黑龍江Si材料刻蝕加工平臺(tái) 廣東省科學(xué)院半導(dǎo)體研究所供應(yīng)-b2b網(wǎng)站_b2b電子商務(wù)平臺(tái)【買產(chǎn)品】-上?？谄蚴称酚邢薰?/title><meta name="description" content="選擇比指的是在同一刻蝕條件下一種材料與另一種材料相比刻蝕速率快多少，它定義為被刻蝕材料的刻蝕速率與另一種材料的刻蝕速率的比，黑龍江Si材料刻蝕加工平臺(tái)?；緝?nèi)容：高選擇比意味著只刻除想要刻去的那一層材料。一個(gè)高選擇比的刻蝕工藝不刻蝕下面一層"><meta name="keywords" content="黑龍江Si材料刻蝕加工平臺(tái),材料刻蝕"><link rel="canonical" href="http://www.cdcfah.com/"/><meta name="applicable-device" content="pc"><link rel="shortcut icon" href="/static/new_net_01/images/favicon.ico"><link rel="stylesheet" href="/static/new_net_01/css/slick.css" /><link rel="stylesheet" href="/static/new_net_01/css/addnew.css"><link rel="stylesheet" href="/static/new_net_01/css/sidenav.css"><link rel="stylesheet" href="/static/new_net_01/css/style.css" /><link rel="stylesheet" href="/static/new_net_01/css/tab.css"><link rel="stylesheet" href="/static/new_net_01/css/404.css"> <meta name="baidu-site-verification" content="OBVzrC9aaQ" /> <meta http-equiv="Cache-Control" 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class="content"><p><span>需求數(shù)量：</span>0</p><p><span>價(jià)格要求：</span>面議</p><p><span>所在地：</span>廣東省</p><p><span>包裝要求：</span><span style="color: #f30;"></span></p><p><span>產(chǎn)品關(guān)鍵詞：</span>黑龍江Si材料刻蝕加工平臺(tái),材料刻蝕</p><p><span>***更新：</span>2021-01-31 08:24:15</p><p><span id="click" >瀏覽次數(shù)：5次</span></p><a rel="nofollow" class="button">聯(lián)系我們</a></div></div><div id="38gdkwo" class="rightbox"><h3>公司基本資料信息</h3><p style="border:0;"><a rel="nofollow">廣東省科學(xué)院半導(dǎo)體研究所</a></p><p><span>聯(lián)系人：</span>曾昭燴</p><p><span>郵箱: </span>512480780@qq.com</p><p><span>電話: </span>15018420573</p><p><span>傳真: </span>020_</p><p><span>網(wǎng)址: </span>http://www.gdssli.com</p><p><span>手機(jī): </span>020-61086422</p><p><span>地址: </span>長興路363號(hào)</p><p>[當(dāng)前離線] <a rel="nofollow"> [加為商友] </a><a rel="nofollow"> [發(fā)送信件] </a></p></div></div><div id="qegnp3o" class="page-proshow02"><p class="title">詳細(xì)說明</p><div id="h3rofm8" class="box"><p><p style="text-indent:25px">選擇比指的是在同一刻蝕條件下一種材料與另一種材料相比刻蝕速率快多少，它定義為被刻蝕材料的刻蝕速率與另一種材料的刻蝕速率的比，黑龍江Si材料刻蝕加工平臺(tái)?