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class="wrap clearfix"><section class="container clearfix tcPro"><section class="home-main container clearfix"><div id="log8qjv" class="twoCol"><div id="burbxeg" class="page-proshow clearfix"><p class="current"> 當前位置:<a href="http://www.cdcfah.com/">首頁?<a href="http://www.cdcfah.com/cp/">產(chǎn)品供應(yīng)</a>?<a href="http://www.cdcfah.com/cp/first-_dzyqj/">電子元器件</a>?<a href="http://www.cdcfah.com/cp/second-dzyqj_dzcllbjjgj/">電子材料、零部件、結(jié)構(gòu)件</a>?<a href="http://www.cdcfah.com/cp/third-dzcllbjjgj_bdtcl/">半導(dǎo)體材料</a>?黑龍江GaN材料刻蝕服務(wù) 廣東省科學(xué)院半導(dǎo)體研究所供應(yīng)</p><div id="rasuw7w" class="leftbox clearfix"><h1>黑龍江GaN材料刻蝕服務(wù) 廣東省科學(xué)院半導(dǎo)體研究所供應(yīng)</h1><div id="bln88xm" class="proBig"><div id="oi89yp3" class="bigimg"><div><p class="pic"><img src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343010112250/1147970.png" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div><div id="s7vifhz" class="smallimg"><div><p class="pic"><img src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343010112250/1147970.png" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></p></div></div></div><div id="eliprif" class="content"><p><span>需求數(shù)量：</span>0</p><p><span>價格要求：</span>面議</p><p><span>所在地：</span>廣東省</p><p><span>包裝要求：</span><span style="color: #f30;"></span></p><p><span>產(chǎn)品關(guān)鍵詞：</span>黑龍江GaN材料刻蝕服務(wù),材料刻蝕</p><p><span>***更新：</span>2021-01-31 06:21:13</p><p><span id="click" >瀏覽次數(shù)：3次</span></p><a rel="nofollow" class="button">聯(lián)系我們</a></div></div><div id="vpbyf2k" class="rightbox"><h3>公司基本資料信息</h3><p style="border:0;"><a rel="nofollow">廣東省科學(xué)院半導(dǎo)體研究所</a></p><p><span>聯(lián)系人：</span>曾昭燴</p><p><span>郵箱: </span>512480780@qq.com</p><p><span>電話: </span>15018420573</p><p><span>傳真: </span>020_</p><p><span>網(wǎng)址: </span>http://www.gdssli.com</p><p><span>手機: </span>020-61086422</p><p><span>地址: </span>長興路363號</p><p>[當前離線] <a rel="nofollow"> [加為商友] </a><a rel="nofollow"> [發(fā)送信件] </a></p></div></div><div id="koln7jl" class="page-proshow02"><p class="title">詳細說明</p><div id="d88zgyv" class="box"><p><p style="text-indent:25px">硅材料在MEMS器件當中是很重要的一種材料。