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class="content"><p><span>需求數(shù)量：</span>0</p><p><span>價(jià)格要求：</span>面議</p><p><span>所在地：</span>廣東省</p><p><span>包裝要求：</span><span style="color: #f30;"></span></p><p><span>產(chǎn)品關(guān)鍵詞：</span>山東激光器光刻,光刻</p><p><span>***更新：</span>2021-01-27 05:20:38</p><p><span id="click" >瀏覽次數(shù)：0次</span></p><a rel="nofollow" class="button">聯(lián)系我們</a></div></div><div id="apmjbi7" class="rightbox"><h3>公司基本資料信息</h3><p style="border:0;"><a rel="nofollow">廣東省科學(xué)院半導(dǎo)體研究所</a></p><p><span>聯(lián)系人：</span>曾昭燴</p><p><span>郵箱: </span>512480780@qq.com</p><p><span>電話: </span>15018420573</p><p><span>傳真: </span>020_</p><p><span>網(wǎng)址: </span>http://www.gdssli.com</p><p><span>手機(jī): </span>020-61086422</p><p><span>地址: </span>長(zhǎng)興路363號(hào)</p><p>[當(dāng)前離線] <a rel="nofollow"> [加為商友] </a><a rel="nofollow"> [發(fā)送信件] </a></p></div></div><div id="ycewyah" class="page-proshow02"><p class="title">詳細(xì)說(shuō)明</p><div id="uoldfmy" class="box"><p><p style="text-indent:25px">敏感度決定了光刻膠上產(chǎn)生一個(gè)良好的圖形所需一定波長(zhǎng)光的較小能量值?？刮g性決定了光刻膠作為覆蓋物在后續(xù)刻蝕或離子注入工藝中，不被刻蝕或抗擊離子轟擊，從而保護(hù)被覆蓋的襯底。光刻膠依據(jù)不同的產(chǎn)品標(biāo)準(zhǔn)進(jìn)行分類：按照化學(xué)反應(yīng)和顯影的原理，光刻膠可分為正性光刻膠和負(fù)性光刻膠。如果顯影時(shí)未曝光部分溶解于顯影液，形成的圖形與掩膜版相反，山東激光器光刻，稱為負(fù)性光刻膠；如果顯影時(shí)曝光部分溶解于顯影液，山東激光器光刻，形成的圖形與掩膜版相同，山東激光器光刻，稱為正性光刻膠。根據(jù)感光樹(shù)脂的化學(xué)結(jié)構(gòu)來(lái)分類，光刻膠可以分為光聚合型、光分解型和光交聯(lián)型三種類別。光刻其實(shí)就是一個(gè)圖形化轉(zhuǎn)印的過(guò)程。山東激光器光刻</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="山東激光器光刻,光刻" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637424434330407163/4014462.png"></div><p style="text-indent:25px">光刻工藝的成本約為整個(gè)芯片制造工藝的35%，并且耗費(fèi)時(shí)間約占整個(gè)芯片工藝的40%-50%。光刻膠材料約占IC制造材料總成本的4%，市場(chǎng)巨大。因此光刻膠是半導(dǎo)體集成電路制造的中心材料。按顯示效果分類；光刻膠可分為正性光刻膠和負(fù)性光刻膠。負(fù)性光刻膠顯影時(shí)形成的圖形與光罩（掩膜版）相反；正性光刻膠形成的圖形與掩膜版相同。兩者的生產(chǎn)工藝流程基本一致，區(qū)別在于主要原材料不同。