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class="home-main container clearfix"><div id="dxellcj" class="twoCol"><div id="p27myk8" class="page-proshow clearfix"><p class="current"> 當(dāng)前位置:<a href="http://www.cdcfah.com/">首頁(yè)?<a href="http://www.cdcfah.com/cp/">產(chǎn)品供應(yīng)</a>?<a href="http://www.cdcfah.com/cp/first-_dzyqj/">電子元器件</a>?<a href="http://www.cdcfah.com/cp/second-dzyqj_dzcllbjjgj/">電子材料、零部件、結(jié)構(gòu)件</a>?<a href="http://www.cdcfah.com/cp/third-dzcllbjjgj_bdtcl/">半導(dǎo)體材料</a>?東莞材料刻蝕加工廠商廣東省科學(xué)院半導(dǎo)體研究所供應(yīng)</p><div id="g9niyk8" class="leftbox clearfix"><h1>東莞材料刻蝕加工廠商廣東省科學(xué)院半導(dǎo)體研究所供應(yīng)</h1><div id="n98qcjq" class="proBig"><div id="fgnfvht" class="bigimg"><div><p class="pic"><img src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430342999769976/1129759.png" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div><div id="gvc3oub" class="smallimg"><div><p class="pic"><img src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430342999769976/1129759.png" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div></div><div id="edkwrdf" class="content"><p><span>需求數(shù)量：</span>0</p><p><span>價(jià)格要求：</span>面議</p><p><span>所在地：</span>廣東省</p><p><span>包裝要求：</span><span style="color: #f30;"></span></p><p><span>產(chǎn)品關(guān)鍵詞：</span>東莞材料刻蝕加工廠商,材料刻蝕</p><p><span>***更新：</span>2020-12-15 04:25:53</p><p><span id="click" >瀏覽次數(shù)：1次</span></p><a rel="nofollow" class="button">聯(lián)系我們</a></div></div><div id="ho2taho" class="rightbox"><h3>公司基本資料信息</h3><p style="border:0;"><a rel="nofollow">廣東省科學(xué)院半導(dǎo)體研究所</a></p><p><span>聯(lián)系人：</span>曾昭燴</p><p><span>郵箱: </span>512480780@qq.com</p><p><span>電話: </span>15018420573</p><p><span>傳真: </span>020_</p><p><span>網(wǎng)址: </span>http://www.gdssli.com</p><p><span>手機(jī): </span>020-61086422</p><p><span>地址: </span>長(zhǎng)興路363號(hào)</p><p>[當(dāng)前離線] <a rel="nofollow"> [加為商友] </a><a rel="nofollow"> [發(fā)送信件] </a></p></div></div><div id="cq9pw2m" class="page-proshow02"><p class="title">詳細(xì)說(shuō)明</p><div id="77j2ipg" class="box"><p><p style="text-indent:25px">基本工藝要求理想的刻蝕工藝必須具有以下特點(diǎn)：①各向異性刻蝕，即只有垂直刻蝕，沒(méi)有橫向鉆蝕。