在硅材料刻蝕當中，應(yīng)用于醫(yī)美方向的硅針刻蝕需要用到各向同性刻蝕，縱向和橫向同時刻蝕，硅柱的刻蝕需要用到各項異性刻蝕，主要是在垂直方向刻蝕，而橫向盡量少刻蝕。氮化鎵基超表面結(jié)構(gòu)當中，氮化鎵材料的刻蝕需要使用氧化硅作為掩膜來刻蝕，而氧化硅的刻蝕需要使用Cr充當硬掩模。所以工藝當中，需要先在氮化鎵表面使用PECVD沉積一層氧化硅，采用剝離的方法在氧化硅表面生長一層Cr，使用ICP設(shè)備依次刻蝕氧化硅和氮化鎵。ICP刻蝕可以調(diào)節(jié)的刻蝕參數(shù)有：ICP 功率，功率值越大，等離子體密度越大，射頻功率，功率值越大，黑龍江GaN材料刻蝕服務(wù)，黑龍江GaN材料刻蝕服務(wù)，等離子體能量越大，物理濺射加強。GaN的刻蝕一般是采用氯氣和三氯化硼，黑龍江GaN材料刻蝕服務(wù)，氣體比例的變化可以調(diào)節(jié)物理轟擊和化學(xué)反應(yīng)的平衡。對于二氧化硅刻蝕，氣體一般使用CF4和氧的混合劑。黑龍江GaN材料刻蝕服務(wù)</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="黑龍江GaN材料刻蝕服務(wù),材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343010112250/1147970.png"></div><p style="text-indent:25px">在微細加工中，刻蝕和清洗處理過程包括許多內(nèi)容。對于適當取向的半導(dǎo)體薄片的鋸痕首先要機械拋光，以除去全部的機械損傷，之后進行化學(xué)刻蝕和拋光，以獲得無損傷的光學(xué)平面。這種工藝往往能去除以微米級計算的材料表層。對薄片進行化學(xué)清洗和洗滌，可以除去因操作和貯存而產(chǎn)生的污染，然后用熱處理的方法生長Si0(對于硅基集成電路)，或者沉積氮化硅(對于砷化鎵電路)，以形成初始保護層?？涛g過程和圖案的形成相配合。廣東省科學(xué)院半導(dǎo)體研究所。黑龍江GaN材料刻蝕服務(wù)當需要處理多層薄膜時，以及刻蝕中必須精確停在某個特定薄膜層而不對其造成損傷時。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="黑龍江GaN材料刻蝕服務(wù),材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343069887424/9095478.png"></div><p style="text-indent:25px">等離子體刻蝕機要求相同的元素：化學(xué)刻蝕劑和能量源。物理上，等離子體刻蝕劑由反應(yīng)室、真空系統(tǒng)、氣體供應(yīng)、終點檢測和電源組成。晶圓被送入反應(yīng)室，并由真空系統(tǒng)把內(nèi)部壓力降低。在真空建立起來后，將反應(yīng)室內(nèi)充入反應(yīng)氣體。對于二氧化硅刻蝕，氣體一般使用CF4和氧的混合劑。電源通過在反應(yīng)室中的電極創(chuàng)造了一個射頻電場。能量場將混合氣體激發(fā)或等離子體狀態(tài)。在激發(fā)狀態(tài)，氟刻蝕二氧化硅，并將其轉(zhuǎn)化為揮發(fā)性成分由真空系統(tǒng)排出。廣東省科學(xué)院半導(dǎo)體研究所。</p><p style="text-indent:25px">刻蝕工藝主要分為兩種：干法刻蝕和濕法刻蝕。干法刻蝕是通過等離子氣與硅片發(fā)生物理或化學(xué)反應(yīng)（或結(jié)合物理、化學(xué)兩種反應(yīng)）的方式將表面材料去除，主要用于亞微米尺寸下刻蝕，由于具有良好的各向異性和工藝可控性已被普遍應(yīng)用于芯片制造領(lǐng)域；濕法刻蝕通過化學(xué)試劑去除硅片表面材料，一般用于尺寸較大情況，目前仍用于干法刻蝕后殘留物的去除。金屬刻蝕主要應(yīng)用于金屬互連線、通孔、接觸金屬等環(huán)節(jié)。金屬互連線通常采用鋁合金，對鋁的刻蝕采用氯基氣體和部分聚合物。鎢在多層金屬結(jié)構(gòu)中常用作通孔的填充物，通常采用氟基或氯基氣體?？涛g是用化學(xué)或物理方法有選擇地從硅片表面去除不需要的材料的過程。