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href="http://www.cdcfah.com/cp/">產品供應</a>?<a href="http://www.cdcfah.com/cp/first-_dzyqj/">電子元器件</a>?<a href="http://www.cdcfah.com/cp/second-dzyqj_dzcllbjjgj/">電子材料、零部件、結構件</a>?<a href="http://www.cdcfah.com/cp/third-dzcllbjjgj_bdtcl/">半導體材料</a>?湖南材料刻蝕服務廣東省科學院半導體研究所供應</p><div id="37gawyu" class="leftbox clearfix"><h1>湖南材料刻蝕服務廣東省科學院半導體研究所供應</h1><div id="54urd2s" class="proBig"><div id="n2w32gs" class="bigimg"><div><p class="pic"><img src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430342999769976/1129759.png" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div><div id="cb7skw3" class="smallimg"><div><p class="pic"><img src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430342999769976/1129759.png" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div></div><div id="hg7szbd" class="content"><p><span>需求數(shù)量：</span>0</p><p><span>價格要求：</span>面議</p><p><span>所在地：</span>廣東省</p><p><span>包裝要求：</span><span style="color: #f30;"></span></p><p><span>產品關鍵詞：</span>湖南材料刻蝕服務,材料刻蝕</p><p><span>***更新：</span>2020-12-18 05:20:40</p><p><span id="click" >瀏覽次數(shù)：0次</span></p><a rel="nofollow" class="button">聯(lián)系我們</a></div></div><div id="a2krdkr" class="rightbox"><h3>公司基本資料信息</h3><p style="border:0;"><a rel="nofollow">廣東省科學院半導體研究所</a></p><p><span>聯(lián)系人：</span>曾昭燴</p><p><span>郵箱: </span>512480780@qq.com</p><p><span>電話: </span>15018420573</p><p><span>傳真: </span>020_</p><p><span>網址: </span>http://www.gdssli.com</p><p><span>手機: </span>020-61086422</p><p><span>地址: </span>長興路363號</p><p>[當前離線] <a rel="nofollow"> [加為商友] </a><a rel="nofollow"> [發(fā)送信件] </a></p></div></div><div id="h3rda3y" class="page-proshow02"><p class="title">詳細說明</p><div id="vpw94ht" class="box"><p><p style="text-indent:25px">刻蝕工藝：把未被抗蝕劑掩蔽的薄膜層除去，從而在薄膜上得到與抗蝕劑膜上完全相同圖形的工藝。在集成電路制造過程中，經過掩模套準、曝光和顯影，在抗蝕劑膜上復印出所需的圖形，或者用電子束直接描繪在抗蝕劑膜上產生圖形，然后把此圖形精確地轉移到抗蝕劑下面的介質薄膜（如氧化硅、氮化硅、多晶硅）或金屬薄膜（如鋁及其合金）上去，制造出所需的薄層圖案?？涛g就是用化學的、物理的或同時使用化學和物理的方法，湖南材料刻蝕服務，湖南材料刻蝕服務，有選擇地把沒有被抗蝕劑掩蔽的那一部分薄膜層除去，從而在薄膜上得到和抗蝕劑膜上完全一致的圖形?？涛g技術主要分為干法刻蝕與濕法刻蝕，湖南材料刻蝕服務。干法刻蝕主要利用反應氣體與等離子體進行刻蝕；濕法刻蝕主要利用化學試劑與被刻蝕材料發(fā)生化學反應進行刻蝕。有圖形刻蝕和無圖形刻蝕工藝條件能夠采用干法刻蝕或濕法腐蝕技術來實現(xiàn)。湖南材料刻蝕服務</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="湖南材料刻蝕服務,材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430342999769976/1129759.png"></div><p style="text-indent:25px">工藝所用化學物質取決于要刻蝕的薄膜類型。介電刻蝕應用中通常使用含氟的化學物質。硅和金屬刻蝕使用含氯成分的化學物質。在工藝中可能會對一個薄膜層或多個薄膜層執(zhí)行特定的刻蝕步驟。當需要處理多層薄膜時，以及刻蝕中必須精確停在某個特定薄膜層而不對其造成損傷時，刻蝕工藝的選擇比就變得非常重要。選擇比是兩個刻蝕速率的比率：被去除層的刻蝕速率與被保護層的刻蝕速率（例如刻蝕掩膜或終止層）。掩模或停止層）通常都希望有更高的選擇比。河南MEMS材料刻蝕代工在工藝中可能會對一個薄膜層或多個薄膜層執(zhí)行特定的刻蝕步驟。