；緝?nèi)容：高選擇比意味著只刻除想要刻去的那一層材料。一個(gè)高選擇比的刻蝕工藝不刻蝕下面一層材料（刻蝕到恰當(dāng)?shù)纳疃葧r(shí)停止）并且保護(hù)的光刻膠也未被刻蝕。圖形幾何尺寸的縮小要求減薄光刻膠厚度。高選擇比在較先進(jìn)的工藝中為了確保關(guān)鍵尺寸和剖面控制是必需的，黑龍江Si材料刻蝕加工平臺(tái)。特別是關(guān)鍵尺寸越小，選擇比要求越高，黑龍江Si材料刻蝕加工平臺(tái)。廣東省科學(xué)院半導(dǎo)體研究所。深硅刻蝕是MEMS器件制作當(dāng)中一個(gè)很重要的工藝。黑龍江Si材料刻蝕加工平臺(tái)</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="黑龍江Si材料刻蝕加工平臺(tái),材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343022162510/3890106.png"></div><p style="text-indent:25px">工藝所用化學(xué)物質(zhì)取決于要刻蝕的薄膜類型。介電刻蝕應(yīng)用中通常使用含氟的化學(xué)物質(zhì)。硅和金屬刻蝕使用含氯成分的化學(xué)物質(zhì)。在工藝中可能會(huì)對(duì)一個(gè)薄膜層或多個(gè)薄膜層執(zhí)行特定的刻蝕步驟。當(dāng)需要處理多層薄膜時(shí)，以及刻蝕中必須精確停在某個(gè)特定薄膜層而不對(duì)其造成損傷時(shí)，刻蝕工藝的選擇比就變得非常重要。選擇比是兩個(gè)刻蝕速率的比率：被去除層的刻蝕速率與被保護(hù)層的刻蝕速率（例如刻蝕掩膜或終止層）。掩?；蛲Ｖ箤樱┩ǔ６枷Ｍ懈叩倪x擇比。黑龍江Si材料刻蝕加工平臺(tái)原位芯片目前掌握多種刻蝕工藝，并會(huì)根據(jù)客戶的需求，設(shè)計(jì)刻蝕效果好且性價(jià)比高的刻蝕解決方案。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="黑龍江Si材料刻蝕加工平臺(tái),材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343159292361/4355886.png"></div><p style="text-indent:25px">等離子刻蝕的原理可以概括為以下幾個(gè)步驟：1、在低壓下，反應(yīng)氣體在射頻功率的激發(fā)下，產(chǎn)生電離并形成等離子體，等離子體是由帶電的電子和離子組成，反應(yīng)腔體中的氣體在電子的撞擊下，除了轉(zhuǎn)變成離子外，還能吸收能量并形成大量的活性基團(tuán)（Radicals）2、活性反應(yīng)基團(tuán)和被刻蝕物質(zhì)表面形成化學(xué)反應(yīng)并形成揮發(fā)性的反應(yīng)生成物3、反應(yīng)生成物脫離被刻蝕物質(zhì)表面，并被真空系統(tǒng)抽出腔體。在平行電極等離子體反應(yīng)腔體中，被刻蝕物是被置于面積較小的電極上，在這種情況，一個(gè)直流偏壓會(huì)在等離子體和該電極間形成，并使帶正電的反應(yīng)氣體離子加速撞擊被刻蝕物質(zhì)表面，這種離子轟擊可較大加快表面的化學(xué)反應(yīng)，及反應(yīng)生成物的脫附，從而導(dǎo)致比較高的刻蝕速率，正是由于離子轟擊的存在才使得各向異性刻蝕得以實(shí)現(xiàn)。</p><p style="text-indent:25px">介質(zhì)刻蝕是用于介質(zhì)材料的刻蝕，如二氧化硅。干法刻蝕優(yōu)點(diǎn)是：各向異性好，選擇比高，可控性、靈活性、重復(fù)性好，細(xì)線條操作安全，易實(shí)現(xiàn)自動(dòng)化，無化學(xué)廢液，處理過程未引入污染，潔凈度高。缺點(diǎn)是：成本高，設(shè)備復(fù)雜。干法刻蝕主要形式有純化學(xué)過程（如屏蔽式，下游式，桶式），純物理過程（如離子銑），物理化學(xué)過程，常用的有反應(yīng)離子刻蝕RIE，離子束輔助自由基刻蝕ICP等。干法刻蝕方式比較多，一般有：濺射與離子束銑蝕，等離子刻蝕（PlasmaEtching），高壓等離子刻蝕，高密度等離子體（HDP）刻蝕，反應(yīng)離子刻蝕（RIE）。