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="黑龍江GaN材料刻蝕服務(wù),材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343042348191/1704222.png"></div><p style="text-indent:25px">在GaN發(fā)光二極管器件制作過程中，刻蝕是一項很重要的工藝。ICP干法刻蝕常用在n型電極制作中，因為在藍寶石襯底上生長LED，n型電極和P型電極位于同一側(cè)，需要刻蝕露出n型層。ICP是近幾年來很常用的一種離子體刻蝕技術(shù)，它在GaN的刻蝕中應(yīng)用很普遍。ICP刻蝕具有等離子體密度和等離子體的轟擊能量單獨可控，低壓強獲得高密度等離子體，在保持高刻蝕速率的同事能夠產(chǎn)生高的選擇比和低損傷的刻蝕表面等優(yōu)勢。ICP（感應(yīng)耦合等離子）刻蝕GaN是物料濺射和化學(xué)反應(yīng)相結(jié)合的復(fù)雜過程?？涛gGaN主要使用到氯氣和三氯化硼，刻蝕過程中材料表面表面的Ga-N鍵在離子轟擊下破裂，此為物理濺射，產(chǎn)生活性的Ga和N原子，氮原子相互結(jié)合容易析出氮氣，Ga原子和Cl離子生成容易揮發(fā)的GaCl2或者GaCl3。等離子體刻蝕機要求相同的元素：化學(xué)刻蝕劑和能量源。黑龍江GaN材料刻蝕服務(wù)</p><p style="text-indent:25px">干法刻蝕也可以根據(jù)被刻蝕的材料類型來分類，如刻蝕氮化鎵、氧化硅、氮化硅、鋁鎵氮等材料。黑龍江GaN材料刻蝕服務(wù)</p><p style="text-indent:25px">經(jīng)過前面的一系列工藝已將光刻掩膜版的圖形轉(zhuǎn)移到光刻膠上。為了制作元器件，需將光刻膠上的圖形進一步轉(zhuǎn)移到光刻膠下層的材料上。這個任務(wù)就由刻蝕來完成?？涛g就是將涂膠前所淀積的薄膜中沒有被光刻膠（經(jīng)過曝光和顯影后）覆蓋和保護的那部分去除掉，達到將光刻膠上的圖形轉(zhuǎn)移到其下層材料上的目的。光刻膠的下層薄膜可能是二氧化硅、氮化硅、多晶硅或者金屬材料。材料不同或圖形不同，刻蝕的要求不同。實際上，光刻和刻蝕是兩個不同的加工工藝，但因為這兩個工藝只有連續(xù)進行，才能完成真正意義上的圖形轉(zhuǎn)移，而且在工藝線上，這兩個工藝經(jīng)常是放在同一工序中，因此有時也將這兩個步驟統(tǒng)稱為光刻。黑龍江GaN材料刻蝕服務(wù)</p><p style="text-indent:25px">廣東省科學(xué)院半導(dǎo)體研究所致力于電子元器件，是一家服務(wù)型的公司。廣東省半導(dǎo)體所致力于為客戶提供良好的微納加工技術(shù)服務(wù)，真空鍍膜技術(shù)服務(wù)，紫外光刻技術(shù)服務(wù)，材料刻蝕技術(shù)服務(wù)，一切以用戶需求為中心，深受廣大客戶的歡迎。公司將不斷增強企業(yè)重點競爭力，努力學(xué)習(xí)行業(yè)知識，遵守行業(yè)規(guī)范，植根于電子元器件行業(yè)的發(fā)展。在社會各界的鼎力支持下，持續(xù)創(chuàng)新，不斷鑄造***服務(wù)體驗，為客戶成功提供堅實有力的支持。</p></p><br /><p>文章來源地址: http://www.cdcfah.com/cp/3091432.html</p></div></div></div></div></div><div id="gvcj8zl" class="page-right twoColRt"><div id="gvcegs3" class="box01 margin10 clearfix"><h3><a href="http://www.cdcfah.com/cp/">猜你喜歡</a></h3><div id="vub72f3" class="recomPic likePro"><a href="http://www.cdcfah.com/cp/814588.html"><div><img src="http://tyunfile.71360.com/UpLoadFile/2019/11/1/14/637082168864691056_lgpj_5374157.jpg" alt="福建ZF配件哪家強信息推薦自業(yè)物資供應(yīng)" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></div><p>福建ZF配件哪家強信息推薦自業(yè)物資供應(yīng)</p></a></div><div id="yszgi7t" class="recomPic likePro"><a 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