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href="http://www.cdcfah.com/">首頁?<a href="http://www.cdcfah.com/cp/">產(chǎn)品供應(yīng)</a>?<a href="http://www.cdcfah.com/cp/first-_dzyqj/">電子元器件</a>?<a href="http://www.cdcfah.com/cp/second-dzyqj_dzcllbjjgj/">電子材料、零部件、結(jié)構(gòu)件</a>?<a href="http://www.cdcfah.com/cp/third-dzcllbjjgj_bdtcl/">半導(dǎo)體材料</a>?江西半導(dǎo)體材料刻蝕代工廣東省科學(xué)院半導(dǎo)體研究所供應(yīng)</p><div id="mfublzi" class="leftbox clearfix"><h1>江西半導(dǎo)體材料刻蝕代工廣東省科學(xué)院半導(dǎo)體研究所供應(yīng)</h1><div id="pt2blie" class="proBig"><div id="qe4cjt7" class="bigimg"><div><p class="pic"><img src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343042348191/1704222.png" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div><div id="n3k7axz" class="smallimg"><div><p class="pic"><img src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343042348191/1704222.png" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div></div><div id="23xry4n" class="content"><p><span>需求數(shù)量：</span>0</p><p><span>價格要求：</span>面議</p><p><span>所在地：</span>廣東省</p><p><span>包裝要求：</span><span style="color: #f30;"></span></p><p><span>產(chǎn)品關(guān)鍵詞：</span>江西半導(dǎo)體材料刻蝕代工,材料刻蝕</p><p><span>***更新：</span>2020-12-14 05:26:17</p><p><span id="click" >瀏覽次數(shù)：2次</span></p><a rel="nofollow" class="button">聯(lián)系我們</a></div></div><div id="dbtfcws" class="rightbox"><h3>公司基本資料信息</h3><p style="border:0;"><a rel="nofollow">廣東省科學(xué)院半導(dǎo)體研究所</a></p><p><span>聯(lián)系人：</span>曾昭燴</p><p><span>郵箱: </span>512480780@qq.com</p><p><span>電話: </span>15018420573</p><p><span>傳真: </span>020_</p><p><span>網(wǎng)址: </span>http://www.gdssli.com</p><p><span>手機: </span>020-61086422</p><p><span>地址: </span>長興路363號</p><p>[當(dāng)前離線] <a rel="nofollow"> [加為商友] </a><a rel="nofollow"> [發(fā)送信件] </a></p></div></div><div id="sw9rg9k" class="page-proshow02"><p class="title">詳細說明</p><div id="nmbyaul" class="box"><p><p style="text-indent:25px">等向性刻蝕：大部份的濕刻蝕液均是等向性，換言之，對刻蝕接觸點之任何方向腐蝕速度并無明顯差異。故一旦定義好刻蝕掩膜的圖案，暴露出來的區(qū)域，便是往下腐蝕的所在；蘭記婚只要刻蝕配方具高選擇性，便應(yīng)當(dāng)止于所該止之深度。然而有鑒于任何被蝕薄膜皆有其厚度，當(dāng)其被蝕出某深度時，刻蝕掩膜圖案邊緣的部位漸與刻蝕液接觸，故刻蝕液也開始對刻蝕掩膜圖案邊緣的底部，進行蝕掏，這就是所謂的下切或側(cè)向侵蝕現(xiàn)象(undercut)，江西半導(dǎo)體材料刻蝕代工。該現(xiàn)象造成的圖案側(cè)向誤差與被蝕薄膜厚度同數(shù)量級，江西半導(dǎo)體材料刻蝕代工，換言之，江西半導(dǎo)體材料刻蝕代工，濕刻蝕技術(shù)因之而無法應(yīng)用在類似次微米線寬的精密棄擊乃制程技術(shù)！刻蝕基本目標(biāo)是在涂膠的硅片上正確地復(fù)制掩模圖形。江西半導(dǎo)體材料刻蝕代工</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="江西半導(dǎo)體材料刻蝕代工,材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343042348191/1704222.png"></div><p style="text-indent:25px">二氧化硅的干法刻蝕：刻蝕原理氧化物的等離子體刻蝕工藝大多采用含有氟碳化合物的氣體進行刻蝕。使用的氣體有四氟化碳(CF)、八氟丙烷(C，F(xiàn)8)、三氟甲烷(CHF3)等，常用的是CF和CHFCF的刻蝕速率比較高但對多晶硅的選擇比不好，CHF3的聚合物生產(chǎn)速率較高，非等離子體狀態(tài)下的氟碳化合物化學(xué)穩(wěn)定性較高，且其化學(xué)鍵比SiF的化學(xué)鍵強，不會與硅或硅的氧化物反應(yīng)。選擇比的改變在當(dāng)今半導(dǎo)體工藝中，Si02的干法刻蝕主要用于接觸孔與金屬間介電層連接洞的非等向性刻蝕方面。前者在S102下方的材料是Si，后者則是金屬層，通常是TiN（氮化鈦），因此在Si02的刻蝕中，Si07與Si或TiN的刻蝕選擇比是一個比較重要的因素。