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>瀏覽次數(shù)：7次</span></p><a rel="nofollow" class="button">聯(lián)系我們</a></div></div><div id="3bdnlbr" class="rightbox"><h3>公司基本資料信息</h3><p style="border:0;"><a rel="nofollow">廣東省科學院半導體研究所</a></p><p><span>聯(lián)系人：</span>曾昭燴</p><p><span>郵箱: </span>512480780@qq.com</p><p><span>電話: </span>15018420573</p><p><span>傳真: </span>020_</p><p><span>網(wǎng)址: </span>http://www.gdssli.com</p><p><span>手機: </span>020-61086422</p><p><span>地址: </span>長興路363號</p><p>[當前離線] <a rel="nofollow"> [加為商友] </a><a rel="nofollow"> [發(fā)送信件] </a></p></div></div><div id="rl35lv5" class="page-proshow02"><p class="title">詳細說明</p><div id="hr3xpnt" class="box"><p><p style="text-indent:25px">磁控濺射的工作原理是指電子在外加電場的作用下，在飛向襯底過程中與氬原子發(fā)生碰撞，使其電離產生出Ar正離子和新的電子；新電子飛向襯底，Ar離子在電場作用下加速飛向陰極靶，并以高能量轟擊靶表面，使靶材發(fā)生濺射。在濺射粒子中，中性的靶原子或分子沉積在基片上形成薄膜，而產生的二次電子會受到電場和磁場作用，被束縛在靠近靶表面的等離子體區(qū)域內，以近似擺線形式在靶表面做圓周運動，并且在該區(qū)域中電離出大量的Ar 來轟擊靶材，從而實現(xiàn)了高的沉積速率。隨著碰撞次數(shù)的增加，二次電子的能量消耗殆盡，逐漸遠離靶表面，并在電場的作用下較終沉積在襯底上，廣州金屬真空鍍膜加工廠商。由于該電子的能量很低，傳遞給襯底的能量很小，廣州金屬真空鍍膜加工廠商，致使襯底溫升較低，廣州金屬真空鍍膜加工廠商。PECVD，等離子體化學氣相沉積法是借助微波或射頻等使含有薄膜組成原子的氣體電離。廣州金屬真空鍍膜加工廠商</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="廣州金屬真空鍍膜加工廠商,真空鍍膜" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430346254001587/8480104.png"></div><p style="text-indent:25px">熱氧化是在一定的溫度和氣體條件下，使硅片表面氧化一定厚度的氧化硅的。主要有干法氧化和濕法氧化，干法氧化是在硅片表面通入氧氣，硅片與氧化反應生成氧化硅，氧化速率比較慢，氧化膜厚容易控制。濕法氧化在爐管當中通入氧氣和氫氣，兩者反應生長水蒸氣，水蒸氣與硅片表面反應生長氧化硅，濕法氧化，速率比較快，可以生長比較厚的薄膜。對于薄膜應力主要有以下原因：1.薄膜生長初始階段，薄膜面和界面的表面張力的共同作用；2.沉積過程中膜面溫度遠高于襯底溫度產生熱應變；3.薄膜和襯底間點陣錯配而產生界面應力；4.金屬膜氧化后氧化物原子體積增大產生壓應力；5.斜入射造成各向異性成核、生長；6.薄膜內產生相變或化學組分改變導致原子體積變化。東莞貴金屬真空鍍膜公司化學氣相沉積技術是把含有構成薄膜元素的單質氣體或化合物供給基體。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="廣州金屬真空鍍膜加工廠商,真空鍍膜" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430346403182232/3256037.png"></div><p style="text-indent:25px">PECVD主要由工藝管及電阻加熱爐、凈化推舟系統(tǒng)、氣路系統(tǒng)、電氣控制系統(tǒng)、計算機控制系統(tǒng)、真空系統(tǒng)6大部分組成。PECVD的主要性能指標，PECVD設備的主要特點，該設備成膜種類為氮化硅，這種PECVD成膜均勻性好、穩(wěn)定性高。每片硅片間不均勻性誤差在5%之內，同一批硅片間的誤差在6%之內，不同批次硅片間誤差在7%之內。溫度要求比較低，成膜溫度為150℃～500℃，恒溫區(qū)溫度均勻，誤差范圍在2℃之內，并且在整個成膜過程中隨時間變化小，誤差范圍為2℃/24h之內。升溫時間較短，工作壓力范圍廣，恢復真空時間短，設備封閉性強并且具有溫度控制和計算機自動監(jiān)控等安全措施功能。除此之外，PECVD與一般CVD相比有更多的優(yōu)點。</p><p style="text-indent:25px">為了獲得性能良好的半導體電極Al膜，我們通過優(yōu)化工藝參數(shù)，制備了一系列性能優(yōu)越的Al薄膜。