天津貴金屬真空鍍膜價格廣東省科學(xué)院半導(dǎo)體研究所供應(yīng)-b2b網(wǎng)站_b2b電子商務(wù)平臺【買產(chǎn)品】-上?？谄蚴称酚邢薰?/title><meta name="description" content="在電子束加熱裝置中，被加熱的材料放置于水冷的坩堝當(dāng)中，可避免蒸發(fā)材料與坩堝壁發(fā)生反應(yīng)影響薄膜的質(zhì)量，因此，電子束蒸發(fā)沉積法可以制備高純薄膜。LPCVD反應(yīng)的能量源是熱能，通常其溫度在500℃-1000℃之間，壓力在0.1Torr-2Torr"><meta name="keywords" content="天津貴金屬真空鍍膜價格,真空鍍膜"><link rel="canonical" href="http://www.cdcfah.com/"/><meta name="applicable-device" content="pc"><link rel="shortcut icon" href="/static/new_net_01/images/favicon.ico"><link rel="stylesheet" href="/static/new_net_01/css/slick.css" /><link rel="stylesheet" href="/static/new_net_01/css/addnew.css"><link rel="stylesheet" href="/static/new_net_01/css/sidenav.css"><link rel="stylesheet" href="/static/new_net_01/css/style.css" /><link rel="stylesheet" href="/static/new_net_01/css/tab.css"><link rel="stylesheet" href="/static/new_net_01/css/404.css"> <meta name="baidu-site-verification" content="OBVzrC9aaQ" /> <meta http-equiv="Cache-Control" 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class="bigimg"><div><p class="pic"><img src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430346295876877/4943151.png" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div><div id="4yanctq" class="smallimg"><div><p class="pic"><img src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430346295876877/4943151.png" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div></div><div id="eyv8t4a" class="content"><p><span>需求數(shù)量：</span>0</p><p><span>價格要求：</span>面議</p><p><span>所在地：</span>廣東省</p><p><span>包裝要求：</span><span style="color: #f30;"></span></p><p><span>產(chǎn)品關(guān)鍵詞：</span>天津貴金屬真空鍍膜價格,真空鍍膜</p><p><span>***更新：</span>2021-01-22 05:19:55</p><p><span id="click" >瀏覽次數(shù)：1次</span></p><a rel="nofollow" class="button">聯(lián)系我們</a></div></div><div id="keldxol" class="rightbox"><h3>公司基本資料信息</h3><p style="border:0;"><a rel="nofollow">廣東省科學(xué)院半導(dǎo)體研究所</a></p><p><span>聯(lián)系人：</span>曾昭燴</p><p><span>郵箱: </span>512480780@qq.com</p><p><span>電話: </span>15018420573</p><p><span>傳真: </span>020_</p><p><span>網(wǎng)址: </span>http://www.gdssli.com</p><p><span>手機: </span>020-61086422</p><p><span>地址: </span>長興路363號</p><p>[當(dāng)前離線] <a rel="nofollow"> [加為商友] </a><a rel="nofollow"> [發(fā)送信件] </a></p></div></div><div id="ml37zof" class="page-proshow02"><p class="title">詳細(xì)說明</p><div id="8l8n3kj" class="box"><p><p style="text-indent:25px">在電子束加熱裝置中，被加熱的材料放置于水冷的坩堝當(dāng)中，可避免蒸發(fā)材料與坩堝壁發(fā)生反應(yīng)影響薄膜的質(zhì)量，因此，電子束蒸發(fā)沉積法可以制備高純薄膜。LPCVD反應(yīng)的能量源是熱能，通常其溫度在500℃-1000℃之間，壓力在0.1Torr-2Torr以內(nèi)，影響其沉積反應(yīng)的主要參數(shù)是溫度、壓力和氣體流量，它的主要特征是因為在低壓環(huán)境下，反應(yīng)氣體的平均自由程及擴散系數(shù)變大，膜厚均勻性好、臺階覆蓋性好。目前采用LPCVD工藝制作的主要材料有：多晶硅、單晶硅，天津貴金屬真空鍍膜價格、非晶硅、氮化硅等。電子束蒸發(fā)法是真空蒸發(fā)鍍膜中常用的一種方法，天津貴金屬真空鍍膜價格，天津貴金屬真空鍍膜價格，是在高真空條件下利用電子束進行直接加熱蒸發(fā)材料，使蒸發(fā)材料氣化并向襯底輸運，在基底上凝結(jié)形成薄膜的方法。電子束蒸發(fā)源由發(fā)射電子的熱陰極、電子加速極和作為陽極的鍍膜材料組成。天津貴金屬真空鍍膜價格</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="天津貴金屬真空鍍膜價格,真空鍍膜" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430346295876877/4943151.png"></div><p style="text-indent:25px">電子束蒸發(fā)源的能量可高度集中，使鍍膜材料局部達到高溫而蒸發(fā)。通過調(diào)節(jié)電子束的功率，可以方便的控制鍍膜材料的蒸發(fā)速率，特別是有利于高熔點以及高純金屬和化合物材料。物質(zhì)的飽和蒸氣壓隨溫度的上升而增大，在一定溫度下，各種物質(zhì)的飽和蒸氣壓不相同，且具有恒定的數(shù)值。相反，一定的飽和蒸氣壓必定對應(yīng)一定的物質(zhì)的溫度。在高真空下，電子qiang燈絲加熱后發(fā)射熱電子，被加速陽極加速，獲得很大的動能轟擊到的蒸發(fā)材料上，把動能轉(zhuǎn)化成熱使蒸發(fā)材料加熱氣化，而實現(xiàn)蒸發(fā)鍍膜。電子束蒸發(fā)源由發(fā)射電子的熱陰極、電子加速極和作為陽極的鍍膜材料組成。天津貴金屬真空鍍膜價格使用等離子體增強氣相沉積法（PECVD）可在低溫（200-350℃）沉積出良好的氧化硅薄膜。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="天津貴金屬真空鍍膜價格,真空鍍膜" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430346372459412/3846733.png"></div><p style="text-indent:25px">熱氧化氧化過程主要分兩個步驟：步驟一：氧氣或者水蒸氣等吸附到氧化硅表面，步驟二：氧氣或者水蒸氣等擴散到硅表面，步驟三：氧氣或者水蒸氣等與硅反應(yīng)生成氧化硅。熱蒸發(fā)主要是三個過程：1.蒸發(fā)材料從固態(tài)轉(zhuǎn)化為氣態(tài)的過程。2.氣化原子或分子在蒸發(fā)源與基底之間的運輸 3.蒸發(fā)原子或分子在襯底表面上淀積過程，即是蒸汽凝聚、成核、核生長、形成連續(xù)薄膜的過程。熱氧化與化學(xué)氣相沉積不同，她是通過氧氣或水蒸氣擴散到硅表面并進行化學(xué)反應(yīng)形成氧化硅。熱氧化形成氧化硅時，會消耗相當(dāng)于氧化硅膜厚的45%的硅。</p><p style="text-indent:25px">等離子體化學(xué)氣相沉積法，利用了等離子體的活性來促進反應(yīng)，使化學(xué)反應(yīng)能在較低的溫度下進行。優(yōu)點是：反應(yīng)溫度降低，沉積速率較快，成膜質(zhì)量好，不容易破裂。缺點是：設(shè)備投資大、對氣管有特殊要求。PECVD工藝中由于等離子體中高速運動的電子撞擊到中性的反應(yīng)氣體分子，就會使中性反應(yīng)氣體分子變成碎片或處于活動的狀態(tài)容易發(fā)生反應(yīng)，以在襯底在300-350℃就可以得到良好的氧化硅或者氮化硅薄膜，可以在器件當(dāng)中作為鈍化絕緣層，來提高器件的可靠性。