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class="current"> 當(dāng)前位置:<a href="http://www.cdcfah.com/">首頁(yè)?<a href="http://www.cdcfah.com/cp/">產(chǎn)品供應(yīng)</a>?<a href="http://www.cdcfah.com/cp/first-_dzyqj/">電子元器件</a>?<a href="http://www.cdcfah.com/cp/second-dzyqj_dzcllbjjgj/">電子材料、零部件、結(jié)構(gòu)件</a>?<a href="http://www.cdcfah.com/cp/third-dzcllbjjgj_bdtcl/">半導(dǎo)體材料</a>?東莞反射濺射真空鍍膜平臺(tái) 廣東省科學(xué)院半導(dǎo)體研究所供應(yīng)</p><div id="wfh7efx" class="leftbox clearfix"><h1>東莞反射濺射真空鍍膜平臺(tái) 廣東省科學(xué)院半導(dǎo)體研究所供應(yīng)</h1><div id="2bi3g2m" class="proBig"><div id="h7bmyax" class="bigimg"><div><p class="pic"><img src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430346282849786/535107.png" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div><div id="vp8ldvi" class="smallimg"><div><p class="pic"><img src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430346282849786/535107.png" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div></div><div id="akmjqxu" class="content"><p><span>需求數(shù)量：</span>0</p><p><span>價(jià)格要求：</span>面議</p><p><span>所在地：</span>廣東省</p><p><span>包裝要求：</span><span style="color: #f30;"></span></p><p><span>產(chǎn)品關(guān)鍵詞：</span>東莞反射濺射真空鍍膜平臺(tái),真空鍍膜</p><p><span>***更新：</span>2021-01-21 01:18:11</p><p><span id="click" >瀏覽次數(shù)：1次</span></p><a rel="nofollow" class="button">聯(lián)系我們</a></div></div><div id="y7dvnp3" class="rightbox"><h3>公司基本資料信息</h3><p style="border:0;"><a rel="nofollow">廣東省科學(xué)院半導(dǎo)體研究所</a></p><p><span>聯(lián)系人：</span>曾昭燴</p><p><span>郵箱: </span>512480780@qq.com</p><p><span>電話: </span>15018420573</p><p><span>傳真: </span>020_</p><p><span>網(wǎng)址: </span>http://www.gdssli.com</p><p><span>手機(jī): </span>020-61086422</p><p><span>地址: </span>長(zhǎng)興路363號(hào)</p><p>[當(dāng)前離線] <a rel="nofollow"> [加為商友] </a><a rel="nofollow"> [發(fā)送信件] </a></p></div></div><div id="k8j2w9v" class="page-proshow02"><p class="title">詳細(xì)說(shuō)明</p><div id="pzb8jy8" class="box"><p><p style="text-indent:25px">磁控濺射方向性要優(yōu)于電子束蒸發(fā)，但薄膜質(zhì)量，東莞反射濺射真空鍍膜平臺(tái)，表面粗糙度等方面不如電子束蒸發(fā)。