貴州ICP材料刻蝕平臺廣東省科學(xué)院半導(dǎo)體研究所供應(yīng)-b2b網(wǎng)站_b2b電子商務(wù)平臺【買產(chǎn)品】-上?？谄蚴称酚邢薰?/title><meta name="description" content="工藝所用化學(xué)物質(zhì)取決于要刻蝕的薄膜類型。介電刻蝕應(yīng)用中通常使用含氟的化學(xué)物質(zhì)。硅和金屬刻蝕使用含氯成分的化學(xué)物質(zhì)。在工藝中可能會對一個薄膜層或多個薄膜層執(zhí)行特定的刻蝕步驟。當(dāng)需要處理多層薄膜時，貴州ICP材料刻蝕平臺，以及刻蝕中必須精確停在"><meta name="keywords" content="貴州ICP材料刻蝕平臺,材料刻蝕"><link rel="canonical" href="http://www.cdcfah.com/"/><meta name="applicable-device" content="pc"><link rel="shortcut icon" href="/static/new_net_01/images/favicon.ico"><link rel="stylesheet" href="/static/new_net_01/css/slick.css" /><link rel="stylesheet" href="/static/new_net_01/css/addnew.css"><link rel="stylesheet" href="/static/new_net_01/css/sidenav.css"><link rel="stylesheet" href="/static/new_net_01/css/style.css" /><link rel="stylesheet" href="/static/new_net_01/css/tab.css"><link rel="stylesheet" href="/static/new_net_01/css/404.css"> <meta name="baidu-site-verification" content="OBVzrC9aaQ" /> <meta http-equiv="Cache-Control" 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"index_show"><a href="http://www.cdcfah.com/zh/"><span>展會信息</span></a></li></ul></div></nav><section class="wrap clearfix"><section class="container clearfix tcPro"><section class="home-main container clearfix"><div id="8h7h999" class="twoCol"><div id="cajkwdx" class="page-proshow clearfix"><p class="current"> 當(dāng)前位置:<a href="http://www.cdcfah.com/">首頁?<a href="http://www.cdcfah.com/cp/">產(chǎn)品供應(yīng)</a>?<a href="http://www.cdcfah.com/cp/first-_dzyqj/">電子元器件</a>?<a href="http://www.cdcfah.com/cp/second-dzyqj_dzcllbjjgj/">電子材料、零部件、結(jié)構(gòu)件</a>?<a href="http://www.cdcfah.com/cp/third-dzcllbjjgj_bdtcl/">半導(dǎo)體材料</a>?貴州ICP材料刻蝕平臺廣東省科學(xué)院半導(dǎo)體研究所供應(yīng)</p><div id="n2xzb3m" class="leftbox clearfix"><h1>貴州ICP材料刻蝕平臺廣東省科學(xué)院半導(dǎo)體研究所供應(yīng)</h1><div id="wzv3jam" class="proBig"><div id="8ajvmdk" class="bigimg"><div><p class="pic"><img src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343022162510/3890106.png" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div><div id="uik3umd" class="smallimg"><div><p class="pic"><img src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343022162510/3890106.png" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div></div><div id="gyamoul" class="content"><p><span>需求數(shù)量：</span>0</p><p><span>價格要求：</span>面議</p><p><span>所在地：</span>廣東省</p><p><span>包裝要求：</span><span