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</a><a rel="nofollow"> [發(fā)送信件] </a></p></div></div><div id="32oipw3" class="page-proshow02"><p class="title">詳細(xì)說明</p><div id="enp2qar" class="box"><p><p style="text-indent:25px">微納加工技術(shù)具有高精度、科技含量高、產(chǎn)品附加值高等特點(diǎn)，能突顯一個國家工業(yè)發(fā)展水平，在推動科技進(jìn)步、促進(jìn)產(chǎn)業(yè)發(fā)展、提升生活品質(zhì)等方面都發(fā)揮著重要作用。廣東省科學(xué)院半導(dǎo)體研究所微納加工平臺，是國內(nèi)少數(shù)擁有完整半導(dǎo)體工藝鏈的研究平臺之一，可進(jìn)行鍍膜，湖南真空鍍膜微納加工平臺、光刻，湖南真空鍍膜微納加工平臺、刻蝕等工藝，加工尺寸覆蓋2-6英寸。微納加工平臺將面向國內(nèi)外科研機(jī)構(gòu)和企業(yè)提供較全的開放服務(wù)，對半導(dǎo)體材料與器件的深入研發(fā)給予較全支持，能夠?yàn)閺V大科研單位和企業(yè)提供***服務(wù)，湖南真空鍍膜微納加工平臺。在我國，微納制造技術(shù)同樣是重點(diǎn)發(fā)展方向之一。湖南真空鍍膜微納加工平臺</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="湖南真空鍍膜微納加工平臺,微納加工" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430344932770510/211866.png"></div><p style="text-indent:25px">在微納加工過程中，薄膜的形成方法主要為物理沉積、化學(xué)沉積和混合方法沉積。蒸發(fā)沉積（熱蒸發(fā)、電子束蒸發(fā)）和濺射沉積是典型的物理方法，主要用于沉積金屬單質(zhì)薄膜、合金薄膜、化合物等。熱蒸發(fā)是在高真空下，利用電阻加熱至材料的熔化溫度，使其蒸發(fā)至基底表面形成薄膜，而電子束蒸發(fā)為使用電子束加熱；磁控濺射在高真空，在電場的作用下，Ar氣被電離為Ar離子高能量轟擊靶材，使靶材發(fā)生濺射并沉積于基底；磁控濺射方法沉積的薄膜純度高、致密性好，熱蒸發(fā)主要用于沉積低熔點(diǎn)金屬薄膜或者厚膜；化學(xué)氣相沉積（CVD）是典型的化學(xué)方法而等離子體增強(qiáng)化學(xué)氣相沉積（PECVD）是物理與化學(xué)相結(jié)合的混合方法，CVD和PECVD主要用于生長氮化硅、氧化硅等介質(zhì)膜。湖南真空鍍膜微納加工平臺微機(jī)電系統(tǒng)、微光電系統(tǒng)、生物微機(jī)電系統(tǒng)等是微納米技術(shù)的重要應(yīng)用領(lǐng)域。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="湖南真空鍍膜微納加工平臺,微納加工" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430344801890761/4913493.png"></div><p style="text-indent:25px">微納加工設(shè)備主要有：光刻、刻蝕、鍍膜、濕法腐蝕、絕緣層鍍膜等。微納檢測主要是表征檢測：原子力顯微鏡、掃描電鏡、掃描顯微鏡、XRD、臺階儀等。每一個設(shè)備都包含比較多具體的分類。光刻機(jī)，也被稱為曝光機(jī)，三大類:步進(jìn)式光刻機(jī)，接觸接近式光刻，電子束曝光。微納制造技術(shù)是指尺度為毫米、微米和納米量級的零件，以及由這些零件構(gòu)成的部件或系統(tǒng)的設(shè)計(jì)、加工、組裝、集成與應(yīng)用技術(shù)。傳統(tǒng)“宏”機(jī)械制造技術(shù)已不能滿足這些“微”機(jī)械和“微”系統(tǒng)的高精度制造和裝配加工要求，必須研究和應(yīng)用微納制造的技術(shù)與方法。微納制造技術(shù)是微傳感器、微執(zhí)行器、微結(jié)構(gòu)和功能微納系統(tǒng)制造的基本手段和重要基礎(chǔ)。</p><p style="text-indent:25px">微納制造包括微制造和納制造兩個方面。(1)微制造有兩種不同的微制造工藝方式，一種是基于半導(dǎo)體制造工藝的光刻技術(shù)、LIGA技術(shù)、鍵合技術(shù)、封裝技術(shù)等，這些工藝技術(shù)方法較為成熟，但普遍存在加工材料單一、加工設(shè)備昂貴等問題，且只能加工結(jié)構(gòu)簡單的二維或準(zhǔn)三維微機(jī)械零件，無法進(jìn)行復(fù)雜的三維微機(jī)械零件的加工；另一種是機(jī)械微加工，是指采用機(jī)械加工、特種加工及其他成形技術(shù)等傳統(tǒng)加工技術(shù)形成的微加工技術(shù)，可進(jìn)行三維復(fù)雜曲面零件的加工，加工材料不受限制，包括微細(xì)磨削、微細(xì)車削、微細(xì)銑削、微細(xì)鉆削、微沖壓、微成形等。