在蒸發(fā)溫度以上進行蒸發(fā)試，蒸發(fā)源溫度的微小變化即可引起蒸發(fā)速率發(fā)生很大變化。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="天津貴金屬真空鍍膜價格,真空鍍膜" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430346306531246/6300759.png"></div><p style="text-indent:25px">電子束蒸發(fā)的金屬粒子只能考自身能量附著在襯底表面，臺階覆蓋性比較差，如果需要追求臺階覆蓋性和薄膜粘附力，建議使用磁控濺射。電子束蒸發(fā)是目前真空鍍膜技術(shù)中一種成熟且主要的鍍膜方法，它解決了電阻加熱方式中鎢舟材料與蒸鍍源材料直接接觸容易互混的問題。同時在同一蒸發(fā)沉積裝置中可以安置多個坩堝，實現(xiàn)同時或分別蒸發(fā)，沉積多種不同的物質(zhì)。通過電子束蒸發(fā)，任何材料都可以被蒸發(fā)，不同材料需要采用不同類型的坩堝以獲得所要達到的蒸發(fā)速率。電子束蒸發(fā)可以蒸發(fā)高熔點材料，比一般電阻加熱蒸發(fā)熱效率高、束流密度大、蒸發(fā)速度快，制成的薄膜純度高、質(zhì)量好，通過晶振控制，厚度可以較準(zhǔn)確地控制，可以普遍應(yīng)用于制備高純薄膜和各種光學(xué)材料薄膜。真空鍍膜流程：前處理及化學(xué)清洗→襯底真空中烘烤加熱→等離子體清洗→金屬離子轟擊→鍍金屬過渡層→鍍膜。廣州共濺射真空鍍膜公司</p><p style="text-indent:25px">利用PECVD生長的氮化硅薄膜薄膜成分和厚度容易控制。天津貴金屬真空鍍膜價格</p><p style="text-indent:25px">真空鍍膜的工藝流程：真空鍍膜的工藝流程一般依次為：前處理及化學(xué)清洗（材料進行有機清洗和無機清洗）→襯底真空中烘烤加熱→等離子體清洗→金屬離子轟擊→鍍金屬過渡層→鍍膜（通入反應(yīng)氣體）。PECVD，等離子體化學(xué)氣相沉積法是借助微波或射頻等使含有薄膜組成原子的氣體電離，使局部形成等離子體，而等離子體化學(xué)活性很強，兩種或多種氣體很容易發(fā)生反應(yīng)，在襯底上沉積出所期待的薄膜。為了使化學(xué)反應(yīng)能在較低的溫度下進行，利用了等離子體的活性來促進反應(yīng)，因此，這種CVD稱為等離子體增強化學(xué)氣相沉積。天津貴金屬真空鍍膜價格</p><p style="text-indent:25px">廣東省科學(xué)院半導(dǎo)體研究所致力于電子元器件，是一家服務(wù)型的公司。公司業(yè)務(wù)分為微納加工技術(shù)服務(wù)，真空鍍膜技術(shù)服務(wù)，紫外光刻技術(shù)服務(wù)，材料刻蝕技術(shù)服務(wù)等，目前不斷進行創(chuàng)新和服務(wù)改進，為客戶提供良好的產(chǎn)品和服務(wù)。公司秉持誠信為本的經(jīng)營理念，在電子元器件深耕多年，以技術(shù)為先導(dǎo)，以自主產(chǎn)品為重點，發(fā)揮人才優(yōu)勢，打造電子元器件良好品牌。廣東省半導(dǎo)體所憑借創(chuàng)新的產(chǎn)品、專業(yè)的服務(wù)、眾多的成功案例積累起來的聲譽和口碑，讓企業(yè)發(fā)展再上新高。</p></p><br /><p>文章來源地址: http://www.cdcfah.com/cp/2956126.html</p></div></div></div></div></div><div id="boldsjq" class="page-right twoColRt"><div id="ddvpm2f" class="box01 margin10 clearfix"><h3><a href="http://www.cdcfah.com/cp/">猜你喜歡</a></h3><div id="2k9t4pm" class="recomPic likePro"><a href="http://www.cdcfah.com/cp/814588.html"><div><img src="http://tyunfile.71360.com/UpLoadFile/2019/11/1/14/637082168864691056_lgpj_5374157.jpg" alt="福建ZF配件哪家強信息推薦自業(yè)物資供應(yīng)" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></div><p>福建ZF配件哪家強信息推薦自業(yè)物資供應(yīng)</p></a></div><div 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