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class="content"><p><span>需求數(shù)量：</span>0</p><p><span>價格要求：</span>面議</p><p><span>所在地：</span>廣東省</p><p><span>包裝要求：</span><span style="color: #f30;"></span></p><p><span>產(chǎn)品關鍵詞：</span>黑龍江硅材料刻蝕平臺,材料刻蝕</p><p><span>***更新：</span>2021-02-02 04:17:49</p><p><span id="click" >瀏覽次數(shù)：1次</span></p><a rel="nofollow" class="button">聯(lián)系我們</a></div></div><div id="4c2a2ys" class="rightbox"><h3>公司基本資料信息</h3><p style="border:0;"><a rel="nofollow">廣東省科學院半導體研究所</a></p><p><span>聯(lián)系人：</span>曾昭燴</p><p><span>郵箱: </span>512480780@qq.com</p><p><span>電話: </span>15018420573</p><p><span>傳真: </span>020_</p><p><span>網(wǎng)址: </span>http://www.gdssli.com</p><p><span>手機: </span>020-61086422</p><p><span>地址: </span>長興路363號</p><p>[當前離線] <a rel="nofollow"> [加為商友] </a><a rel="nofollow"> [發(fā)送信件] </a></p></div></div><div id="iq2sgeu" class="page-proshow02"><p class="title">詳細說明</p><div id="wyaqqow" class="box"><p><p style="text-indent:25px">等離子刻蝕是干法刻蝕中較常見的一種形式。一種或多種氣體原子或分子混合于反應腔室中，在外部能量作用下（如射頻、微波等）形成等離子體。其原理是暴露在電子區(qū)域的氣體形成等離子體，由此產(chǎn)生的電離氣體和釋放高能電子組成的氣體，從而形成了等離子或離子，電離氣體原子通過電場加速時，會釋放足夠的力量與表面驅(qū)逐力緊緊粘合材料或蝕刻表面。一個等離子體干法刻蝕系統(tǒng)基本部件包括：發(fā)生刻蝕反應的反應腔、產(chǎn)生等離子體氣的射頻電源、氣體流量控制系統(tǒng)、去除生成物的真空系統(tǒng)?？涛g中會用到大量的化學氣體，通常用氟刻蝕二氧化硅，黑龍江硅材料刻蝕平臺，氯和氟刻蝕鋁，氯、氟和溴刻蝕硅，氧去除光刻膠。按材料來分，黑龍江硅材料刻蝕平臺，黑龍江硅材料刻蝕平臺，刻蝕主要分成三種：金屬刻蝕、介質(zhì)刻蝕、和硅刻蝕。黑龍江硅材料刻蝕平臺</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="黑龍江硅材料刻蝕平臺,材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343022162510/3890106.png"></div><p style="text-indent:25px">刻蝕也可以分成有圖形刻蝕和無圖形刻蝕。有圖形刻蝕采用掩蔽層（有圖形的光刻膠）來定義要刻蝕掉的表面材料區(qū)域，只有硅片上被選擇的這一部分在刻蝕過程中刻掉。有圖形刻蝕可用來在硅片上制作多種不同的特征圖形，包括柵、金屬互連線、通孔、接觸孔和溝槽。無圖形刻蝕、反刻或剝離是在整個硅片沒有掩模的情況下進行的，這種刻蝕工藝用于剝離掩模層（如STI氮化硅剝離和用于制備晶體管注入側(cè)墻的硅化物工藝后鈦的剝離）。反刻是在想要把某一層膜的總的厚度減小時采用的（如當平坦化硅片表面時需要減小形貌特征）。湖南氮化硅材料刻蝕工藝干法刻蝕也可以根據(jù)被刻蝕的材料類型來分類，如刻蝕氮化鎵、氧化硅、氮化硅、鋁鎵氮等材料。