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src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430344822506115/8890311.png" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div><div id="ptkmtf2" class="smallimg"><div><p class="pic"><img src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430344822506115/8890311.png" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div></div><div id="3ww2q3n" class="content"><p><span>需求數(shù)量：</span>0</p><p><span>價(jià)格要求：</span>面議</p><p><span>所在地：</span>廣東省</p><p><span>包裝要求：</span><span style="color: #f30;"></span></p><p><span>產(chǎn)品關(guān)鍵詞：</span>山西MEMS微納加工平臺(tái),微納加工</p><p><span>***更新：</span>2021-01-23 01:18:33</p><p><span id="click" >瀏覽次數(shù)：1次</span></p><a rel="nofollow" class="button">聯(lián)系我們</a></div></div><div id="xmo3y9y" class="rightbox"><h3>公司基本資料信息</h3><p style="border:0;"><a rel="nofollow">廣東省科學(xué)院半導(dǎo)體研究所</a></p><p><span>聯(lián)系人：</span>曾昭燴</p><p><span>郵箱: </span>512480780@qq.com</p><p><span>電話: </span>15018420573</p><p><span>傳真: </span>020_</p><p><span>網(wǎng)址: </span>http://www.gdssli.com</p><p><span>手機(jī): </span>020-61086422</p><p><span>地址: </span>長(zhǎng)興路363號(hào)</p><p>[當(dāng)前離線] <a rel="nofollow"> [加為商友] </a><a rel="nofollow"> [發(fā)送信件] </a></p></div></div><div id="lq737xs" class="page-proshow02"><p class="title">詳細(xì)說(shuō)明</p><div id="shol7kr" class="box"><p><p style="text-indent:25px">基于光刻工藝的微納加工技術(shù)主要包含以下過(guò)程：掩模（mask）制備、圖形形成及轉(zhuǎn)移（涂膠、曝光、顯影）、薄膜沉積，山西MEMS微納加工平臺(tái)、刻蝕、外延生長(zhǎng)，山西MEMS微納加工平臺(tái)、氧化和摻雜等。在基片表面涂覆一層某種光敏介質(zhì)的薄膜（抗蝕膠），曝光系統(tǒng)把掩模板的圖形投射在（抗蝕膠）薄膜上，光（光子）的曝光過(guò)程是通過(guò)光化學(xué)作用使抗蝕膠發(fā)生光化學(xué)作用，形成微細(xì)圖形的潛像，山西MEMS微納加工平臺(tái)，再通過(guò)顯影過(guò)程使剩余的抗蝕膠層轉(zhuǎn)變成具有微細(xì)圖形的窗口，后續(xù)基于抗蝕膠圖案進(jìn)行鍍膜、刻蝕等可進(jìn)一步制作所需微納結(jié)構(gòu)或器件。高精度的微細(xì)結(jié)構(gòu)通過(guò)控制聚焦電子束（光束）移動(dòng)書寫圖案進(jìn)行曝光。山西MEMS微納加工平臺(tái)</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="山西MEMS微納加工平臺(tái),微納加工" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430344822506115/8890311.png"></div><p style="text-indent:25px">微納加工中，材料濕法腐蝕是一個(gè)常用的工藝方法。