但磁控濺射可用于多種材料，東莞反射濺射真空鍍膜平臺(tái)，適用性普遍，電子束蒸發(fā)則只能用于金屬材料蒸鍍，且高熔點(diǎn)金屬，如W，Mo等的蒸鍍較為困難。所以磁控濺射常用于新型氧化物，陶瓷材料的鍍膜，電子束則用于對(duì)薄膜質(zhì)量較高的金屬材料。LPCVD工藝在襯底表面淀積一層均勻的介質(zhì)薄膜，東莞反射濺射真空鍍膜平臺(tái)，在微納加工當(dāng)中用于結(jié)構(gòu)層材料、xi牲層、絕緣層、掩模材料，LPCVD工藝淀積的材料有多晶硅、氮化硅、磷硅玻璃。不同的材料淀積采用不同的氣體。物理的氣相沉積技術(shù)具有膜/基結(jié)合力好、薄膜均勻致密、可制取成分穩(wěn)定的合金膜和重復(fù)性好等優(yōu)點(diǎn)。東莞反射濺射真空鍍膜平臺(tái)</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="東莞反射濺射真空鍍膜平臺(tái),真空鍍膜" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430346282849786/535107.png"></div><p style="text-indent:25px">反應(yīng)濺射工藝進(jìn)行過(guò)程中靶表面濺射區(qū)域內(nèi)出現(xiàn)被反應(yīng)生成物覆蓋或反應(yīng)生成物被剝離而重新暴露金屬表面此消彼長(zhǎng)的過(guò)程。如果化合物的生成速率大于化合物被剝離的速率，化合物覆蓋面積增加。在一定功率的情況下，參與化合物生成的反應(yīng)氣體量增加，化合物生成率增加。如果反應(yīng)氣體量增加過(guò)度，化合物覆蓋面積增加，如果不能及時(shí)調(diào)整反應(yīng)氣體流量，化合物覆蓋面積增加的速率得不到防止，濺射溝道將進(jìn)一步被化合物覆蓋，當(dāng)濺射靶被化合物全部覆蓋的時(shí)候，靶完全中毒，不能繼續(xù)濺射。影響靶中毒的因素主要是反應(yīng)氣體和濺射氣體的比例，反應(yīng)氣體過(guò)量就會(huì)導(dǎo)致靶中毒。東莞反射濺射真空鍍膜平臺(tái)為了使化學(xué)反應(yīng)能在較低的溫度下進(jìn)行，利用了等離子體的活性來(lái)促進(jìn)反應(yīng)。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="東莞反射濺射真空鍍膜平臺(tái),真空鍍膜" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430346295876877/4943151.png"></div><p style="text-indent:25px">為了獲得性能良好的半導(dǎo)體電極Al膜，我們通過(guò)優(yōu)化工藝參數(shù)，制備了一系列性能優(yōu)越的Al薄膜。通過(guò)理論計(jì)算和性能測(cè)試，分析比較了電子束蒸發(fā)與磁控濺射兩種方法制備Al膜的特點(diǎn)?？紤]Al膜的致密性就相當(dāng)于考慮Al膜的晶粒的大小，密度以及能達(dá)到均勻化的程度，因?yàn)樗仓苯佑绊慉l膜的其它性能，進(jìn)而影響半導(dǎo)體嘩啦的性能。氣相沉積的多晶Al膜的晶粒尺寸隨著沉積過(guò)程中吸附原子或原子團(tuán)在基片表面遷移率的增加而增加。由此可以看出Al膜的晶粒尺寸的大小將取決環(huán)于基片溫度、沉積速度、氣相原子在平行基片方面的速度分量、基片表面光潔度和化學(xué)活性等因素。電子束蒸發(fā)：將蒸發(fā)材料置于水冷坩堝中，利用電子束直接加熱使蒸發(fā)材料汽化并在襯底上凝結(jié)形成薄膜，是蒸度高熔點(diǎn)薄膜和高純薄膜的一種主要加熱方法。</p><p style="text-indent:25px">真空鍍膜的物理過(guò)程：PVD（物理的氣相沉積技術(shù)）的基本原理可分為三個(gè)工藝步驟：（1）金屬顆粒的氣化：即鍍料的蒸發(fā)、升華或被濺射從而形成氣化源（2）鍍料粒子（（原子、分子或離子）的遷移：由氣化源供出原子、分子或離子經(jīng)過(guò)碰撞，產(chǎn)生多種反應(yīng)。（3）鍍料粒子在基片表面的沉積。磁控濺射主要利用輝光放電(glowdischarge)將氬氣(Ar)離子撞擊靶材(target)表面,靶材的原子被彈出而堆積在基板表面形成薄膜。