style="color: #f30;"></span></p><p><span>產(chǎn)品關(guān)鍵詞：</span>貴州ICP材料刻蝕平臺,材料刻蝕</p><p><span>***更新：</span>2021-01-01 09:31:22</p><p><span id="click" >瀏覽次數(shù)：1次</span></p><a rel="nofollow" class="button">聯(lián)系我們</a></div></div><div id="dbneabs" class="rightbox"><h3>公司基本資料信息</h3><p style="border:0;"><a rel="nofollow">廣東省科學(xué)院半導(dǎo)體研究所</a></p><p><span>聯(lián)系人：</span>曾昭燴</p><p><span>郵箱: </span>512480780@qq.com</p><p><span>電話: </span>15018420573</p><p><span>傳真: </span>020_</p><p><span>網(wǎng)址: </span>http://www.gdssli.com</p><p><span>手機(jī): </span>020-61086422</p><p><span>地址: </span>長興路363號</p><p>[當(dāng)前離線] <a rel="nofollow"> [加為商友] </a><a rel="nofollow"> [發(fā)送信件] </a></p></div></div><div id="3ktokry" class="page-proshow02"><p class="title">詳細(xì)說明</p><div id="8z8fj3p" class="box"><p><p style="text-indent:25px">工藝所用化學(xué)物質(zhì)取決于要刻蝕的薄膜類型。介電刻蝕應(yīng)用中通常使用含氟的化學(xué)物質(zhì)。硅和金屬刻蝕使用含氯成分的化學(xué)物質(zhì)。在工藝中可能會對一個薄膜層或多個薄膜層執(zhí)行特定的刻蝕步驟。當(dāng)需要處理多層薄膜時，貴州ICP材料刻蝕平臺，以及刻蝕中必須精確停在某個特定薄膜層而不對其造成損傷時，刻蝕工藝的選擇比就變得非常重要，貴州ICP材料刻蝕平臺，貴州ICP材料刻蝕平臺。選擇比是兩個刻蝕速率的比率：被去除層的刻蝕速率與被保護(hù)層的刻蝕速率（例如刻蝕掩膜或終止層）。掩?；蛲Ｖ箤樱┩ǔ６枷Ｍ懈叩倪x擇比。在半導(dǎo)體制造中有兩種基本的刻蝕工藝：干法刻蝕和濕法腐蝕。貴州ICP材料刻蝕平臺</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="貴州ICP材料刻蝕平臺,材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343022162510/3890106.png"></div><p style="text-indent:25px">濕刻蝕：較普遍、也是設(shè)備成本較低的刻蝕方法。其影響被刻蝕物之刻蝕速率(etchingrate)的因素有三：刻蝕液濃度、刻蝕液溫度、及攪拌(stirring)之有無。定性而言，增加刻蝕溫度與加入攪拌，均能有效提高刻蝕速率；但濃度之影響則較不明確。舉例來說，以49%的HF刻蝕SiO2，當(dāng)然比BOE(Buffered-Oxide-Etch；HF：NH4F=1：6)快的多；但40%的KOH刻蝕付淋兇和Si的速率卻比20%KOH慢！濕刻蝕的配方選用是一項(xiàng)化學(xué)的專業(yè)，對于一般不是這方面的研究人員，必須向該化學(xué)專業(yè)的同儕請教。一個選用濕刻蝕配方的重要觀念是（選擇性）(selectivity)，意指進(jìn)行刻蝕時，對被蝕物去除速度與連帶對其他材質(zhì)(如刻蝕掩膜；etchingmask，或承載被加工薄膜之基板；substrate)的腐蝕速度之比值。一個具有高選擇性的刻蝕系統(tǒng)，應(yīng)該只對被加工薄膜有腐蝕作用，而不傷及一旁之刻蝕掩膜或其下的基板材料江蘇Si材料刻蝕廠家硅和金屬刻蝕使用含氯成分的化學(xué)物質(zhì)。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="貴州ICP材料刻蝕平臺,材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343095082892/6968052.png"></div><p style="text-indent:25px">反應(yīng)離子刻蝕（RIE）是當(dāng)前常用技術(shù)路徑，屬于物理和化學(xué)混合刻蝕。在傳統(tǒng)的反應(yīng)離子刻蝕機(jī)中，進(jìn)入反應(yīng)室的氣體會被分解電離為等離子體，等離子體由反應(yīng)正離子、自由基、反應(yīng)原子等組成。反應(yīng)正離子會轟擊硅片表面形成物理刻蝕，同時被轟擊的硅片表面化學(xué)活性被提高，之后硅片會與自由基和反應(yīng)原子形成化學(xué)刻蝕。這個過程中由于離子轟擊帶有方向性，RIE技術(shù)具有較好的各向異性。