材料的濕法化學(xué)刻蝕，包括刻蝕劑到達(dá)材料表面和反應(yīng)產(chǎn)物離開表面的傳輸過(guò)程，也包括表面本身的反應(yīng)。半導(dǎo)體技術(shù)中的許多刻蝕工藝是在相當(dāng)緩慢并受速率控制的情況下進(jìn)行的，這是因?yàn)楦采w在表面上有一污染層。污染層厚度常有幾微米，如果化學(xué)反應(yīng)有氣體逸出，則此層就可能破裂。濕法刻蝕工藝常常有反應(yīng)物產(chǎn)生，這種產(chǎn)物受溶液的溶解速率的限制。為了使刻蝕速率提高，常常使溶液攪動(dòng)，因?yàn)閿噭?dòng)增強(qiáng)了外擴(kuò)散效應(yīng)。多晶和非晶材料的刻蝕是各向異性的。然而，結(jié)晶材料的刻蝕可能是各向同性，也可能是各向異性的，它取決于反應(yīng)動(dòng)力學(xué)的性質(zhì)。晶體材料的各向同性刻蝕常被稱作拋光刻蝕，因?yàn)樗鼈儺a(chǎn)生平滑的表面。各向異性刻蝕通常能顯示晶面，或使晶體產(chǎn)生缺陷。因此，可用于化學(xué)加工，也可作為結(jié)晶刻蝕劑。江西微納加工平臺(tái)在我國(guó)，微納制造技術(shù)同樣是重點(diǎn)發(fā)展方向之一。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="山西MEMS微納加工平臺(tái),微納加工" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430344871383445/6371290.png"></div><p style="text-indent:25px">微納加工技術(shù)指尺度為亞毫米、微米和納米量級(jí)元件以及由這些元件構(gòu)成的部件或系統(tǒng)的優(yōu)化設(shè)計(jì)、加工、組裝、系統(tǒng)集成與應(yīng)用技術(shù)，涉及領(lǐng)域廣、多學(xué)科交叉融合，其較主要的發(fā)展方向是微納器件與系統(tǒng)（MEMS）。微納器件與系統(tǒng)是在集成電路制作上發(fā)展的系列**技術(shù)，研制微型傳感器、微型執(zhí)行器等器件和系統(tǒng)，具有微型化、批量化、成本低的鮮明特點(diǎn)，微納加工技術(shù)對(duì)現(xiàn)代的生活、生產(chǎn)產(chǎn)生了巨大的促進(jìn)作用，并催生了一批新興產(chǎn)業(yè)。在Si片上形成具有垂直側(cè)壁的高深寬比溝槽結(jié)構(gòu)是制備先進(jìn)MEMS器件的關(guān)鍵工藝，其各向異性刻蝕要求非常嚴(yán)格。高深寬比的干法刻蝕技術(shù)以其刻蝕速率快、各向異性較強(qiáng)、污染少等優(yōu)點(diǎn)脫穎而出，成為MEMS器件加工的關(guān)鍵技術(shù)之一。</p><p style="text-indent:25px">微納制造技術(shù)不只是加工方法米），到納米級(jí)（千分之一微米），于是，“微的問(wèn)題，同樣是制造裝備的問(wèn)題。高精密納技術(shù)”這一概念就應(yīng)運(yùn)而生了。儀器設(shè)備及高精度制造、測(cè)量技術(shù)也是制微納技術(shù)在二十多年的發(fā)展過(guò)程中。約我國(guó)微納技術(shù)發(fā)展的因素之一。從剛開始的單純理論性質(zhì)的基礎(chǔ)研究衍生微機(jī)電系統(tǒng)的應(yīng)用領(lǐng)域出了許多細(xì)分。如微納級(jí)精度和表面形貌微型機(jī)電系統(tǒng)可以說(shuō)是目前的測(cè)量，微納級(jí)表層物理、化學(xué)、機(jī)械性能微納技術(shù)應(yīng)用較為普遍的了，如**集成的檢測(cè)，微納級(jí)精度的加工和微納級(jí)表層微型儀器，微型機(jī)器人。微型慣性儀表．以的加工原子和分子的去除、搬遷和重組，以及小型、微型甚至是納米衛(wèi)星等。尤其是及納米材料納米級(jí)微傳感器和控制技術(shù)慣性儀表，它是指陀螺儀、加速度表和慣微型和超微型機(jī)械；微型和超微型機(jī)電系性測(cè)量平臺(tái)，是航空、航天、航海中指示。