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="湖南材料刻蝕服務,材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343104448148/1231748.png"></div><p style="text-indent:25px">選擇比指的是在同一刻蝕條件下一種材料與另一種材料相比刻蝕速率快多少，它定義為被刻蝕材料的刻蝕速率與另一種材料的刻蝕速率的比。基本內容：高選擇比意味著只刻除想要刻去的那一層材料。一個高選擇比的刻蝕工藝不刻蝕下面一層材料（刻蝕到恰當?shù)纳疃葧r停止）并且保護的光刻膠也未被刻蝕。圖形幾何尺寸的縮小要求減薄光刻膠厚度。高選擇比在較先進的工藝中為了確保關鍵尺寸和剖面控制是必需的。特別是關鍵尺寸越小，選擇比要求越高。廣東省科學院半導體研究所。</p><p style="text-indent:25px">典型的硅刻蝕是用含氮的物質與氫氟酸的混合水溶液。這一配比規(guī)則在控制刻蝕中成為一個重要的因素。在一些比率上，刻蝕硅會有放熱反應。加熱反應所產生的熱可加速刻蝕反應，接下來又產生更多的熱，這樣進行下去會導致工藝無法控制。有時醋酸和其他成分被混合進來控制加熱反應。一些器件要求在晶圓上刻蝕出槽或溝?？涛g配方要進行調整以使刻蝕速率依靠晶圓的取向。取向的晶圓以45°角刻蝕，取向的晶圓以“平”底刻蝕。其他取向的晶圓可以得到不同形狀的溝槽。多晶硅刻蝕也可用基本相同的規(guī)則。等離子體刻蝕機要求相同的元素：化學刻蝕劑和能量源。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="湖南材料刻蝕服務,材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343031752492/2519204.png"></div><p style="text-indent:25px">介質刻蝕是用于介質材料的刻蝕，如二氧化硅。干法刻蝕優(yōu)點是：各向異性好，選擇比高，可控性、靈活性、重復性好，細線條操作安全，易實現(xiàn)自動化，無化學廢液，處理過程未引入污染，潔凈度高。缺點是：成本高，設備復雜。干法刻蝕主要形式有純化學過程（如屏蔽式，下游式，桶式），純物理過程（如離子銑），物理化學過程，常用的有反應離子刻蝕RIE，離子束輔助自由基刻蝕ICP等。干法刻蝕方式比較多，一般有：濺射與離子束銑蝕，等離子刻蝕（PlasmaEtching），高壓等離子刻蝕，高密度等離子體（HDP）刻蝕，反應離子刻蝕（RIE）。另外，化學機械拋光CMP，剝離技術等等也可看成是廣義刻蝕的一些技術。溫度越高刻蝕效率越高，但是溫度過高工藝方面波動較大，只要通過設備自帶溫控器和點檢確認。湖南材料刻蝕服務</p><p style="text-indent:25px">氮化硅濕法刻蝕：對于鈍化層，另外一種受青睞的化合物是氮化硅。湖南材料刻蝕服務</p><p style="text-indent:25px">二氧化硅的干法刻蝕：刻蝕原理氧化物的等離子體刻蝕工藝大多采用含有氟碳化合物的氣體進行刻蝕。使用的氣體有四氟化碳(CF)、八氟丙烷(C，F(xiàn)8)、三氟甲烷(CHF3)等，常用的是CF和CHFCF的刻蝕速率比較高但對多晶硅的選擇比不好，CHF3的聚合物生產速率較高，非等離子體狀態(tài)下的氟碳化合物化學穩(wěn)定性較高，且其化學鍵比SiF的化學鍵強，不會與硅或硅的氧化物反應。選擇比的改變在當今半導體工藝中，Si02的干法刻蝕主要用于接觸孔與金屬間介電層連接洞的非等向性刻蝕方面。前者在S102下方的材料是Si，后者則是金屬層，通常是TiN（氮化鈦），因此在Si02的刻蝕中，Si07與Si或TiN的刻蝕選擇比是一個比較重要的因素。湖南材料刻蝕服務</p><p style="text-indent:25px">廣東省科學院半導體研究所致力于電子元器件，是一家服務型的公司。公司業(yè)務涵蓋微納加工技術服務，真空鍍膜技術服務，紫外光刻技術服務，材料刻蝕技術服務等，價格合理，品質有保證。公司從事電子元器件多年，有著創(chuàng)新的設計、強大的技術，還有一批**的專業(yè)化的隊伍，確保為客戶提供良好的產品及服務。廣東省半導體所憑借創(chuàng)新的產品、專業(yè)的服務、眾多的成功案例積累起來的聲譽和口碑，讓企業(yè)發(fā)展再上新高。</p></p><br /><p>文章來源地址: http://www.cdcfah.com/cp/2452805.html</p></div></div></div></div></div><div id="mqnh8bn" class="page-right twoColRt"><div id="3pdd9rd" class="box01 margin10 clearfix"><h3><a href="http://www.cdcfah.com/cp/">猜你喜歡</a></h3><div id="osp2ev8" class="recomPic likePro"><a href="http://www.cdcfah.com/cp/814588.html"><div><img src="http://tyunfile.71360.com/UpLoadFile/2019/11/1/14/637082168864691056_lgpj_5374157.jpg" alt="福建ZF配件哪家強信息推薦自業(yè)物資供應" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></div><p>福建ZF配件哪家強信息推薦自業(yè)物資供應</p></a></div><div id="c8wyso7" class="recomPic likePro"><a href="http://www.cdcfah.com/cp/846569.html"><div><img 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