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class="rightbox"><h3>公司基本資料信息</h3><p style="border:0;"><a rel="nofollow">廣東省科學(xué)院半導(dǎo)體研究所</a></p><p><span>聯(lián)系人：</span>曾昭燴</p><p><span>郵箱: </span>512480780@qq.com</p><p><span>電話: </span>15018420573</p><p><span>傳真: </span>020_</p><p><span>網(wǎng)址: </span>http://www.gdssli.com</p><p><span>手機(jī): </span>020-61086422</p><p><span>地址: </span>長(zhǎng)興路363號(hào)</p><p>[當(dāng)前離線] <a rel="nofollow"> [加為商友] </a><a rel="nofollow"> [發(fā)送信件] </a></p></div></div><div id="s8b33md" class="page-proshow02"><p class="title">詳細(xì)說明</p><div id="i4foplx" class="box"><p><p style="text-indent:25px">由于電子束直寫光刻曝光效率低，曝光光刻實(shí)驗(yàn)室，主要用于實(shí)驗(yàn)室小樣品納米制造。而電子束曝光要適應(yīng)大批量生產(chǎn)，如何進(jìn)一步提高曝光速度是個(gè)難題，曝光光刻實(shí)驗(yàn)室。為了解決電子束光刻的效率問題，通常將其與其他光刻技術(shù)配合使用。例如為解決曝光效率問題，通常采用電子束光刻與光學(xué)光刻進(jìn)行匹配與混合光刻的辦法，即大部分曝光工藝仍然采用現(xiàn)有十分成熟的半導(dǎo)體光學(xué)光刻工藝制備，只有納米尺度的圖形或者工藝層由電子束光刻實(shí)現(xiàn)，曝光光刻實(shí)驗(yàn)室。在傳統(tǒng)光學(xué)光刻技術(shù)逼近工藝極限的情況下，電子束光刻技術(shù)將有可能出現(xiàn)在與目前193i為表示的光學(xué)曝光技術(shù)及EUV技術(shù)相匹配的混合光刻中，在實(shí)現(xiàn)10nm級(jí)光刻中起重要的作用。應(yīng)該提到的是電子束曝光技術(shù)是推動(dòng)微電子技術(shù)和微細(xì)加工技術(shù)進(jìn)一步發(fā)展的關(guān)鍵技術(shù)，在微電子、微光學(xué)和微機(jī)械等微系統(tǒng)微細(xì)加工領(lǐng)域有著普遍的應(yīng)用前景，而且除電子束直寫光刻技術(shù)本身以外，幾乎所有的新一代光刻技術(shù)所需要的掩模制作還是離不開電子束曝光技術(shù)。電子束曝光的波長(zhǎng)取決于電子能量，電子能量越高，曝光的波長(zhǎng)越短。曝光光刻實(shí)驗(yàn)室</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="曝光光刻實(shí)驗(yàn)室,光刻" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637420928314774417/346258.png"></div><p style="text-indent:25px">光刻膠要有極好的穩(wěn)定性和一致性，如果質(zhì)量稍微出點(diǎn)問題，損失將會(huì)是巨大的。去年2月，某半導(dǎo)體代工企業(yè)因?yàn)楣饪棠z的原因?qū)е戮A污染，報(bào)廢十萬片晶圓，直接導(dǎo)致5.5億美元的賬面損失。除了以上原因外，另一個(gè)重要原因是，經(jīng)過幾十年的發(fā)展，光刻膠已經(jīng)是一個(gè)相當(dāng)成熟且固化的產(chǎn)業(yè)。