按照化學(xué)結(jié)構(gòu)分類；光刻膠可以分為光聚合型，光分解型，光交聯(lián)型和化學(xué)放大型。山東激光器光刻接觸式曝光只適于分立元件和中、小規(guī)模集成電路的生產(chǎn)。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="山東激光器光刻,光刻" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637424434275866125/8943155.png"></div><p style="text-indent:25px">光聚合型，可形成正性光刻膠，是通過(guò)采用了烯類單體，在光作用下生成自由基從而進(jìn)一步引發(fā)單體聚合，較后生成聚合物的過(guò)程；光分解型光刻膠可以制成正性膠，通過(guò)采用含有疊氮醌類化合物的材料在經(jīng)過(guò)光照后,發(fā)生光分解反應(yīng)的過(guò)程。光交聯(lián)型，即采用聚乙烯醇月桂酸酯等作為光敏材料，在光的作用下，其分子中的雙鍵被打開(kāi)，并使鏈與鏈之間發(fā)生交聯(lián)，形成一種不溶性的網(wǎng)狀結(jié)構(gòu)，從而起到抗蝕作用，是一種典型的負(fù)性光刻膠。按照應(yīng)用領(lǐng)域的不同，光刻膠又可以分為印刷電路板（PCB）用光刻膠、液晶顯示(LCD）用光刻膠、半導(dǎo)體用光刻膠和其他用途光刻膠。PCB 光刻膠技術(shù)壁壘相對(duì)其他兩類較低，而半導(dǎo)體光刻膠表示著光刻膠技術(shù)較先進(jìn)水平。</p><p style="text-indent:25px">在光刻過(guò)程中可能會(huì)出現(xiàn)光刻膠未涂滿襯底的異常，主要原因可能以下幾個(gè)：滴膠量不、膠液偏離襯底中心、滴膠是有氣泡、滴膠是有“倒角”，主要的叫絕方法有：增加滴膠量、調(diào)整勻膠機(jī)水平位置、調(diào)整滴膠位置、在“倒角”處滴膠、消除“倒角”。光刻涂膠四周呈現(xiàn)放射性條紋，主要可能的原因是光刻膠有顆粒、襯底未清洗干凈，表面有顆粒、滴膠后精致時(shí)間過(guò)長(zhǎng)，部分光刻膠固話，解決的方法主要有更換光刻膠，使用新的光刻膠涂膠來(lái)測(cè)試一下、將襯底再清洗一次再涂膠、滴膠后馬上旋涂，以免光刻膠有所固化。光刻版材質(zhì)主要是兩種，一個(gè)是石英材質(zhì)一個(gè)是蘇打材質(zhì)，石英材料的透光率會(huì)比蘇打的透光率要高。光刻版就是在蘇打材料通過(guò)光刻、刻蝕等工藝在表面使用鉻金屬做出我們所需要的圖形。光刻是將掩模版上的圖形轉(zhuǎn)移到涂有光致抗蝕劑（或稱光刻膠）的襯底上。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="山東激光器光刻,光刻" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637424434295231427/296510.png"></div><p style="text-indent:25px">不同波長(zhǎng)的光刻光源要求截然不同的光刻設(shè)備和光刻膠材料。在20世紀(jì)80年代，半導(dǎo)體制成的主流工藝尺寸在1.2um(1200nm)至0.8um(800nm)之間。那時(shí)候波長(zhǎng)436nm的光刻光源被普遍使用。在90年代前半期，隨著半導(dǎo)體制程工藝尺寸朝0.5um（500nm）和0.35um（350nm）演進(jìn)，光刻開(kāi)始采用365nm波長(zhǎng)光源。436nm和365nm光源分別是高壓汞燈中能量較高，波長(zhǎng)較短的兩個(gè)譜線。高壓汞燈技術(shù)成熟，因此較早被用來(lái)當(dāng)作光刻光源。使用波長(zhǎng)短，能量高的光源進(jìn)行光刻工藝更容易激發(fā)光化學(xué)反應(yīng)、提高光刻分別率。顯影液：正性光刻膠的顯影液。正膠的顯影液位堿性水溶液。山東激光器光刻</p><p style="text-indent:25px">光刻膠的國(guó)產(chǎn)化公關(guān)正在各方面展開(kāi)，在面板屏顯光刻膠領(lǐng)域，中國(guó)已經(jīng)出現(xiàn)了一批有競(jìng)爭(zhēng)力的本土企業(yè)。