在微納加工過(guò)程中，薄膜的形成方法主要為物理沉積、化學(xué)沉積和混合方法沉積。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="山西MEMS微納加工平臺(tái),微納加工" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430344932770510/211866.png"></div><p style="text-indent:25px">掩模板是根據(jù)放大了的原圖制備的帶有透明窗口的模板。例如，可以用平整的玻璃板，涂覆上金屬鉻薄膜，通過(guò)類似照相制版的方法制備而成。具有微納圖形結(jié)構(gòu)的掩模板通常使用電子束光刻機(jī)直接制備，其制作過(guò)程就是典型的光刻工藝過(guò)程，包括金屬各層沉積、涂膠、電子束光刻、顯影、鉻層腐蝕及去膠等過(guò)程。由于模板像素超多，用掃描式光刻機(jī)制作掩模板的速度相當(dāng)慢，造價(jià)十分昂貴。曝光光刻是圖形形成的中心工藝過(guò)程，可分為正膠工藝和負(fù)膠工藝，采用相同掩模板制作時(shí)，二者可獲得互補(bǔ)的圖形結(jié)構(gòu)。另外，按照不同工作距離可分為接近式曝光、近貼式曝光（接觸曝光）和投射式光學(xué)曝光；按照曝光系統(tǒng)的工作光源又可分為紫外線曝光、X射線與及紫外線曝光、電子束與離子束曝光。此外，微納印刷技術(shù)（，如納米壓印技術(shù)，在納米結(jié)構(gòu)及器件制作中也得到了良好的發(fā)展，其高效的圖形復(fù)制特點(diǎn)使之在工業(yè)界極具吸引力。卷對(duì)卷滾軸壓印技術(shù)已經(jīng)被產(chǎn)線普遍采用。微納加工技術(shù)的特點(diǎn)：微型化。山西MEMS微納加工平臺(tái)</p><p style="text-indent:25px">微納制造技術(shù)研發(fā)和應(yīng)用標(biāo)志著人類可以在微、納米尺度認(rèn)識(shí)和改造世界。山西MEMS微納加工平臺(tái)</p><p style="text-indent:25px">近年來(lái)，激光技術(shù)的飛速發(fā)展使的激光蝕刻技術(shù)孕育而生，類似于激光直寫技術(shù)，激光蝕刻技術(shù)通過(guò)控制聚焦的高能短波/脈沖激光束直接在基材上燒蝕材料并“雕刻”出微細(xì)結(jié)構(gòu)。它不但能夠?qū)崿F(xiàn)傳統(tǒng)意義的薄膜蝕刻，而且可以用來(lái)實(shí)現(xiàn)三維的微結(jié)構(gòu)制作。飛秒高峰值功率激光于有機(jī)聚合物的介質(zhì)的作用具有比較多科學(xué)上比較吸引人注目的特點(diǎn)，其中，雙光子作用下的聚合作用已被成功運(yùn)用于三維納米結(jié)構(gòu)制作，可以制作出非常復(fù)雜、特殊的三維微細(xì)結(jié)構(gòu)。山西MEMS微納加工平臺(tái)</p><p style="text-indent:25px">廣東省科學(xué)院半導(dǎo)體研究所致力于電子元器件，以科技創(chuàng)新實(shí)現(xiàn)***管理的追求。廣東省半導(dǎo)體所深耕行業(yè)多年，始終以客戶的需求為向?qū)?，為客戶提?**的微納加工技術(shù)服務(wù)，真空鍍膜技術(shù)服務(wù)，紫外光刻技術(shù)服務(wù)，材料刻蝕技術(shù)服務(wù)。廣東省半導(dǎo)體所始終以本分踏實(shí)的精神和必勝的信念，影響并帶動(dòng)團(tuán)隊(duì)取得成功。廣東省半導(dǎo)體所創(chuàng)始人陳志濤，始終關(guān)注客戶，創(chuàng)新科技，竭誠(chéng)為客戶提供良好的服務(wù)。</p></p><br /><p>文章來(lái)源地址: http://www.cdcfah.com/cp/2965578.html</p></div></div></div></div></div><div id="nmj7qpr" class="page-right twoColRt"><div id="3q3wryv" class="box01 margin10 clearfix"><h3><a href="http://www.cdcfah.com/cp/">猜你喜歡</a></h3><div 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