這樣才能保證精確地在被刻蝕的薄膜上復(fù)制出與抗蝕劑上完全一致的幾何圖形；②良好的刻蝕選擇性，即對(duì)作為掩模的抗蝕劑和處于其下的另一層薄膜或材料的刻蝕速率都比被刻蝕薄膜的刻蝕速率小得多，以保證刻蝕過(guò)程中抗蝕劑掩蔽的有效性，不致發(fā)生因?yàn)檫^(guò)刻蝕而損壞薄膜下面的其他材料；③加工批量大，控制容易，成本低，東莞材料刻蝕加工廠商，對(duì)環(huán)境污染少，適用于工業(yè)生產(chǎn)。干法刻蝕也可以根據(jù)被刻蝕的材料類(lèi)型來(lái)分類(lèi)，如刻蝕氮化鎵，東莞材料刻蝕加工廠商、氧化硅，東莞材料刻蝕加工廠商、氮化硅、鋁鎵氮等材料。東莞材料刻蝕加工廠商</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="東莞材料刻蝕加工廠商,材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430342999769976/1129759.png"></div><p style="text-indent:25px">在半導(dǎo)體制造中有兩種基本的刻蝕工藝：干法刻蝕和濕法腐蝕。干法刻蝕是把硅片表面曝露于氣態(tài)中產(chǎn)生的等離子體，等離子體通過(guò)光刻膠中開(kāi)出的窗口，與硅片發(fā)生物理或化學(xué)反應(yīng)（或這兩種反應(yīng)），從而去掉曝露的表面材料。干法刻蝕是亞微米尺寸下刻蝕器件的較重要方法。而在濕法腐蝕中，液體化學(xué)試劑（如酸、堿和溶劑等）以化學(xué)方式去除硅片表面的材料。濕法腐蝕一般只是用在尺寸較大的情況下（大于3微米）。濕法腐蝕仍然用來(lái)腐蝕硅片上某些層或用來(lái)去除干法刻蝕后的殘留物。貴州硅材料刻蝕加工濕法刻蝕是指利用溶液與預(yù)刻蝕材料之間的化學(xué)反應(yīng)來(lái)去除未被掩蔽膜材料掩蔽的部分而達(dá)到刻蝕目的。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="東莞材料刻蝕加工廠商,材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343082944140/2812636.png"></div><p style="text-indent:25px">在GaN發(fā)光二極管器件制作過(guò)程中，刻蝕是一項(xiàng)很重要的工藝。ICP干法刻蝕常用在n型電極制作中，因?yàn)樵谒{(lán)寶石襯底上生長(zhǎng)LED，n型電極和P型電極位于同一側(cè)，需要刻蝕露出n型層。ICP是近幾年來(lái)很常用的一種離子體刻蝕技術(shù)，它在GaN的刻蝕中應(yīng)用很普遍。ICP刻蝕具有等離子體密度和等離子體的轟擊能量單獨(dú)可控，低壓強(qiáng)獲得高密度等離子體，在保持高刻蝕速率的同事能夠產(chǎn)生高的選擇比和低損傷的刻蝕表面等優(yōu)勢(shì)。ICP（感應(yīng)耦合等離子）刻蝕GaN是物料濺射和化學(xué)反應(yīng)相結(jié)合的復(fù)雜過(guò)程?？涛gGaN主要使用到氯氣和三氯化硼，刻蝕過(guò)程中材料表面表面的Ga-N鍵在離子轟擊下破裂，此為物理濺射，產(chǎn)生活性的Ga和N原子，氮原子相互結(jié)合容易析出氮?dú)?，Ga原子和Cl離子生成容易揮發(fā)的GaCl2或者GaCl3。</p><p style="text-indent:25px">工藝所用化學(xué)物質(zhì)取決于要刻蝕的薄膜類(lèi)型。介電刻蝕應(yīng)用中通常使用含氟的化學(xué)物質(zhì)。硅和金屬刻蝕使用含氯成分的化學(xué)物質(zhì)。在工藝中可能會(huì)對(duì)一個(gè)薄膜層或多個(gè)薄膜層執(zhí)行特定的刻蝕步驟。當(dāng)需要處理多層薄膜時(shí)，以及刻蝕中必須精確停在某個(gè)特定薄膜層而不對(duì)其造成損傷時(shí)，刻蝕工藝的選擇比就變得非常重要。選擇比是兩個(gè)刻蝕速率的比率：被去除層的刻蝕速率與被保護(hù)層的刻蝕速率（例如刻蝕掩膜或終止層）。