山東激光器光刻</p><p style="text-indent:25px">光刻膠若性能不達(dá)標(biāo)會(huì)對(duì)芯片成品率造成重大影響。目前中國(guó)光刻膠國(guó)產(chǎn)化水平嚴(yán)重不足，重點(diǎn)技術(shù)差距在半導(dǎo)體光刻膠領(lǐng)域，有2-3代差距，隨著下游半導(dǎo)體行業(yè)、LED及平板顯示行業(yè)的快速發(fā)展，未來(lái)國(guó)內(nèi)光刻膠產(chǎn)品國(guó)產(chǎn)化替代空間巨大。同時(shí)，國(guó)內(nèi)光刻膠企業(yè)積極抓住中國(guó)晶圓制造擴(kuò)產(chǎn)的百年機(jī)遇，發(fā)展光刻膠業(yè)務(wù)，力爭(zhēng)早日追上國(guó)際先進(jìn)水平，打進(jìn)國(guó)內(nèi)新建晶圓廠的供應(yīng)鏈。光刻膠的國(guó)產(chǎn)化公關(guān)正在各方面展開(kāi)，在面板屏顯光刻膠領(lǐng)域，中國(guó)已經(jīng)出現(xiàn)了一批有競(jìng)爭(zhēng)力的本土企業(yè)。在半導(dǎo)體和面板光刻膠領(lǐng)域，盡管國(guó)產(chǎn)光刻膠距離國(guó)際先進(jìn)水平仍然有差距，但是在政策的支持和自身的不懈努力之下，中國(guó)已經(jīng)有一批光刻膠企業(yè)陸續(xù)實(shí)現(xiàn)了技術(shù)突破。廣東省科學(xué)院半導(dǎo)體研究所。山東激光器光刻</p><p style="text-indent:25px">廣東省科學(xué)院半導(dǎo)體研究所是一家面向半導(dǎo)體光電子器件、功率電子器件、MEMS、生物芯片等前沿領(lǐng)域，致力于打造***的公益性、開(kāi)放性、支撐性樞紐中心。平臺(tái)擁有半導(dǎo)體制備工藝所需的整套儀器設(shè)備，建立了一條實(shí)驗(yàn)室研發(fā)線和一條中試線，加工尺寸覆蓋2-6英寸（部分8英寸），同時(shí)形成了一支與硬件有機(jī)結(jié)合的專業(yè)人才隊(duì)伍。平臺(tái)當(dāng)前緊抓技術(shù)創(chuàng)新和公共服務(wù)，面向國(guó)內(nèi)外高校、科研院所以及企業(yè)提供開(kāi)放共享，為技術(shù)咨詢、創(chuàng)新研發(fā)、技術(shù)驗(yàn)證以及產(chǎn)品中試提供支持。的公司，致力于發(fā)展為創(chuàng)新務(wù)實(shí)、誠(chéng)實(shí)可信的企業(yè)。廣東省半導(dǎo)體所作為面向半導(dǎo)體光電子器件、功率電子器件、MEMS、生物芯片等前沿領(lǐng)域，致力于打造***的公益性、開(kāi)放性、支撐性樞紐中心。平臺(tái)擁有半導(dǎo)體制備工藝所需的整套儀器設(shè)備，建立了一條實(shí)驗(yàn)室研發(fā)線和一條中試線，加工尺寸覆蓋2-6英寸（部分8英寸），同時(shí)形成了一支與硬件有機(jī)結(jié)合的專業(yè)人才隊(duì)伍。平臺(tái)當(dāng)前緊抓技術(shù)創(chuàng)新和公共服務(wù)，面向國(guó)內(nèi)外高校、科研院所以及企業(yè)提供開(kāi)放共享，為技術(shù)咨詢、創(chuàng)新研發(fā)、技術(shù)驗(yàn)證以及產(chǎn)品中試提供支持。的企業(yè)之一，為客戶提供良好的微納加工技術(shù)服務(wù)，真空鍍膜技術(shù)服務(wù)，紫外光刻技術(shù)服務(wù)，材料刻蝕技術(shù)服務(wù)。廣東省半導(dǎo)體所不斷開(kāi)拓創(chuàng)新，追求出色，以技術(shù)為先導(dǎo)，以產(chǎn)品為平臺(tái)，以應(yīng)用為重點(diǎn)，以服務(wù)為保證，不斷為客戶創(chuàng)造更高價(jià)值，提供更優(yōu)服務(wù)。廣東省半導(dǎo)體所始終關(guān)注電子元器件市場(chǎng)，以敏銳的市場(chǎng)洞察力，實(shí)現(xiàn)與客戶的成長(zhǎng)共贏。</p></p><br 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