廣東光刻廠商廣東省科學(xué)院半導(dǎo)體研究所供應(yīng)-b2b網(wǎng)站_b2b電子商務(wù)平臺(tái)【買(mǎi)產(chǎn)品】-上?？谄蚴称酚邢薰?/title><meta name="description" content="光刻技術(shù)是集成電路制造中利用光學(xué)-化學(xué)反應(yīng)原理和化學(xué)、物理刻蝕方法，將電路圖形傳遞到單晶表面或介質(zhì)層上，形成有效圖形窗口或功能圖形的工藝技術(shù)。隨著半導(dǎo)體技術(shù)的發(fā)展，光刻技術(shù)傳遞圖形的尺寸限度縮小了2～3個(gè)數(shù)量級(jí)（從毫米級(jí)到亞微米級(jí)），已從常"><meta name="keywords" content="廣東光刻廠商,光刻"><link rel="canonical" href="http://www.cdcfah.com/"/><meta name="applicable-device" content="pc"><link rel="shortcut icon" href="/static/new_net_01/images/favicon.ico"><link rel="stylesheet" href="/static/new_net_01/css/slick.css" /><link rel="stylesheet" href="/static/new_net_01/css/addnew.css"><link rel="stylesheet" href="/static/new_net_01/css/sidenav.css"><link rel="stylesheet" href="/static/new_net_01/css/style.css" /><link rel="stylesheet" href="/static/new_net_01/css/tab.css"><link rel="stylesheet" href="/static/new_net_01/css/404.css"> <meta name="baidu-site-verification" content="OBVzrC9aaQ" /> <meta 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href="http://www.cdcfah.com/cp/second-dzyqj_dzcllbjjgj/">電子材料、零部件、結(jié)構(gòu)件</a>?<a href="http://www.cdcfah.com/cp/third-dzcllbjjgj_bdtcl/">半導(dǎo)體材料</a>?廣東光刻廠商廣東省科學(xué)院半導(dǎo)體研究所供應(yīng)</p><div id="se2cy3t" class="leftbox clearfix"><h1>廣東光刻廠商廣東省科學(xué)院半導(dǎo)體研究所供應(yīng)</h1><div id="cgxm8gi" class="proBig"><div id="etacjqs" class="bigimg"><div><p class="pic"><img src="https://tyunfile.71360.com/UploadFile/bdtyys888/637424434319752854/6617582.png" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div><div id="y8iuriu" class="smallimg"><div><p class="pic"><img src="https://tyunfile.71360.com/UploadFile/bdtyys888/637424434319752854/6617582.png" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div></div><div id="zyvco8k" class="content"><p><span>需求數(shù)量：</span>0</p><p><span>價(jià)格要求：</span>面議</p><p><span>所在地：</span>廣東省</p><p><span>包裝要求：</span><span style="color: #f30;"></span></p><p><span>產(chǎn)品關(guān)鍵詞：</span>廣東光刻廠商,光刻</p><p><span>***更新：</span>2020-12-21 00:28:44</p><p><span id="click" >瀏覽次數(shù)：0次</span></p><a rel="nofollow" class="button">聯(lián)系我們</a></div></div><div id="7tqhtfb" class="rightbox"><h3>公司基本資料信息</h3><p style="border:0;"><a rel="nofollow">廣東省科學(xué)院半導(dǎo)體研究所</a></p><p><span>聯(lián)系人：</span>曾昭燴</p><p><span>郵箱: </span>512480780@qq.com</p><p><span>電話: </span>15018420573</p><p><span>傳真: </span>020_</p><p><span>網(wǎng)址: </span>http://www.gdssli.com</p><p><span>手機(jī): </span>020-61086422</p><p><span>地址: </span>長(zhǎng)興路363號(hào)</p><p>[當(dāng)前離線] <a rel="nofollow"> [加為商友] </a><a rel="nofollow"> [發(fā)送信件] </a></p></div></div><div id="2f2zb3n" class="page-proshow02"><p class="title">詳細(xì)說(shuō)明</p><div id="laxpw7d" class="box"><p><p style="text-indent:25px">光刻技術(shù)是集成電路制造中利用光學(xué)- 化學(xué)反應(yīng)原理和化學(xué)、物理刻蝕方法，將電路圖形傳遞到單晶表面或介質(zhì)層上，形成有效圖形窗口或功能圖形的工藝技術(shù)。隨著半導(dǎo)體技術(shù)的發(fā)展，光刻技術(shù)傳遞圖形的尺寸限度縮小了2～3個(gè)數(shù)量級(jí)（從毫米級(jí)到亞微米級(jí)），已從常規(guī)光學(xué)技術(shù)發(fā)展到應(yīng)用電子束、 X射線、微離子束、激光等新技術(shù)；使用波長(zhǎng)已從4000埃擴(kuò)展到 0.1埃數(shù)量級(jí)范圍。光刻技術(shù)成為一種精密的微細(xì)加工技術(shù)。光刻技術(shù)是指在光照作用下，借助光致抗蝕劑（又名光刻膠）將掩膜版上的圖形轉(zhuǎn)移到基片上的技術(shù)，廣東光刻廠商。其主要過(guò)程為：首先紫外光通過(guò)掩膜版照射到附有一層光刻膠薄膜的基片表面，廣東光刻廠商，引起曝光區(qū)域的光刻膠發(fā)生化學(xué)反應(yīng)；再通過(guò)顯影技術(shù)溶解去除曝光區(qū)域或未曝光區(qū)域的光刻膠（前者稱正性光刻膠，后者稱負(fù)性光刻膠），廣東光刻廠商，使掩膜版上的圖形被復(fù)制到光刻膠薄膜上；較后利用刻蝕技術(shù)將圖形轉(zhuǎn)移到基片上。光刻機(jī)又被稱為：掩模對(duì)準(zhǔn)曝光機(jī)、曝光系統(tǒng)、光刻系統(tǒng)等。廣東光刻廠商</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="廣東光刻廠商,光刻" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637424434319752854/6617582.png"></div><p style="text-indent:25px">在光刻過(guò)程中可能會(huì)出現(xiàn)光刻膠未涂滿襯底的異常，主要原因可能以下幾個(gè)：滴膠量不、膠液偏離襯底中心、滴膠是有氣泡、滴膠是有“倒角”，主要的叫絕方法有：增加滴膠量、調(diào)整勻膠機(jī)水平位置、調(diào)整滴膠位置、在“倒角”處滴膠、消除“倒角”。光刻涂膠四周呈現(xiàn)放射性條紋，主要可能的原因是光刻膠有顆粒、襯底未清洗干凈，表面有顆粒、滴膠后精致時(shí)間過(guò)長(zhǎng)，部分光刻膠固話，解決的方法主要有更換光刻膠，使用新的光刻膠涂膠來(lái)測(cè)試一下、將襯底再清洗一次再涂膠、滴膠后馬上旋涂，以免光刻膠有所固化。光刻版材質(zhì)主要是兩種，一個(gè)是石英材質(zhì)一個(gè)是蘇打材質(zhì)，石英材料的透光率會(huì)比蘇打的透光率要高。光刻版就是在蘇打材料通過(guò)光刻、刻蝕等工藝在表面使用鉻金屬做出我們所需要的圖形。廣東光刻廠商非接觸式曝光，掩膜板與光刻膠層的略微分開(kāi)，可以避免與光刻膠直接接觸而引起的掩膜板損傷。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="廣東光刻廠商,光刻" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637424434253043850/249957.png"></div><p style="text-indent:25px">光刻噴嘴噴霧模式和硅片旋轉(zhuǎn)速度是實(shí)現(xiàn)硅片間溶解率和均勻性的可重復(fù)性的關(guān)鍵調(diào)節(jié)參數(shù)。水坑（旋覆浸沒(méi)）式顯影（PuddleDevelopment）。噴覆足夠（不能太多，較小化背面濕度）的顯影液到硅片表面，并形成水坑形狀（顯影液的流動(dòng)保持較低，以減少邊緣顯影速率的變化）。硅片固定或慢慢旋轉(zhuǎn)。一般采用多次旋覆顯影液：首先次涂覆、保持10～30秒、去除；第二次涂覆、保持、去除。然后用去離子水沖洗（去除硅片兩面的所有化學(xué)品）并旋轉(zhuǎn)甩干。優(yōu)點(diǎn)：顯影液用量少；硅片顯影均勻；較小化了溫度梯度。</p><p style="text-indent:25px">光聚合型光刻膠采用烯類(lèi)單體，在光作用下生成自由基，進(jìn)一步引發(fā)單體聚合，較后生成聚合物；光分解型光刻膠，采用含有重氮醌類(lèi)化合物(DQN)材料作為感光劑，其經(jīng)光照后,發(fā)生光分解反應(yīng)，可以制成正性光刻膠；光交聯(lián)型光刻膠采用聚乙烯醇月桂酸酯等作為光敏材料，在光的作用下，形成一種不溶性的網(wǎng)狀結(jié)構(gòu)，而起到抗蝕作用，可以制成負(fù)性光刻膠。