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class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div></div><div id="unf7ktf" class="content"><p><span>需求數(shù)量：</span>0</p><p><span>價(jià)格要求：</span>面議</p><p><span>所在地：</span>廣東省</p><p><span>包裝要求：</span><span style="color: #f30;"></span></p><p><span>產(chǎn)品關(guān)鍵詞：</span>珠海氮化鎵材料刻蝕多少錢(qián),材料刻蝕</p><p><span>***更新：</span>2021-01-18 00:28:24</p><p><span id="click" >瀏覽次數(shù)：1次</span></p><a rel="nofollow" class="button">聯(lián)系我們</a></div></div><div id="xgn8a33" class="rightbox"><h3>公司基本資料信息</h3><p style="border:0;"><a rel="nofollow">廣東省科學(xué)院半導(dǎo)體研究所</a></p><p><span>聯(lián)系人：</span>曾昭燴</p><p><span>郵箱: </span>512480780@qq.com</p><p><span>電話: </span>15018420573</p><p><span>傳真: </span>020_</p><p><span>網(wǎng)址: </span>http://www.gdssli.com</p><p><span>手機(jī): </span>020-61086422</p><p><span>地址: </span>長(zhǎng)興路363號(hào)</p><p>[當(dāng)前離線] <a rel="nofollow"> [加為商友] </a><a rel="nofollow"> [發(fā)送信件] </a></p></div></div><div id="ftlvzv7" class="page-proshow02"><p class="title">詳細(xì)說(shuō)明</p><div id="q8u3vua" class="box"><p><p style="text-indent:25px">GaN材料的刻蝕一般采用光刻膠來(lái)做掩膜，但是刻蝕GaN和光刻膠，選擇比接近1:1，如果需要刻蝕深度超過(guò)3微米以上就需要采用厚膠來(lái)做掩膜。對(duì)于刻蝕更深的GaN,那就需要采用氧化硅來(lái)做刻蝕的掩模，刻蝕GaN的氣體對(duì)于刻蝕氧化硅刻蝕比例可以達(dá)到8:1。深硅刻蝕是MEMS器件工藝當(dāng)中很重要的一個(gè)工藝，根據(jù)不同應(yīng)用對(duì)深硅刻蝕有不同的側(cè)壁形貌要求，深硅刻蝕的刻蝕方式有BOSCH工藝、Cryo工藝，珠海氮化鎵材料刻蝕多少錢(qián)，珠海氮化鎵材料刻蝕多少錢(qián)，珠海氮化鎵材料刻蝕多少錢(qián)、mix工藝，而常用的工藝是用BOSCH工藝，刻蝕深度可以達(dá)到400微米，深寬選擇比可以達(dá)到20:1.介電刻蝕應(yīng)用中通常使用含氟的化學(xué)物質(zhì)。珠海氮化鎵材料刻蝕多少錢(qián)</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="珠海氮化鎵材料刻蝕多少錢(qián),材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343095082892/6968052.png"></div><p style="text-indent:25px">刻蝕技術(shù)（etchingtechnique），是在半導(dǎo)體工藝，按照掩模圖形或設(shè)計(jì)要求對(duì)半導(dǎo)體襯底表面或表面覆蓋薄膜進(jìn)行選擇性腐蝕或剝離的技術(shù)?？