通過理論計算和性能測試，分析比較了電子束蒸發(fā)與磁控濺射兩種方法制備Al膜的特點。考慮Al膜的致密性就相當于考慮Al膜的晶粒的大小，密度以及能達到均勻化的程度，因為它也直接影響Al膜的其它性能，進而影響半導體嘩啦的性能。氣相沉積的多晶Al膜的晶粒尺寸隨著沉積過程中吸附原子或原子團在基片表面遷移率的增加而增加。由此可以看出Al膜的晶粒尺寸的大小將取決環(huán)于基片溫度、沉積速度、氣相原子在平行基片方面的速度分量、基片表面光潔度和化學活性等因素。電子束蒸發(fā)：將蒸發(fā)材料置于水冷坩堝中，利用電子束直接加熱使蒸發(fā)材料汽化并在襯底上凝結形成薄膜，是蒸度高熔點薄膜和高純薄膜的一種主要加熱方法。電子束蒸發(fā)法是真空蒸發(fā)鍍膜中常用的一種方法。</p><div style="width:100%;text-align: center;"><img style="max-width: 640px; max-height: 320px;" alt="廣州金屬真空鍍膜加工廠商,真空鍍膜" src="https://tyunfile.71360.com/UploadFile/bdtyys888/637430346306531246/6300759.png"></div><p style="text-indent:25px">薄膜應力的起源是薄膜生長過程中的某種結構不完整性(雜質、空位、晶粒邊界、錯位等)、表面能態(tài)的存在、薄膜與基底界面間的晶格錯配等磁控濺射由于其內部電場的存在，還可在襯底端引入一個負偏壓，使濺射速率和材料粒子的方向性增加。所以磁控濺射常用來沉積TSV結構的阻擋層和種子層，通過對相關參數(shù)的調整和引入負偏壓，可以實現(xiàn)高深寬比的薄膜濺射，且深孔內壁薄膜連續(xù)和良好的均勻性。通過PVD制備的薄膜通常存在應力問題，不同材料與襯底間可能存在壓應力或張應力，在多層膜結構中可能同時存在多種形式的應力。LPCVD反應的能量源是熱能，通常其溫度在500℃-1000℃之間。深圳光電器件真空鍍膜加工</p><p style="text-indent:25px">在鍍膜過程中，想要控制蒸發(fā)速率，必須精確控制蒸發(fā)源的溫度，加熱時應盡量避免產生過大的溫度梯度。廣州金屬真空鍍膜加工廠商</p><p style="text-indent:25px">使用等離子體增強氣相沉積法（PECVD）可在低溫（200-350℃）沉積出良好的氧化硅薄膜，已被普遍應用于半導體器件工藝當中。在LED工藝當中，因為PECVD生長出的氧化硅薄膜具有結構致密，介電強度高、硬度大等優(yōu)點，而且氧化硅薄膜對可見光波段吸收系數(shù)很小，所以氧化硅被用于芯片的絕緣層和鈍化層。評價氧化硅薄膜的質量，較簡單的方法是采用BOE腐蝕氧化硅薄膜，腐蝕速率越慢，薄膜質量越致密，反之，腐蝕速率越快，薄膜質量越差。另外，沉積速率的快慢也會影響到薄膜的質量，沉積速率過快，會導致氧化硅薄膜速率過快，說明薄膜質量比較差。廣州金屬真空鍍膜加工廠商</p><p style="text-indent:25px">廣東省科學院半導體研究所致力于電子元器件，是一家服務型公司。公司自成立以來，以質量為發(fā)展，讓匠心彌散在每個細節(jié)，公司旗下微納加工技術服務，真空鍍膜技術服務，紫外光刻技術服務，材料刻蝕技術服務深受客戶的喜愛。公司將不斷增強企業(yè)重點競爭力，努力學習行業(yè)知識，遵守行業(yè)規(guī)范，植根于電子元器件行業(yè)的發(fā)展。廣東省半導體所憑借創(chuàng)新的產品、專業(yè)的服務、眾多的成功案例積累起來的聲譽和口碑，讓企業(yè)發(fā)展再上新高。</p></p><br /><p>文章來源地址: http://www.cdcfah.com/cp/3204749.html</p></div></div></div></div></div><div id="xdpndvb" class="page-right twoColRt"><div id="7bb55zx" class="box01 margin10 clearfix"><h3><a href="http://www.cdcfah.com/cp/">猜你喜歡</a></h3><div id="17dbzhz" class="recomPic likePro"><a href="http://www.cdcfah.com/cp/814588.html"><div><img src="http://tyunfile.71360.com/UpLoadFile/2019/11/1/14/637082168864691056_lgpj_5374157.jpg" alt="福建ZF配件哪家強信息推薦自業(yè)物資供應" class="vcenter" onerror="javascript:this.src='/static/new_net_01/images/nopic.jpg';"></div><p>福建ZF配件哪家強信息推薦自業(yè)物資供應</p></a></div><div id="dvtjzxx" class="recomPic likePro"><a href="http://www.cdcfah.com/cp/846569.html"><div><img 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