濺鍍薄膜的性質(zhì)、均勻度都比蒸鍍薄膜來(lái)的好,但是鍍膜速度卻比蒸鍍慢比較多。新型的濺鍍?cè)O(shè)備幾乎都使用強(qiáng)力磁鐵將電子成螺旋狀運(yùn)動(dòng)以加速靶材周圍的氬氣離子化,造成靶與氬氣離子間的撞擊機(jī)率增加,提高濺鍍速率。磁控濺射一般金屬鍍膜大都采用直流濺鍍,而不導(dǎo)電的陶磁材料則使用RF交流濺鍍。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="東莞反射濺射真空鍍膜平臺(tái),真空鍍膜" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430346429324988/3252501.png"></div><p style="text-indent:25px">針對(duì)PVD制備薄膜應(yīng)力的解決辦法主要有：1.熱退火處理，薄膜中存在的各種缺陷是產(chǎn)生本征應(yīng)力的主要原因，這些缺陷一般都是非平衡缺陷，有自行消失的傾向，但需要外界給予活化能。對(duì)薄膜進(jìn)行熱處理，非平衡缺陷大量消失，薄膜內(nèi)應(yīng)力卓著降低；2.添加亞層控制多層薄膜應(yīng)力，利用應(yīng)變相消原理，在薄膜層之間再沉積一層薄膜，控制工藝使其呈現(xiàn)與結(jié)構(gòu)薄膜相反的應(yīng)力狀態(tài)，緩解應(yīng)力帶來(lái)的破壞作用，整體上抵消內(nèi)部應(yīng)力；3.提高襯底溫度，有利于薄膜和襯底間原子擴(kuò)散，并加速反應(yīng)過(guò)程，有利于形成擴(kuò)散附著，降低內(nèi)應(yīng)力。LPCVD主要特征是因?yàn)樵诘蛪涵h(huán)境下，反應(yīng)氣體的平均自由程及擴(kuò)散系數(shù)變大，膜厚均勻性好、臺(tái)階覆蓋性好。東莞反射濺射真空鍍膜平臺(tái)</p><p style="text-indent:25px">化學(xué)氣相沉積技術(shù)是借助氣相作用或基體表面上的化學(xué)反應(yīng)，在基體上制出金屬或化合物薄膜的方法。東莞反射濺射真空鍍膜平臺(tái)</p><p style="text-indent:25px">薄膜應(yīng)力的起源是薄膜生長(zhǎng)過(guò)程中的某種結(jié)構(gòu)不完整性(雜質(zhì)、空位、晶粒邊界、錯(cuò)位等)、表面能態(tài)的存在、薄膜與基底界面間的晶格錯(cuò)配等磁控濺射由于其內(nèi)部電場(chǎng)的存在，還可在襯底端引入一個(gè)負(fù)偏壓，使濺射速率和材料粒子的方向性增加。所以磁控濺射常用來(lái)沉積TSV結(jié)構(gòu)的阻擋層和種子層，通過(guò)對(duì)相關(guān)參數(shù)的調(diào)整和引入負(fù)偏壓，可以實(shí)現(xiàn)高深寬比的薄膜濺射，且深孔內(nèi)壁薄膜連續(xù)和良好的均勻性。通過(guò)PVD制備的薄膜通常存在應(yīng)力問(wèn)題，不同材料與襯底間可能存在壓應(yīng)力或張應(yīng)力，在多層膜結(jié)構(gòu)中可能同時(shí)存在多種形式的應(yīng)力。東莞反射濺射真空鍍膜平臺(tái)</p><p style="text-indent:25px">廣東省科學(xué)院半導(dǎo)體研究所致力于電子元器件，以科技創(chuàng)新實(shí)現(xiàn)***管理的追求。廣東省半導(dǎo)體所擁有一支經(jīng)驗(yàn)豐富、技術(shù)創(chuàng)新的專業(yè)研發(fā)團(tuán)隊(duì)，以高度的專注和執(zhí)著為客戶提供微納加工技術(shù)服務(wù)，真空鍍膜技術(shù)服務(wù)，紫外光刻技術(shù)服務(wù)，材料刻蝕技術(shù)服務(wù)。廣東省半導(dǎo)體所致力于把技術(shù)上的創(chuàng)新展現(xiàn)成對(duì)用戶產(chǎn)品上的貼心，為用戶帶來(lái)良好體驗(yàn)。廣東省半導(dǎo)體所始終關(guān)注電子元器件行業(yè)。滿足市場(chǎng)需求，提高產(chǎn)品價(jià)值，是我們前行的力量。</p></p><br /><p>文章來(lái)源地址: http://www.cdcfah.com/cp/2935776.html</p></div></div></div></div></div><div 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