(2)納制造納制造是指具有特定功能的納米尺度的結(jié)構(gòu)、器件和系統(tǒng)的制造技術(shù)，包括納米壓印技術(shù)、刻劃技術(shù)、原子操縱技術(shù)等。在硅材料刻蝕當(dāng)中，硅針的刻蝕需要用到各向同性刻蝕，硅柱的刻蝕需要用到各項(xiàng)異性刻蝕。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="湖南真空鍍膜微納加工平臺,微納加工" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430344912262604/1443342.png"></div><p style="text-indent:25px">聚合物等溫微納米熱壓印技術(shù)同時適用于結(jié)晶型聚合物和非晶型聚合物，研究人員分別選用PP和PMMA作為兩類聚合物的象征，對較優(yōu)加工工藝及其內(nèi)在成型機(jī)理展開探索。結(jié)果表明，對PMMA等非晶型聚合物而言，模具溫度設(shè)定在Tg附近即可獲得成型效果優(yōu)異的微納結(jié)構(gòu)制品；在加工PP等結(jié)晶型聚合物時，模具溫度則應(yīng)設(shè)置在Tm以下40~60℃的溫度區(qū)間內(nèi)。利用聚合物等溫微納米熱壓印技術(shù)制得的微納結(jié)構(gòu)制品結(jié)構(gòu)穩(wěn)定，微納結(jié)構(gòu)一致性高且成型效率高。目前，聚合物等溫微納米壓印方法的相關(guān)中心技術(shù)已申請國家發(fā)明專利和PCT國際專利。相信在全球范圍內(nèi)的微納制造技術(shù)研發(fā)大潮中，聚合物等溫微納米熱壓印技術(shù)的出現(xiàn)會為研究人員提供新的靈感和動力。微納制造技術(shù)屬國際前沿技術(shù)，作為未來制造業(yè)賴以生存的基礎(chǔ)和可持續(xù)發(fā)展的關(guān)鍵。湖南真空鍍膜微納加工平臺</p><p style="text-indent:25px">微納加工中，材料濕法腐蝕是一個常用的工藝方法。湖南真空鍍膜微納加工平臺</p><p style="text-indent:25px">在光刻圖案化工藝中，首先將光刻膠涂在硅片上形成一層薄膜。接著在復(fù)雜的曝光裝置中，光線通過一個具有特定圖案的掩模投射到光刻膠上。曝光區(qū)域的光刻膠發(fā)生化學(xué)變化，在隨后的化學(xué)顯影過程中被去除。較后掩模的圖案就被轉(zhuǎn)移到了光刻膠膜上。而在隨后的蝕刻或離子注入工藝中，會對沒有光刻膠保護(hù)的硅片部分進(jìn)行刻蝕，較后洗去剩余光刻膠。這時光刻膠的圖案就被轉(zhuǎn)移到下層的薄膜上，這種薄膜圖案化的過程經(jīng)過多次迭代，聯(lián)同其他多個物理過程，便產(chǎn)生集成電路。湖南真空鍍膜微納加工平臺</p><p style="text-indent:25px">廣東省科學(xué)院半導(dǎo)體研究所辦公設(shè)施齊全，辦公環(huán)境優(yōu)越，為員工打造良好的辦公環(huán)境。致力于創(chuàng)造***的產(chǎn)品與服務(wù)，以誠信、敬業(yè)、進(jìn)取為宗旨，以建芯辰實(shí)驗(yàn)室,微納加工產(chǎn)品為目標(biāo)，努力打造成為同行業(yè)中具有影響力的企業(yè)。公司以用心服務(wù)為重點(diǎn)價(jià)值，希望通過我們的專業(yè)水平和不懈努力，將面向半導(dǎo)體光電子器件、功率電子器件、MEMS、生物芯片等前沿領(lǐng)域，致力于打造***的公益性、開放性、支撐性樞紐中心。平臺擁有半導(dǎo)體制備工藝所需的整套儀器設(shè)備，建立了一條實(shí)驗(yàn)室研發(fā)線和一條中試線，加工尺寸覆蓋2-6英寸（部分8英寸），同時形成了一支與硬件有機(jī)結(jié)合的專業(yè)人才隊(duì)伍。平臺當(dāng)前緊抓技術(shù)創(chuàng)新和公共服務(wù)，面向國內(nèi)外高校、科研院所以及企業(yè)提供開放共享，為技術(shù)咨詢、創(chuàng)新研發(fā)、技術(shù)驗(yàn)證以及產(chǎn)品中試提供支持。等業(yè)務(wù)進(jìn)行到底。廣東省科學(xué)院半導(dǎo)體研究所主營業(yè)務(wù)涵蓋微納加工技術(shù)服務(wù)，真空鍍膜技術(shù)服務(wù)，紫外光刻技術(shù)服務(wù)，材料刻蝕技術(shù)服務(wù)，堅(jiān)持“質(zhì)量保證、良好服務(wù)、顧客滿意”的質(zhì)量方針，贏得廣大客戶的支持和信賴。</p></p><br /><p>文章來源地址: http://www.cdcfah.com/cp/2834049.html</p></div></div></div></div></div><div id="rvn2kz7" class="page-right twoColRt"><div id="g2gi2p9" class="box01 margin10 clearfix"><h3><a 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