目前先進(jìn)集成電路制造技術(shù)中用于刻蝕關(guān)鍵層的刻蝕方法是高密度等離子體刻蝕技術(shù)。傳統(tǒng)的RIE系統(tǒng)難以使刻蝕物質(zhì)進(jìn)入高深寬比圖形中并將殘余生成物從中排出，因此不能滿足0.25μm以下尺寸的加工要求，解決辦法是增加等離子體的密度。高密度等離子體刻蝕技術(shù)主要分為電子回旋加速振蕩（ECR）、電容或電感耦合等離子體（CCP/ICP）、雙等離子體源等。</p><p style="text-indent:25px">在Si片上形成具有垂直側(cè)壁的高深寬比溝槽結(jié)構(gòu)是制備先進(jìn)MEMS器件的關(guān)鍵工藝，其各向異性刻蝕要求非常嚴(yán)格。高深寬比的干法刻蝕技術(shù)以其刻蝕速率快、各向異性較強(qiáng)、污染少等優(yōu)點(diǎn)脫穎而出，成為MEMS器件加工的關(guān)鍵技術(shù)之一。BOSCH工藝,又名TMDE(Time Multiplexed Deep Etching)工藝，是一個刻蝕—鈍化—刻蝕的循環(huán)過程，以達(dá)到對硅材料進(jìn)行高深寬比、各向異性刻蝕的目的。 BOSCH工藝的原理是在反應(yīng)腔室中輪流通入鈍化氣體C4F8與刻蝕氣體SF6與樣品進(jìn)行反應(yīng)，工藝的整個過程是淀積鈍化層步驟與刻蝕步驟的反復(fù)交替。其中保護(hù)氣體C4F8在高密度等離子體的作用下分解生成碳氟聚合物保護(hù)層，沉積在已經(jīng)做好圖形的樣品表面。濕法刻蝕是指利用溶液與預(yù)刻蝕材料之間的化學(xué)反應(yīng)來去除未被掩蔽膜材料掩蔽的部分而達(dá)到刻蝕目的。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="貴州ICP材料刻蝕平臺,材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343031752492/2519204.png"></div><p style="text-indent:25px">光刻膠是另一個剝離的例子?？偟膩碚f，有圖形刻蝕和無圖形刻蝕工藝條件能夠采用干法刻蝕或濕法腐蝕技術(shù)來實(shí)現(xiàn)。為了復(fù)制硅片表面材料上的掩膜圖形，刻蝕必須滿足一些特殊的要求。包括幾方面刻蝕參數(shù)：刻蝕速率、刻蝕剖面、刻蝕偏差、選擇比、均勻性、殘留物、聚合物、等離子體誘導(dǎo)損傷、顆粒玷污和缺陷等?？涛g是用化學(xué)或物理方法有選擇的從硅片表面去除不需要的材料的過程?？涛g的基本目標(biāo)是在涂膠的硅片上正確的復(fù)制掩模圖形。有圖形的光刻膠層在刻蝕中不受腐蝕源明顯的侵蝕。濕法刻蝕優(yōu)點(diǎn)是選擇性好、重復(fù)性好、生產(chǎn)效率高、設(shè)備簡單、成本低。江蘇Si材料刻蝕廠家</p><p style="text-indent:25px">一般而言，高蝕速率（在一定時間內(nèi)去除的材料量）都會受到歡迎。貴州ICP材料刻蝕平臺</p><p style="text-indent:25px">鋁膜濕法刻蝕：對于鋁和鋁合金層有選擇性的刻蝕溶液是居于磷酸的。遺憾的是，鋁和磷酸反應(yīng)的副產(chǎn)物是微小的氫氣泡。這些氣泡附著在晶圓表面，并阻礙刻蝕反應(yīng)。結(jié)果既可能產(chǎn)生導(dǎo)致相鄰引線短路的鋁橋連，又可能在表面形成不希望出現(xiàn)的雪球的鋁點(diǎn)。特殊配方鋁刻蝕溶液的使用緩解了這個問題。典型的活性溶液成分配比是：16：1：1：2。除了特殊配方外，典型的鋁刻蝕工藝還會包含以攪拌或上下移動晶圓舟的攪動。有時超聲波或兆頻超聲波也用來去除氣泡。貴州ICP材料刻蝕平臺</p><p style="text-indent:25px">廣東省科學(xué)院半導(dǎo)體研究所主要經(jīng)營范圍是電子元器件，擁有一支專業(yè)技術(shù)團(tuán)隊(duì)和良好的市場口碑。公司業(yè)務(wù)涵蓋微納加工技術(shù)服務(wù)，真空鍍膜技術(shù)服務(wù)，紫外光刻技術(shù)服務(wù)，材料刻蝕技術(shù)服務(wù)等，價格合理，品質(zhì)有保證。公司從事電子元器件多年，有著創(chuàng)新的設(shè)計(jì)、強(qiáng)大的技術(shù)，還有一批**的專業(yè)化的隊(duì)伍，確保為客戶提供良好的產(chǎn)品及服務(wù)。廣東省半導(dǎo)體所憑借創(chuàng)新的產(chǎn)品、專業(yè)的服務(wù)、眾多的成功案例積累起來的聲譽(yù)和口碑，讓企業(yè)發(fā)展再上新高。</p></p><br /><p>文章來源地址: http://www.cdcfah.com/cp/2658967.html</p></div></div></div></div></div><div id="dr2c44a" class="page-right twoColRt"><div id="s8cofbx" class="box01 margin10 clearfix"><h3><a href="http://www.cdcfah.com/cp/">猜你喜歡</a></h3><div id="srdvmjv" class="recomPic likePro"><a 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