江西半導(dǎo)體材料刻蝕代工刻蝕是按照掩模圖形或設(shè)計要求對半導(dǎo)體襯底表面或表面覆蓋薄膜進行選擇性刻蝕的技術(shù)。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="江西半導(dǎo)體材料刻蝕代工,材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343060072941/2374410.png"></div><p style="text-indent:25px">選擇比指的是在同一刻蝕條件下一種材料與另一種材料相比刻蝕速率快多少，它定義為被刻蝕材料的刻蝕速率與另一種材料的刻蝕速率的比?；緝?nèi)容：高選擇比意味著只刻除想要刻去的那一層材料。一個高選擇比的刻蝕工藝不刻蝕下面一層材料（刻蝕到恰當(dāng)?shù)纳疃葧r停止）并且保護的光刻膠也未被刻蝕。圖形幾何尺寸的縮小要求減薄光刻膠厚度。高選擇比在較先進的工藝中為了確保關(guān)鍵尺寸和剖面控制是必需的。特別是關(guān)鍵尺寸越小，選擇比要求越高。廣東省科學(xué)院半導(dǎo)體研究所。</p><p style="text-indent:25px">雙等離子體源刻蝕機加裝有兩個射頻（RF）功率源，能夠更精確地控制離子密度與離子能量。位于上部的射頻功率源通過電感線圈將能量傳遞給等離子體從而增加離子密度，但是離子濃度增加的同時離子能量也隨之增加。下部加裝的偏置射頻電源通過電容結(jié)構(gòu)能夠降低轟擊在硅表面離子的能量而不影響離子濃度，從而能夠更好地控制刻蝕速率與選擇比。原子層刻蝕（ALE）為下一代刻蝕工藝技術(shù)，能夠精確去除材料而不影響其他部分。隨著結(jié)構(gòu)尺寸的不斷縮小，反應(yīng)離子刻蝕面臨刻蝕速率差異與下層材料損傷等問題。原子層刻蝕（ALE）能夠精密控制被去除材料量而不影響其他部分，可以用于定向刻蝕或生成光滑表面，是刻蝕技術(shù)研究的熱點之一。目前原子層刻蝕在芯片制造領(lǐng)域并沒有取代傳統(tǒng)的等離子刻蝕工藝，而是被用于原子級目標(biāo)材料精密去除過程。干法刻蝕也可以根據(jù)被刻蝕的材料類型來分類，如刻蝕氮化鎵、氧化硅、氮化硅、鋁鎵氮等材料。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="江西半導(dǎo)體材料刻蝕代工,材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343159292361/4355886.png"></div><p style="text-indent:25px">刻蝕也可以分成有圖形刻蝕和無圖形刻蝕。有圖形刻蝕采用掩蔽層（有圖形的光刻膠）來定義要刻蝕掉的表面材料區(qū)域，只有硅片上被選擇的這一部分在刻蝕過程中刻掉。有圖形刻蝕可用來在硅片上制作多種不同的特征圖形，包括柵、金屬互連線、通孔、接觸孔和溝槽。無圖形刻蝕、反刻或剝離是在整個硅片沒有掩模的情況下進行的，這種刻蝕工藝用于剝離掩模層。反刻是在想要把某一層膜的總的厚度減小時采用的（如當(dāng)平坦化硅片表面時需要減小形貌特征）。廣東省科學(xué)院半導(dǎo)體研究所。在激發(fā)狀態(tài)，氟刻蝕二氧化硅，并將其轉(zhuǎn)化為揮發(fā)性成分由真空系統(tǒng)排出。江西Si材料刻蝕加工工廠</p><p style="text-indent:25px">干法刻蝕種類比較多，包括光揮發(fā)、氣相腐蝕、等離子體腐蝕等。江西半導(dǎo)體材料刻蝕代工</p><p style="text-indent:25px">二氧化硅濕法刻蝕：較普通的刻蝕層是熱氧化形成的二氧化硅?；镜目涛g劑是氫氟酸，它有刻蝕二氧化硅而不傷及硅的優(yōu)點。然而，飽和濃度的氫氟酸在室溫下的刻蝕速率約為300A/s。這個速率對于一個要求控制的工藝來說太快了。在實際中，氫氟酸與水或氟化銨及水混合。以氟化銨來緩沖加速刻蝕速率的氫離子的產(chǎn)生。這種刻蝕溶液稱為緩沖氧化物刻蝕或BOE。針對特定的氧化層厚度，他們以不同的濃度混合來達到合理的刻蝕時間。一些BOE公式包括一個濕化劑用以減小刻蝕表面的張力，以使其均勻地進入更小的開孔區(qū)。江西半導(dǎo)體材料刻蝕代工</p><p style="text-indent:25px">廣東省科學(xué)院半導(dǎo)體研究所致力于電子元器件，是一家服務(wù)型公司。公司業(yè)務(wù)涵蓋微納加工技術(shù)服務(wù)，真空鍍膜技術(shù)服務(wù)，紫外光刻技術(shù)服務(wù)，材料刻蝕技術(shù)服務(wù)等，價格合理，品質(zhì)有保證。公司注重以質(zhì)量為中心，以服務(wù)為理念，秉持誠信為本的理念，打造電子元器件良好品牌。廣東省半導(dǎo)體所立足于全國市場，依托強大的研發(fā)實力，融合前沿的技術(shù)理念，飛快響應(yīng)客戶的變化需求。</p></p><br /><p>文章來源地址: http://www.cdcfah.com/cp/2397529.html</p></div></div></div></div></div><div id="k882by7" class="page-right twoColRt"><div id="dxutjdz" class="box01 margin10 clearfix"><h3><a href="http://www.cdcfah.com/cp/">猜你喜歡</a></h3><div id="rg9zwi7" class="recomPic likePro"><a href="http://www.cdcfah.com/cp/814588.html"><div><img src="http://tyunfile.71360.com/UpLoadFile/2019/11/1/14/637082168864691056_lgpj_5374157.jpg" alt="福建ZF配件哪家強信息推薦自業(yè)物資供應(yīng)" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></div><p>福建ZF配件哪家強信息推薦自業(yè)物資供應(yīng)</p></a></div><div id="73l2p2g" class="recomPic likePro"><a href="http://www.cdcfah.com/cp/846569.html"><div><img 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