涛g技術(shù)不僅是半導(dǎo)體器件和集成電路的基本制造工藝，而且還應(yīng)用于薄膜電路、印刷電路和其他微細(xì)圖形的加工。刻蝕還可分為濕法刻蝕和干法刻蝕。普通的刻蝕過(guò)程大致如下：先在表面涂敷一層光致抗蝕劑，然后透過(guò)掩模對(duì)抗蝕劑層進(jìn)行選擇性曝光，由于抗蝕劑層的已曝光部分和未曝光部分在顯影液中溶解速度不同，經(jīng)過(guò)顯影后在襯底表面留下了抗蝕劑圖形，以此為掩模就可對(duì)襯底表面進(jìn)行選擇性腐蝕。如果襯底表面存在介質(zhì)或金屬層，則選擇腐蝕以后，圖形就轉(zhuǎn)移到介質(zhì)或金屬層上。珠海氮化鎵材料刻蝕多少錢(qián)有圖形的光刻膠層在刻蝕中不受腐蝕源明顯的侵蝕。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="珠海氮化鎵材料刻蝕多少錢(qián),材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343104448148/1231748.png"></div><p style="text-indent:25px">等離子刻蝕是干法刻蝕中較常見(jiàn)的一種形式。一種或多種氣體原子或分子混合于反應(yīng)腔室中，在外部能量作用下（如射頻、微波等）形成等離子體。其原理是暴露在電子區(qū)域的氣體形成等離子體，由此產(chǎn)生的電離氣體和釋放高能電子組成的氣體，從而形成了等離子或離子，電離氣體原子通過(guò)電場(chǎng)加速時(shí)，會(huì)釋放足夠的力量與表面驅(qū)逐力緊緊粘合材料或蝕刻表面。一個(gè)等離子體干法刻蝕系統(tǒng)基本部件包括：發(fā)生刻蝕反應(yīng)的反應(yīng)腔、產(chǎn)生等離子體氣的射頻電源、氣體流量控制系統(tǒng)、去除生成物的真空系統(tǒng)。刻蝕中會(huì)用到大量的化學(xué)氣體，通常用氟刻蝕二氧化硅，氯和氟刻蝕鋁，氯、氟和溴刻蝕硅，氧去除光刻膠。</p><p style="text-indent:25px">濕法刻蝕是將刻蝕材料浸泡在腐蝕液內(nèi)進(jìn)行腐蝕的技術(shù)，是利用合適的化學(xué)試劑先將未被光刻膠覆蓋的晶片部分分解，然后轉(zhuǎn)成可溶的化合物達(dá)到去除的目的。濕法刻蝕是刻蝕的一種方法,其他的有干刻蝕，等離子刻蝕等。濕法刻蝕這種刻蝕技術(shù)主要是借助腐蝕液和晶片材料的化學(xué)反應(yīng)，因此我們可以借助化學(xué)試劑的選取、配比以及溫度的控制等來(lái)達(dá)到合適的刻蝕速率和良好的刻蝕選擇比。濕法刻蝕的過(guò)程：（1）反應(yīng)物擴(kuò)散到欲被刻蝕材料的表面；（2）反應(yīng)物與被刻蝕材料反應(yīng)；（3）反應(yīng)后的產(chǎn)物離開(kāi)刻蝕表面擴(kuò)散到溶液中，隨溶液被排出。硅和金屬刻蝕使用含氯成分的化學(xué)物質(zhì)。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="珠海氮化鎵材料刻蝕多少錢(qián),材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343069887424/9095478.png"></div><p style="text-indent:25px">刻蝕較簡(jiǎn)單較常用分類(lèi)是：干法刻蝕和濕法刻蝕。顯而易見(jiàn)，它們的區(qū)別就在于濕法使用溶劑或溶液來(lái)進(jìn)行刻蝕。濕法刻蝕是一個(gè)純粹的化學(xué)反應(yīng)過(guò)程，是指利用溶液與預(yù)刻蝕材料之間的化學(xué)反應(yīng)來(lái)去除未被掩蔽膜材料掩蔽的部分而達(dá)到刻蝕目的。其特點(diǎn)是：濕法刻蝕在半導(dǎo)體工藝中有著普遍應(yīng)用：磨片、拋光、清洗、腐蝕。優(yōu)點(diǎn)是選擇性好、重復(fù)性好、生產(chǎn)效率高、設(shè)備簡(jiǎn)單、成本低。