2010年光刻膠的**出現(xiàn)井噴，2013年之后，相關(guān)**的申請(qǐng)已經(jīng)開始銳減。市場(chǎng)較小，技術(shù)壁壘又高，這意味著對(duì)于企業(yè)來說，發(fā)展光刻膠性價(jià)比不高，即便研發(fā)成功一款光刻膠，也要面臨較長(zhǎng)的認(rèn)證周期，需要與下游企業(yè)建立合作關(guān)系。曝光光刻實(shí)驗(yàn)室電子束光刻技術(shù)是利用電子器具所產(chǎn)生的電子束，在涂布有電子抗蝕劑（光刻膠）的基片表面上掃描寫出圖形。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="曝光光刻實(shí)驗(yàn)室,光刻" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637420927812909186/4134250.png"></div><p style="text-indent:25px">邊緣的光刻膠一般涂布不均勻，不能得到很好的圖形，而且容易發(fā)生剝離（Peeling）而影響其它部分的圖形。所以需要去除。方法：a、化學(xué)的方法（Chemical EBR）。軟烘后，用PGMEA或EGMEA去邊溶劑，噴出少量在正反面邊緣處，并小心控制不要到達(dá)光刻膠有效區(qū)域；b、光學(xué)方法（Optical EBR）。即硅片邊緣曝光（WEE，Wafer Edge Exposure）。在完成圖形的曝光后，用激光曝光硅片邊緣，然后在顯影或特殊溶劑中溶解；對(duì)準(zhǔn)方法：a、預(yù)對(duì)準(zhǔn)，通過硅片上的notch或者flat進(jìn)行激光自動(dòng)對(duì)準(zhǔn)；b、通過對(duì)準(zhǔn)標(biāo)志（Align Mark），位于切割槽（Scribe Line）上。</p><p style="text-indent:25px">光聚合型光刻膠采用烯類單體，在光作用下生成自由基，進(jìn)一步引發(fā)單體聚合，較后生成聚合物；光分解型光刻膠，采用含有重氮醌類化合物(DQN)材料作為感光劑，其經(jīng)光照后,發(fā)生光分解反應(yīng)，可以制成正性光刻膠；光交聯(lián)型光刻膠采用聚乙烯醇月桂酸酯等作為光敏材料，在光的作用下，形成一種不溶性的網(wǎng)狀結(jié)構(gòu)，而起到抗蝕作用，可以制成負(fù)性光刻膠。在半導(dǎo)體集成電路光刻技術(shù)開始使用深紫外（DUV）光源以后，化學(xué)放大（CAR）技術(shù)逐漸成為行業(yè)應(yīng)用的主流。在化學(xué)放大光刻膠技術(shù)中，樹脂是具有化學(xué)基團(tuán)保護(hù)因而難以溶解的聚乙烯。化學(xué)放大光刻膠使用光致酸劑（PAG）作為光引發(fā)劑。由于所有的光學(xué)材料對(duì)該波長(zhǎng)的光有強(qiáng)烈的吸收，所以只能采取反射式的光路。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="曝光光刻實(shí)驗(yàn)室,光刻" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637420927930506819/3089764.png"></div><p style="text-indent:25px">現(xiàn)在全球范圍內(nèi)，能夠生產(chǎn)光刻機(jī)的企業(yè)也是鳳毛麟角，只有荷蘭某公司和日本的，還有上海某某公司能夠生產(chǎn)出現(xiàn)。芯片的研發(fā)以及制造現(xiàn)在已經(jīng)成為一條完整的產(chǎn)業(yè)鏈，而對(duì)于芯片的研發(fā)，現(xiàn)在有能夠做到**研發(fā)的其實(shí)并不是很多。但是比較**的芯片研發(fā)廠商這些企業(yè)**是具有研發(fā)芯片的能力，要想制造出來芯片，還需要使用到一種無法繞開的設(shè)備：光刻機(jī)。