另外，化學(xué)機(jī)械拋光CMP，剝離技術(shù)等等也可看成是廣義刻蝕的一些技術(shù)。一般而言，高蝕速率（在一定時(shí)間內(nèi)去除的材料量）都會(huì)受到歡迎。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="黑龍江Si材料刻蝕加工平臺(tái),材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343060072941/2374410.png"></div><p style="text-indent:25px">在氧化物中開窗口的過程，可能導(dǎo)致氧化物—硅界面層附近的Si0處發(fā)生鉆蝕。在極端情況下，可以導(dǎo)致氧化物層的脫落。在淺擴(kuò)散高速晶體管的制造中有時(shí)會(huì)遇到這一問題。薄膜材料刻蝕所用的化學(xué)物與溶解這一類物體的材料是相同的，其作用是將材料轉(zhuǎn)變成可溶性的鹽或復(fù)合物。對(duì)于每種材料，都有多種刻蝕化學(xué)物可選用，它們的特性取決于膜的參數(shù)(如膜的微結(jié)構(gòu)、疏松度和膜的形成過程)，同時(shí)也取決于所提供的前加工過程的性質(zhì)。它一般有下述特點(diǎn)：(1)膜材料比相應(yīng)的體材料更容易刻蝕。因此，必須用稀釋的刻蝕劑，以便控制刻蝕速率。(2)受照射的膜一般將被迅速刻蝕。這種情況，包括離子注入的膜，電子束蒸發(fā)生成的膜，甚至前工序中曾在電子束蒸發(fā)環(huán)境中受照射的膜。而某些光刻膠受照射則屬于例外，因?yàn)檫@是由于聚合作用而變得更難刻蝕的緣故。負(fù)性膠就是一例。(3)內(nèi)應(yīng)力大的膜將迅速被刻蝕。膜的應(yīng)力通常由沉積溫度、沉積技術(shù)和基片溫度所控制。(4)微觀結(jié)構(gòu)差的薄膜，包括多孔膜和疏松結(jié)構(gòu)的膜，將被迅速刻蝕。這樣的膜，?？梢酝ㄟ^高于生長溫度的熱處理使其致密化。干法刻蝕優(yōu)點(diǎn)是：細(xì)線條操作安全，易實(shí)現(xiàn)自動(dòng)化，無化學(xué)廢液，處理過程未引入污染，潔凈度高。廣東ICP材料刻蝕公司</p><p style="text-indent:25px">干法刻蝕種類比較多，包括光揮發(fā)、氣相腐蝕、等離子體腐蝕等。黑龍江Si材料刻蝕加工平臺(tái)</p><p style="text-indent:25px">對(duì)于被刻蝕材料和掩蔽層材料（例如光刻膠）的選擇比SR可通過下式計(jì)算：SR=Ef/Er；其中，Ef為被刻蝕材料的刻蝕速率，Er為掩蔽層材料的刻蝕速率（如光刻膠）；根據(jù)這個(gè)公式，選擇比通常表示為一個(gè)比值，一個(gè)選擇比差的工藝這一比值可能是1:1，意味著被刻蝕的材料與光刻膠掩蔽層被去除地一樣快，而一個(gè)選擇比高的工藝這一比值可能是100:1，說明被刻蝕材料的刻蝕速率為不要被刻蝕材料的（如光刻膠）刻蝕速率的100倍。廣東省科學(xué)院半導(dǎo)體研究所。黑龍江Si材料刻蝕加工平臺(tái)</p><p style="text-indent:25px">廣東省科學(xué)院半導(dǎo)體研究所致力于電子元器件，以科技創(chuàng)新實(shí)現(xiàn)***管理的追求。公司自創(chuàng)立以來，投身于微納加工技術(shù)服務(wù)，真空鍍膜技術(shù)服務(wù)，紫外光刻技術(shù)服務(wù)，材料刻蝕技術(shù)服務(wù)，是電子元器件的主力軍。廣東省半導(dǎo)體所不斷開拓創(chuàng)新，追求出色，以技術(shù)為先導(dǎo)，以產(chǎn)品為平臺(tái)，以應(yīng)用為重點(diǎn)，以服務(wù)為保證，不斷為客戶創(chuàng)造更高價(jià)值，提供更優(yōu)服務(wù)。廣東省半導(dǎo)體所創(chuàng)始人陳志濤，始終關(guān)注客戶，創(chuàng)新科技，竭誠為客戶提供良好的服務(wù)。</p></p><br /><p>文章來源地址: http://www.cdcfah.com/cp/3094350.html</p></div></div></div></div></div><div id="veldkry" class="page-right twoColRt"><div id="sce8s3p" class="box01 margin10 clearfix"><h3><a 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