干法刻蝕種類(lèi)比較多，包括光揮發(fā)、氣相腐蝕、等離子體腐蝕等。按照被刻蝕的材料類(lèi)型來(lái)劃分，干法刻蝕主要分成三種：金屬刻蝕、介質(zhì)刻蝕和硅刻蝕。原位芯片目前掌握多種刻蝕工藝，并會(huì)根據(jù)客戶的需求，設(shè)計(jì)刻蝕效果好且性?xún)r(jià)比高的刻蝕解決方案。珠海氮化鎵材料刻蝕多少錢(qián)</p><p style="text-indent:25px">干法刻蝕優(yōu)點(diǎn)是：各向異性好，選擇比高，可控性、靈活性、重復(fù)性好。珠海氮化鎵材料刻蝕多少錢(qián)</p><p style="text-indent:25px">反應(yīng)離子刻蝕（RIE）是當(dāng)前常用技術(shù)路徑，屬于物理和化學(xué)混合刻蝕。在傳統(tǒng)的反應(yīng)離子刻蝕機(jī)中，進(jìn)入反應(yīng)室的氣體會(huì)被分解電離為等離子體，等離子體由反應(yīng)正離子、自由基、反應(yīng)原子等組成。反應(yīng)正離子會(huì)轟擊硅片表面形成物理刻蝕，同時(shí)被轟擊的硅片表面化學(xué)活性被提高，之后硅片會(huì)與自由基和反應(yīng)原子形成化學(xué)刻蝕。這個(gè)過(guò)程中由于離子轟擊帶有方向性，RIE技術(shù)具有較好的各向異性。目前先進(jìn)集成電路制造技術(shù)中用于刻蝕關(guān)鍵層的刻蝕方法是高密度等離子體刻蝕技術(shù)。傳統(tǒng)的RIE系統(tǒng)難以使刻蝕物質(zhì)進(jìn)入高深寬比圖形中并將殘余生成物從中排出，因此不能滿足0.25μm以下尺寸的加工要求，解決辦法是增加等離子體的密度。高密度等離子體刻蝕技術(shù)主要分為電子回旋加速振蕩（ECR）、電容或電感耦合等離子體（CCP/ICP）、雙等離子體源等。珠海氮化鎵材料刻蝕多少錢(qián)</p><p style="text-indent:25px">廣東省科學(xué)院半導(dǎo)體研究所主要經(jīng)營(yíng)范圍是電子元器件，擁有一支專(zhuān)業(yè)技術(shù)團(tuán)隊(duì)和良好的市場(chǎng)口碑。公司業(yè)務(wù)涵蓋微納加工技術(shù)服務(wù)，真空鍍膜技術(shù)服務(wù)，紫外光刻技術(shù)服務(wù)，材料刻蝕技術(shù)服務(wù)等，價(jià)格合理，品質(zhì)有保證。公司秉持誠(chéng)信為本的經(jīng)營(yíng)理念，在電子元器件深耕多年，以技術(shù)為先導(dǎo)，以自主產(chǎn)品為重點(diǎn)，發(fā)揮人才優(yōu)勢(shì)，打造電子元器件良好品牌。在社會(huì)各界的鼎力支持下，持續(xù)創(chuàng)新，不斷鑄造***服務(wù)體驗(yàn)，為客戶成功提供堅(jiān)實(shí)有力的支持。</p></p><br /><p>文章來(lái)源地址: http://www.cdcfah.com/cp/2890304.html</p></div></div></div></div></div><div id="cldaho2" class="page-right twoColRt"><div id="i3cw7ga" class="box01 margin10 clearfix"><h3><a href="http://www.cdcfah.com/cp/">猜你喜歡</a></h3><div id="qk8zw8c" class="recomPic likePro"><a href="http://www.cdcfah.com/cp/814588.html"><div><img src="http://tyunfile.71360.com/UpLoadFile/2019/11/1/14/637082168864691056_lgpj_5374157.jpg" alt="福建ZF配件哪家強(qiáng) 信息推薦自業(yè)物資供應(yīng)" class="vcenter" 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