掩?；蛲Ｖ箤樱┩ǔ６枷Ｍ懈叩倪x擇比?？涛g流片的速度與刻蝕速率密切相關(guān)噴淋流量的大小決定了基板表面藥液置換速度的快慢。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="東莞材料刻蝕加工廠商,材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343042348191/1704222.png"></div><p style="text-indent:25px">濕刻蝕：較普遍、也是設(shè)備成本較低的刻蝕方法。其影響被刻蝕物之刻蝕速率(etchingrate)的因素有三：刻蝕液濃度、刻蝕液溫度、及攪拌(stirring)之有無(wú)。定性而言，增加刻蝕溫度與加入攪拌，均能有效提高刻蝕速率；但濃度之影響則較不明確。舉例來(lái)說(shuō)，以49%的HF刻蝕SiO2，當(dāng)然比BOE(Buffered-Oxide-Etch；HF：NH4F=1：6)快的多；但40%的KOH刻蝕付淋兇和Si的速率卻比20%KOH慢！濕刻蝕的配方選用是一項(xiàng)化學(xué)的專(zhuān)業(yè)，對(duì)于一般不是這方面的研究人員，必須向該化學(xué)專(zhuān)業(yè)的同儕請(qǐng)教。一個(gè)選用濕刻蝕配方的重要觀念是（選擇性）(selectivity)，意指進(jìn)行刻蝕時(shí)，對(duì)被蝕物去除速度與連帶對(duì)其他材質(zhì)(如刻蝕掩膜；etchingmask，或承載被加工薄膜之基板；substrate)的腐蝕速度之比值。一個(gè)具有高選擇性的刻蝕系統(tǒng)，應(yīng)該只對(duì)被加工薄膜有腐蝕作用，而不傷及一旁之刻蝕掩膜或其下的基板材料有圖形的光刻膠層在刻蝕中不受腐蝕源明顯的侵蝕。東莞材料刻蝕加工廠商</p><p style="text-indent:25px">無(wú)圖形刻蝕、反刻或剝離是在整個(gè)硅片沒(méi)有掩模的情況下進(jìn)行的，這種刻蝕工藝用于剝離掩模層。東莞材料刻蝕加工廠商</p><p style="text-indent:25px">相比刻蝕用單晶硅材料，芯片用單晶硅材料是芯片等終端產(chǎn)品的原材料，市場(chǎng)更為廣闊，國(guó)產(chǎn)替代的需求也十分旺盛。SEMI的統(tǒng)計(jì)顯示，2018年全球半導(dǎo)體制造材料市場(chǎng)規(guī)模為322.38億美元，其中硅材料的市場(chǎng)規(guī)模達(dá)到121.24億美元，占比高達(dá)37.61%?？涛g用單晶硅材料和芯片用單晶硅材料在制造環(huán)節(jié)上有諸多相似之處：積累的固液共存界面控制技術(shù)、熱場(chǎng)尺寸優(yōu)化工藝、多晶硅投料優(yōu)化等工藝技術(shù)已經(jīng)達(dá)到國(guó)際先進(jìn)水平，為進(jìn)入新賽道提供了產(chǎn)業(yè)技術(shù)和經(jīng)驗(yàn)的支撐。東莞材料刻蝕加工廠商</p><p style="text-indent:25px">廣東省科學(xué)院半導(dǎo)體研究所專(zhuān)注技術(shù)創(chuàng)新和產(chǎn)品研發(fā)，發(fā)展規(guī)模團(tuán)隊(duì)不斷壯大。目前我公司在職員工以90后為主，是一個(gè)有活力有能力有創(chuàng)新精神的團(tuán)隊(duì)。廣東省科學(xué)院半導(dǎo)體研究所主營(yíng)業(yè)務(wù)涵蓋微納加工技術(shù)服務(wù)，真空鍍膜技術(shù)服務(wù)，紫外光刻技術(shù)服務(wù)，材料刻蝕技術(shù)服務(wù)，堅(jiān)持“質(zhì)量保證、良好服務(wù)、顧客滿意”的質(zhì)量方針，贏得廣大客戶的支持和信賴(lài)。公司深耕微納加工技術(shù)服務(wù)，真空鍍膜技術(shù)服務(wù)，紫外光刻技術(shù)服務(wù)，材料刻蝕技術(shù)服務(wù)，正積蓄著更大的能量，向更廣闊的空間、更寬泛的領(lǐng)域拓展。</p></p><br /><p>文章來(lái)源地址: http://www.cdcfah.com/cp/2409983.html</p></div></div></div></div></div><div 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