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class="content"><p><span>需求數(shù)量：</span>0</p><p><span>價格要求：</span>面議</p><p><span>所在地：</span>廣東省</p><p><span>包裝要求：</span><span style="color: #f30;"></span></p><p><span>產(chǎn)品關(guān)鍵詞：</span>安徽氮化鎵材料刻蝕工藝,材料刻蝕</p><p><span>***更新：</span>2020-12-12 03:19:12</p><p><span id="click" >瀏覽次數(shù)：1次</span></p><a rel="nofollow" class="button">聯(lián)系我們</a></div></div><div id="v5lxbvr" class="rightbox"><h3>公司基本資料信息</h3><p style="border:0;"><a rel="nofollow">廣東省科學院半導體研究所</a></p><p><span>聯(lián)系人：</span>曾昭燴</p><p><span>郵箱: </span>512480780@qq.com</p><p><span>電話: </span>15018420573</p><p><span>傳真: </span>020_</p><p><span>網(wǎng)址: </span>http://www.gdssli.com</p><p><span>手機: </span>020-61086422</p><p><span>地址: </span>長興路363號</p><p>[當前離線] <a rel="nofollow"> [加為商友] </a><a rel="nofollow"> [發(fā)送信件] </a></p></div></div><div id="hj3htbx" class="page-proshow02"><p class="title">詳細說明</p><div id="n5v5tfx" class="box"><p><p style="text-indent:25px">二氧化硅的干法刻蝕：刻蝕原理氧化物的等離子體刻蝕工藝大多采用含有氟碳化合物的氣體進行刻蝕。使用的氣體有四氟化碳(CF)、八氟丙烷(C，F(xiàn)8)、三氟甲烷(CHF3)等，常用的是CF和CHFCF的刻蝕速率比較高但對多晶硅的選擇比不好，CHF3的聚合物生產(chǎn)速率較高，非等離子體狀態(tài)下的氟碳化合物化學穩(wěn)定性較高，且其化學鍵比SiF的化學鍵強，不會與硅或硅的氧化物反應(yīng)。選擇比的改變在當今半導體工藝中，安徽氮化鎵材料刻蝕工藝，Si02的干法刻蝕主要用于接觸孔與金屬間介電層連接洞的非等向性刻蝕方面。前者在S102下方的材料是Si，安徽氮化鎵材料刻蝕工藝，后者則是金屬層，通常是TiN（氮化鈦），因此在Si02的刻蝕中，Si07與Si或TiN的刻蝕選擇比是一個比較重要的因素。刻蝕技術(shù)主要應(yīng)用于半導體器件，集成電路制造，安徽氮化鎵材料刻蝕工藝，薄膜電路，印刷電路和其他微細圖形的加工等。安徽氮化鎵材料刻蝕工藝</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="安徽氮化鎵材料刻蝕工藝,材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343042348191/1704222.png"></div><p style="text-indent:25px">介質(zhì)刻蝕是用于介質(zhì)材料的刻蝕，如二氧化硅。干法刻蝕優(yōu)點是：各向異性好，選擇比高，可控性、靈活性、重復(fù)性好，細線條操作安全，易實現(xiàn)自動化，無化學廢液，處理過程未引入污染，潔凈度高。缺點是：成本高，設(shè)備復(fù)雜。干法刻蝕主要形式有純化學過程（如屏蔽式，下游式，桶式），純物理過程（如離子銑），物理化學過程，常用的有反應(yīng)離子刻蝕RIE，離子束輔助自由基刻蝕ICP等。干法刻蝕方式比較多，一般有：濺射與離子束銑蝕，等離子刻蝕（PlasmaEtching），高壓等離子刻蝕，高密度等離子體（HDP）刻蝕，反應(yīng)離子刻蝕（RIE）。另外，化學機械拋光CMP，剝離技術(shù)等等也可看成是廣義刻蝕的一些技術(shù)。四川硅材料刻蝕服務(wù)干法刻蝕也可以根據(jù)被刻蝕的材料類型來分類，如刻蝕氮化鎵、氧化硅、氮化硅、鋁鎵氮等材料。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="安徽氮化鎵材料刻蝕工藝,材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343031752492/2519204.png"></div><p style="text-indent:25px">反應(yīng)離子刻蝕：這種刻蝕過程同時兼有物理和化學兩種作用。