但是由于過程光刻機(jī)領(lǐng)域的發(fā)展落后于西方，某公司能夠量產(chǎn)的制程**只有90nm，而荷蘭公司所能夠生產(chǎn)的光刻機(jī)現(xiàn)在已經(jīng)能夠達(dá)到7nm甚至是5nm的制程，所以想要將芯片領(lǐng)域牢牢的掌握在自己手機(jī)，就必須要發(fā)展光刻機(jī)設(shè)備。EUV及EBL曝光技術(shù)相配合，使193nm浸沒式光刻技術(shù)延伸到15和11nm工藝節(jié)點(diǎn)。黑龍江功率器件光刻</p><p style="text-indent:25px">193nm浸沒式光刻技術(shù)是光刻技術(shù)中較為長(zhǎng)壽且較富有競(jìng)爭(zhēng)力的，也是目前如何進(jìn)一步發(fā)揮潛力的研究熱點(diǎn)。曝光光刻實(shí)驗(yàn)室</p><p style="text-indent:25px">光刻膠旋轉(zhuǎn)速度，速度越快，厚度越??；影響光刻膠均勻性的參數(shù)：旋轉(zhuǎn)加速度，加速越快越均勻；與旋轉(zhuǎn)加速的時(shí)間點(diǎn)有關(guān)。一般旋涂光刻膠的厚度與曝光的光源波長(zhǎng)有關(guān)（因?yàn)椴煌?jí)別的曝光波長(zhǎng)對(duì)應(yīng)不同的光刻膠種類和分辨率）：I-line較厚，約0.7～3μm；KrF的厚度約0.4～0.9μm；ArF的厚度約0.2～0.5μm。軟烘方法：真空熱板，85～120C,30～60秒；目的：除去溶劑（4～7%）；增強(qiáng)黏附性；釋放光刻膠膜內(nèi)的應(yīng)力；防止光刻膠玷污設(shè)備；邊緣光刻膠的去除：光刻膠涂覆后，在硅片邊緣的正反兩面都會(huì)有光刻膠的堆積。曝光光刻實(shí)驗(yàn)室</p><p style="text-indent:25px">廣東省科學(xué)院半導(dǎo)體研究所是一家面向半導(dǎo)體光電子器件、功率電子器件、MEMS、生物芯片等前沿領(lǐng)域，致力于打造***的公益性、開放性、支撐性樞紐中心。平臺(tái)擁有半導(dǎo)體制備工藝所需的整套儀器設(shè)備，建立了一條實(shí)驗(yàn)室研發(fā)線和一條中試線，加工尺寸覆蓋2-6英寸（部分8英寸），同時(shí)形成了一支與硬件有機(jī)結(jié)合的專業(yè)人才隊(duì)伍。平臺(tái)當(dāng)前緊抓技術(shù)創(chuàng)新和公共服務(wù)，面向國內(nèi)外高校、科研院所以及企業(yè)提供開放共享，為技術(shù)咨詢、創(chuàng)新研發(fā)、技術(shù)驗(yàn)證以及產(chǎn)品中試提供支持。的公司，致力于發(fā)展為創(chuàng)新務(wù)實(shí)、誠實(shí)可信的企業(yè)。廣東省半導(dǎo)體所深耕行業(yè)多年，始終以客戶的需求為向?qū)?，為客戶提?**的微納加工技術(shù)服務(wù)，真空鍍膜技術(shù)服務(wù)，紫外光刻技術(shù)服務(wù)，材料刻蝕技術(shù)服務(wù)。廣東省半導(dǎo)體所始終以本分踏實(shí)的精神和必勝的信念，影響并帶動(dòng)團(tuán)隊(duì)取得成功。廣東省半導(dǎo)體所始終關(guān)注自身，在風(fēng)云變化的時(shí)代，對(duì)自身的建設(shè)毫不懈怠，高度的專注與執(zhí)著使廣東省半導(dǎo)體所在行業(yè)的從容而自信。</p></p><br /><p>文章來源地址: http://www.cdcfah.com/cp/2213892.html</p></div></div></div></div></div><div id="vbsjflx" class="page-right twoColRt"><div id="zogstpg" class="box01 margin10 clearfix"><h3><a href="http://www.cdcfah.com/cp/">猜你喜歡</a></h3><div id="obdzqws" 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