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="黑龍江硅材料刻蝕平臺,材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430343010112250/1147970.png"></div><p style="text-indent:25px">“刻蝕”指用化學和物理方法有選擇地從硅片表面去除不需要的材料，是晶圓制造中不可或缺的關鍵步驟。刻蝕技術按工藝可以分為濕法刻蝕與干法刻蝕，其中干法刻蝕是目前8英寸、12英寸先進制程中的主要刻蝕手段，干法刻蝕又多以“等離子體刻蝕”為主導。在刻蝕環(huán)節(jié)中，硅電極產(chǎn)生高電壓，令刻蝕氣體形成電離狀態(tài)，其與芯片同時處于刻蝕設備的同一腔體中，并隨著刻蝕進程而逐步被消耗，因此刻蝕電極也需要達到與晶圓一樣的半導體級的純度（11個9）。</p><p style="text-indent:25px">工藝所用化學物質(zhì)取決于要刻蝕的薄膜類型。介電刻蝕應用中通常使用含氟的化學物質(zhì)。硅和金屬刻蝕使用含氯成分的化學物質(zhì)。在工藝中可能會對一個薄膜層或多個薄膜層執(zhí)行特定的刻蝕步驟。當需要處理多層薄膜時，以及刻蝕中必須精確停在某個特定薄膜層而不對其造成損傷時，刻蝕工藝的選擇比就變得非常重要。選擇比是兩個刻蝕速率的比率：被去除層的刻蝕速率與被保護層的刻蝕速率（例如刻蝕掩膜或終止層）。掩?；蛲Ｖ箤樱┩ǔ６枷Ｍ懈叩倪x擇比。有圖形刻蝕和無圖形刻蝕工藝條件能夠采用干法刻蝕或濕法腐蝕技術來實現(xiàn)。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="黑龍江硅材料刻蝕平臺,材料刻蝕" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430342999769976/1129759.png"></div><p style="text-indent:25px">刻蝕是按照掩模圖形或設計要求對半導體襯底表面或表面覆蓋薄膜進行選擇性刻蝕的技術，它是半導體制造工藝，微電子IC制造工藝以及微納制造工藝中的一種相當重要的步驟。是與光刻相聯(lián)系的圖形化處理的一種主要工藝?？涛g分為干法刻蝕和濕法腐蝕。原位芯片目前掌握多種刻蝕工藝，并會根據(jù)客戶的需求，設計刻蝕效果好且性價比高的刻蝕解決方案。刻蝕技術主要應用于半導體器件，集成電路制造，薄膜電路，印刷電路和其他微細圖形的加工等。廣東省科學院半導體研究所。濕法刻蝕優(yōu)點是選擇性好、重復性好、生產(chǎn)效率高、設備簡單、成本低。湖南氮化硅材料刻蝕工藝</p><p style="text-indent:25px">在半導體制造中有兩種基本的刻蝕工藝：干法刻蝕和濕法腐蝕。黑龍江硅材料刻蝕平臺</p><p style="text-indent:25px">光刻膠是另一個剝離的例子?？偟膩碚f，有圖形刻蝕和無圖形刻蝕工藝條件能夠采用干法刻蝕或濕法腐蝕技術來實現(xiàn)。為了復制硅片表面材料上的掩膜圖形，刻蝕必須滿足一些特殊的要求。包括幾方面刻蝕參數(shù)：刻蝕速率、刻蝕剖面、刻蝕偏差、選擇比、均勻性、殘留物、聚合物、等離子體誘導損傷、顆粒玷污和缺陷等。刻蝕是用化學或物理方法有選擇的從硅片表面去除不需要的材料的過程?？涛g的基本目標是在涂膠的硅片上正確的復制掩模圖形。有圖形的光刻膠層在刻蝕中不受腐蝕源明顯的侵蝕。黑龍江硅材料刻蝕平臺</p><p style="text-indent:25px">廣東省科學院半導體研究所致力于電子元器件，是一家服務型公司。公司業(yè)務涵蓋微納加工技術服務，真空鍍膜技術服務，紫外光刻技術服務，材料刻蝕技術服務等，價格合理，品質(zhì)有保證。公司從事電子元器件多年，有著創(chuàng)新的設計、強大的技術，還有一批**的專業(yè)化的隊伍，確保為客戶提供良好的產(chǎn)品及服務。廣東省半導體所憑借創(chuàng)新的產(chǎn)品、專業(yè)的服務、眾多的成功案例積累起來的聲譽和口碑，讓企業(yè)發(fā)展再上新高。</p></p><br /><p>文章來源地址: 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