輝光放電在零點幾到幾十帕的低真空下進行。硅片處于陰極電位，放電時的電位大部分降落在陰極附近。大量帶電粒子受垂直于硅片表面的電場加速，垂直入射到硅片表面上,以較大的動量進行物理刻蝕,同時它們還與薄膜表面發(fā)生強烈的化學反應(yīng)，產(chǎn)生化學刻蝕作用。選擇合適的氣體組分，不僅可以獲得理想的刻蝕選擇性和速度，還可以使活性基團的壽命短，這就有效地阻止了因這些基團在薄膜表面附近的擴散所能造成的側(cè)向反應(yīng)，較大提高了刻蝕的各向異性特性。反應(yīng)離子刻蝕是超大規(guī)模集成電路工藝中比較有發(fā)展前景的一種刻蝕方法。</p><p style="text-indent:25px">同樣的刻蝕條件，針對不同的刻蝕暴露面積，刻蝕的速率會有所不一樣。通常來說，刻蝕面積越大，刻蝕的速率越慢，暴露面積越小，刻蝕的速率越快。所以在速率調(diào)試的過程中，需要使用尺寸相當?shù)臉悠愤M來調(diào)試，這樣調(diào)試的刻蝕速率參考意義比較大。氮化硅濕法刻蝕：對于鈍化層，另外一種受青睞的化合物是氮化硅?？梢杂靡后w化學的方法來刻蝕，但是不想其他層那樣容易。使用的化學品是熱磷酸。因酸液在此溫度下會迅速蒸發(fā)，所以刻蝕要在一個裝有冷卻蓋的密封回流容器中進行。主要問題是光刻膠層經(jīng)不起刻蝕劑的溫度和高刻蝕速率。因此，需要一層二氧化硅或其他材料來阻擋刻蝕劑。這兩個因素已導致對于氮化硅使用干法刻蝕技術(shù)。有圖形刻蝕采用掩蔽層來定義要刻蝕掉的表面材料區(qū)域，只有硅片上被選擇的這一部分在刻蝕過程中刻掉。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="安徽氮化鎵材料刻蝕工藝,材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343082944140/2812636.png"></div><p style="text-indent:25px">選擇比指的是在同一刻蝕條件下一種材料與另一種材料相比刻蝕速率快多少，它定義為被刻蝕材料的刻蝕速率與另一種材料的刻蝕速率的比?；緝?nèi)容：高選擇比意味著只刻除想要刻去的那一層材料。一個高選擇比的刻蝕工藝不刻蝕下面一層材料（刻蝕到恰當?shù)纳疃葧r停止）并且保護的光刻膠也未被刻蝕。圖形幾何尺寸的縮小要求減薄光刻膠厚度。高選擇比在較先進的工藝中為了確保關(guān)鍵尺寸和剖面控制是必需的。特別是關(guān)鍵尺寸越小，選擇比要求越高。廣東省科學院半導體研究所。同樣的刻蝕條件，針對不同的刻蝕暴露面積，刻蝕的速率會有所不一樣。安徽氮化鎵材料刻蝕工藝</p><p style="text-indent:25px">在硅材料刻蝕當中，硅針的刻蝕需要用到各向同性刻蝕，硅柱的刻蝕需要用到各項異性刻蝕。安徽氮化鎵材料刻蝕工藝</p><p style="text-indent:25px">光刻膠是另一個剝離的例子?？偟膩碚f，有圖形刻蝕和無圖形刻蝕工藝條件能夠采用干法刻蝕或濕法腐蝕技術(shù)來實現(xiàn)。為了復(fù)制硅片表面材料上的掩膜圖形，刻蝕必須滿足一些特殊的要求。包括幾方面刻蝕參數(shù)：刻蝕速率、刻蝕剖面、刻蝕偏差、選擇比、均勻性、殘留物、聚合物、等離子體誘導損傷、顆粒玷污和缺陷等?？涛g是用化學或物理方法有選擇的從硅片表面去除不需要的材料的過程?？涛g的基本目標是在涂膠的硅片上正確的復(fù)制掩模圖形。有圖形的光刻膠層在刻蝕中不受腐蝕源明顯的侵蝕。安徽氮化鎵材料刻蝕工藝</p><p style="text-indent:25px">廣東省科學院半導體研究所致力于電子元器件，以科技創(chuàng)新實現(xiàn)***管理的追求。廣東省半導體所擁有一支經(jīng)驗豐富、技術(shù)創(chuàng)新的專業(yè)研發(fā)團隊，以高度的專注和執(zhí)著為客戶提供微納加工技術(shù)服務(wù)，真空鍍膜技術(shù)服務(wù)，紫外光刻技術(shù)服務(wù)，材料刻蝕技術(shù)服務(wù)。廣東省半導體所繼續(xù)堅定不移地走高質(zhì)量發(fā)展道路，既要實現(xiàn)基本面穩(wěn)定增長，又要聚焦關(guān)鍵領(lǐng)域，實現(xiàn)轉(zhuǎn)型再突破。廣東省半導體所始終關(guān)注電子元器件行業(yè)。滿足市場需求，提高產(chǎn)品價值，是我們前行的力量。</p></p><br /><p>文章來源地址: http://www.cdcfah.com/cp/2367616.html</p></div></div></div></div></div><div id="fxdpdpj" class="page-right twoColRt"><div id="33j5jxr" class="box01 margin10 clearfix"><h3><a 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