動(dòng)態(tài)噴灑法：隨著硅片尺寸越來(lái)越大，靜態(tài)涂膠已經(jīng)不能滿足較新的硅片加工需求。廣東省科學(xué)院半導(dǎo)體研究所。接觸式光刻機(jī)，曝光時(shí)，光刻版壓在涂有光刻膠的襯底上，優(yōu)點(diǎn)是設(shè)備簡(jiǎn)單，分辨率高，沒(méi)有衍射效應(yīng)。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="廣東光刻廠商,光刻" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637424434275866125/8943155.png"></div><p style="text-indent:25px">光刻膠是微電子技術(shù)中微細(xì)圖形加工的關(guān)鍵材料之一，特別是近年來(lái)大規(guī)模和超大規(guī)模集成電路的發(fā)展，更是促進(jìn)了光刻膠的研究開(kāi)發(fā)和應(yīng)用。印刷工業(yè)是光刻膠應(yīng)用的另一重要領(lǐng)域。1954 年由明斯克等人首先研究成功的聚乙烯醇肉桂酸脂就是用于印刷工業(yè)的，以后才用于電子工業(yè)。光刻膠是一種有機(jī)化合物，它被紫外光曝光后，在顯影溶液中的溶解度會(huì)發(fā)生變化。硅片制造中所用的光刻膠以液態(tài)涂在硅片表面，而后**燥成膠膜。光刻膠的技術(shù)復(fù)雜，品種較多。根據(jù)其化學(xué)反應(yīng)機(jī)理和顯影原理，可分負(fù)性膠和正性膠兩類(lèi)。光照后形成不可溶物質(zhì)的是負(fù)性膠；反之，對(duì)某些溶劑是不可溶的，經(jīng)光照后變成可溶物質(zhì)的即為正性膠。利用這種性能，將光刻膠作涂層，就能在硅片表面刻蝕所需的電路圖形?；诟泄鈽?shù)脂的化學(xué)結(jié)構(gòu)，光刻膠可以分為三種類(lèi)型。光刻膠若性能不達(dá)標(biāo)會(huì)對(duì)芯片成品率造成重大影響。廣東光刻廠商</p><p style="text-indent:25px">根據(jù)曝光方式的不同，光刻機(jī)主要分為接觸式，接近式以及投影式三種。廣東光刻廠商</p><p style="text-indent:25px">當(dāng)光刻膠曝光后，曝光區(qū)域的光致酸劑（PAG）將會(huì)產(chǎn)生一種酸。這種酸在后熱烘培工序期間作為催化劑，將會(huì)移除樹(shù)脂的保護(hù)基團(tuán)從而使得樹(shù)脂變得易于溶解?；瘜W(xué)放大光刻膠曝光速遞是DQN光刻膠的10倍，對(duì)深紫外光源具有良好的光學(xué)敏感性，同時(shí)具有高對(duì)比度，對(duì)高分辨率等優(yōu)點(diǎn)。按照曝光波長(zhǎng)分類(lèi)；光刻膠可分為紫外光刻膠（300~450nm）、深紫外光刻膠（160~280nm）、極紫外光刻膠（EUV，13.5nm）、電子束光刻膠、離子束光刻膠、X射線光刻膠等。不同曝光波長(zhǎng)的光刻膠，其適用的光刻極限分辨率不同。廣東光刻廠商</p><p style="text-indent:25px">廣東省科學(xué)院半導(dǎo)體研究所是一家面向半導(dǎo)體光電子器件、功率電子器件、MEMS、生物芯片等前沿領(lǐng)域，致力于打造***的公益性、開(kāi)放性、支撐性樞紐中心。平臺(tái)擁有半導(dǎo)體制備工藝所需的整套儀器設(shè)備，建立了一條實(shí)驗(yàn)室研發(fā)線和一條中試線，加工尺寸覆蓋2-6英寸（部分8英寸），同時(shí)形成了一支與硬件有機(jī)結(jié)合的專(zhuān)業(yè)人才隊(duì)伍。平臺(tái)當(dāng)前緊抓技術(shù)創(chuàng)新和公共服務(wù)，面向國(guó)內(nèi)外高校、科研院所以及企業(yè)提供開(kāi)放共享，為技術(shù)咨詢、創(chuàng)新研發(fā)、技術(shù)驗(yàn)證以及產(chǎn)品中試提供支持。的公司，是一家集研發(fā)、設(shè)計(jì)、生產(chǎn)和銷(xiāo)售為一體的專(zhuān)業(yè)化公司。公司自創(chuàng)立以來(lái)，投身于微納加工技術(shù)服務(wù)，真空鍍膜技術(shù)服務(wù)，紫外光刻技術(shù)服務(wù)，材料刻蝕技術(shù)服務(wù)，是電子元器件的主力軍。廣東省半導(dǎo)體所不斷開(kāi)拓創(chuàng)新，追求出色，以技術(shù)為先導(dǎo)，以產(chǎn)品為平臺(tái)，以應(yīng)用為重點(diǎn)，以服務(wù)為保證，不斷為客戶創(chuàng)造更高價(jià)值，提供更優(yōu)服務(wù)。廣東省半導(dǎo)體所創(chuàng)始人陳志濤，始終關(guān)注客戶，創(chuàng)新科技，竭誠(chéng)為客戶提供良好的服務(wù)。</p></p><br /><p>文章來(lái)源地址: http://www.cdcfah.com/cp/2488185.html</p></div></div></div></div></div><div id="vubipbd" class="page-right twoColRt"><div id="otadubt" class="box01 margin10 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