)大的技術(shù)實(shí)力，多年來(lái)一直專注于面向半導(dǎo)體光電子器件、功率電子器件、MEMS、生物芯片等前沿領(lǐng)域，致力于打造***的公益性、開(kāi)放性、支撐性樞紐中心。平臺(tái)擁有半導(dǎo)體制備工藝所需的整套儀器設(shè)備，建立了一條實(shí)驗(yàn)室研發(fā)線和一條中試線，加工尺寸覆蓋2-6英寸（部分8英寸），同時(shí)形成了一支與硬件有機(jī)結(jié)合的專業(yè)人才隊(duì)伍。平臺(tái)當(dāng)前緊抓技術(shù)創(chuàng)新和公共服務(wù)，面向國(guó)內(nèi)外高校、科研院所以及企業(yè)提供開(kāi)放共享，為技術(shù)咨詢、創(chuàng)新研發(fā)、技術(shù)驗(yàn)證以及產(chǎn)品中試提供支持。的發(fā)展和創(chuàng)新，打造高指標(biāo)產(chǎn)品和服務(wù)。廣東省半導(dǎo)體所始終以質(zhì)量為發(fā)展，把顧客的滿意作為公司發(fā)展的動(dòng)力，致力于為顧客帶來(lái)***的微納加工技術(shù)服務(wù)，真空鍍膜技術(shù)服務(wù)，紫外光刻技術(shù)服務(wù)，材料刻蝕技術(shù)服務(wù)。</p></p><br 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